Channel cut polishing machine

Patent metadata

Field	Value
Publication number	US-12134164-B2
Application number	US-202016897426-A
Country	US
Kind code	B2
Filing date	Jun 10, 2020
Priority date	Sep 29, 2017
Publication date	Nov 5, 2024
Grant date	Nov 5, 2024

Abstract

A device for polishing of a multi-surface workpiece is described. The device includes a base and a vertical motion platform that moves along two support rods, which carries a motor that drives a rotating shaft. The support rods extend from said base. A polishing tool is attached to the motor shaft. The workpiece being polished is placed on a linear motion stage during the polishing process.

First claim

An exclusive property right or privilege is claimed in the invention as defined by the following claims:

1. A method of polishing of a workpiece comprising:
placing the workpiece on a tray;
removably mounting the workpiece to the tray using an adhesive;
wherein said tray is attached to a support base and wherein said support base is in turn attached to an alignment and a linear motion stage wherein the alignment and linear motion stage is capable of moving in a horizontal direction;

installing a polishing pad on a polishing tool;
attaching the polishing tool on a rotating shaft;
attaching the rotating shaft to a motor installed on a vertical motion platform;
wherein said vertical motion platform is disposed above the workpiece removably mounted to the tray;

beginning the rotation of the polishing tool;
lowering the polishing tool to the workpiece;
contacting the rotating polishing pad with regions of workpiece surfaces;
moving the linear motion stage and the vertical motion platform to polish the regions of the workpiece;
detecting the surface profile of the workpiece;
ceasing the rotation of the polishing pad upon detection of a smooth surface on the workpiece;
raising of the vertical platform and the polishing tool; and
removing of the workpiece, wherein contact-less measurements are made to determine when polishing is completed.

2. The method of claim 1 further comprising introducing a slurry during the step of contacting the rotating polishing tool with the workpiece.

3. The method of claim 2 wherein said slurry is drained into a waste container in communication with the workpiece tray.

4. The method of claim 1 wherein said workpiece comprises a channel-cut crystal.

5. The method of claim 1 wherein said attaching of the polishing tool on a rotating shaft comprises use of a swiveling head to attach the polishing tool to the rotating shaft.

6. The method of claim 1 wherein said motion of the linear motion stage and the motion of the vertical motion platform is controlled by a computer.

7. The method of claim 1 wherein motion of the linear motion stage is controlled independently of the motion of the vertical motion platform.

8. The method of claim 1 wherein said polishing disk is selected to minimize its deflection during polishing.

9. The method of claim 1 wherein said rotation speed is controlled using a controller.

10. The method of claim 1 wherein the contact-less measurements occur prior to lowering the polishing tool to the workpiece and comprise an iterative process whereby a surface profile topographical map of the workpiece is generated, then the polishing tool performs one or more passes, and then another topographical map is generated.

11. The method as recited in claim 10 wherein the iterative process creates data on an unpolished surface of the workpiece, data on a simulated polished surface, and data on a polished surface.

12. The method as recited in claim 11 wherein the data is fed to an algorithm which provides guidance as to when the polishing tool should be used and the duration of polishing.

13. A method of polishing of a workpiece comprising:
placing the workpiece on a tray;
removably mounting the workpiece to the tray using an adhesive;
wherein said tray is attached to a support base and wherein said support base is in turn attached to an alignment and linear motion stage wherein the alignment and linear motion stage is capable of moving to in a horizontal direction;

installing a polishing pad on a polishing tool;
attaching the polishing tool on a rotating shaft;
attaching the rotating shaft to a motor installed on a vertical motion platform;
wherein said vertical motion platform is disposed above the workpiece reversibly attached to the tray;

beginning the rotation of the polishing tool;
lowering the polishing tool to the workpiece;
contacting the rotating polishing pad with regions of workpiece surfaces;
moving the linear motion stage and the vertical motion platform to polish the regions of the workpiece;
detecting the surface profile of the workpiece;
ceasing the rotation of the polishing pad upon detection of a smooth surface on the workpiece;
raising of the vertical platform and the polishing tool; and
removing of the workpiece
further comprising attaching at least one outrigger block to said tray containing the workpiece at the beginning of the process.

14. The method as recited in claim 13 further comprising introducing a slurry during the step of contacting the rotating polishing tool with the workpiece.

15. The method as recited in claim 14 wherein said slurry is drained into a waste container in communication with the workpiece tray.

16. The method as recited in claim 13 wherein said motion of the alignment and linear motion stage and the motion of the vertical motion platform is controlled by a computer.

17. The method as recited in claim 13 wherein motion of the alignment and linear motion stage is controlled independently of the motion of the vertical motion platform.

18. The method as recited in claim 13 wherein said workpiece comprises a channel-cut crystal.

19. The method as recited in claim 13 wherein the polishing disk is selected to minimize its deflection during polishing.

20. The method as recited in claim 13 wherein said motion of the linear motion stage and the motion of the vertical motion platform is controlled by a computer.

Assignees

• Uchicago Argonne Llc

Inventors

• Kasman Elina
• Montgomery Jonathan

Classifications

• B24B41/00

  Component parts such as frames, beds, carriages, headstocks · CPC title

• B24B37/013

  Devices or means for detecting lapping completion · CPC title

• B24B37/34

  Accessories · CPC title

• B24B41/068

  Table-like supports for panels, sheets or the like · CPC title

• B24B37/04

  designed for working plane surfaces · CPC title