Laser light source and a laser crystallization apparatus including the same

Patent metadata

Field	Value
Publication number	US-12131920-B2
Application number	US-202318139414-A
Country	US
Kind code	B2
Filing date	Apr 26, 2023
Priority date	Aug 26, 2019
Publication date	Oct 29, 2024
Grant date	Oct 29, 2024

Abstract

A laser light source is provided including an airtight container. A first resonance mirror and a second resonance mirror are disposed outside the airtight container. The first resonance mirror includes a lens unit and a reflection coating layer. The lens unit includes a first surface and a second surface, and the first surface is inclined with respect to the second surface.

First claim

What is claimed is:

1. A laser light source, comprising:
an airtight container; and
a first resonance mirror and a second resonance mirror outside the airtight container,
wherein the first resonance mirror includes a lens unit and a reflection coating layer,
the lens unit includes a first surface and a second surface,
the first surface is disposed between the airtight container and the second surface, and
the first surface of the lens unit of the first resonance mirror is spiral.

2. The laser light source of claim 1 , wherein
the reflection coating layer is disposed on the second surface of the lens unit of the first resonance mirror.

3. The laser light source of claim 1 , wherein
the reflection coating layer is disposed inside the lens unit between the first surface and the second surface of the lens unit.

4. The laser light source of claim 1 , wherein
the reflection coating layer is disposed on the first surface of the lens unit of the first resonance mirror.

5. The laser light source of claim 1 , wherein
the second resonance mirror includes a third surface and a fourth surface and
wherein the fourth surface is inclined with respect to the third surface.

6. A laser light source, comprising:
an airtight container; and
a first resonance mirror and a second resonance mirror outside the airtight container,
wherein
the first resonance mirror includes a lens unit and a reflection coating layer,
the lens unit includes a first surface and a second surface,
the first surface is disposed between the airtight container and the second surface,
the first surface of the lens unit includes a first inclined surface and a second inclined surface, and
the first inclined surface and the second inclined surface are not parallel.

7. The laser light source of claim 6 , wherein
the reflection coating layer is disposed on the second surface of the lens unit of the first resonance mirror.

8. The laser light source of claim 6 , wherein
the reflection coating layer is disposed inside the lens unit between the first surface and the second surface of the lens unit.

9. The laser light source of claim 6 , wherein
the reflection coating layer is disposed on the first surface of the lens unit of the first resonance mirror.

10. The laser light source of claim 6 , wherein
a part where the first inclined surface and the second inclined surface of the lens unit meet has a minimum thickness of the lens unit in a direction perpendicularly extending from the second surface.

11. The laser light source of claim 10 , wherein
an angle formed between the first inclined surface and the second inclined surface is greater than 180° and less than 360°.

12. The laser light source of claim 6 , wherein
a part where the first inclined surface and the second inclined surface of the lens unit meet has a maximum thickness of the lens unit in a direction perpendicularly extending from the second surface.

13. The laser light source of claim 12 , wherein
an angle formed between the first inclined surface and the second inclined surface is greater than 0° and less than 180°.

14. The laser light source of claim 6 , wherein
the second resonance mirror includes a third surface and a fourth surface and
wherein the fourth surface is inclined with respect to the third surface.

15. A laser light source, comprising:
an airtight container; and
a first resonance mirror and a second resonance mirror outside the airtight container,
wherein
the first resonance mirror includes a lens unit and a reflection coating layer,
the lens unit includes a first surface and a second surface,
the first surface is disposed between the airtight container and the second surface,
the first surface of the lens unit includes a first inclined surface, a second inclined surface, a third inclined surface and a fourth inclined surface, and
the first inclined surface, the second inclined surface, the third inclined surface and the fourth inclined surface are not parallel.

16. The laser light source of claim 15 , wherein
the reflection coating layer is disposed on the second surface of the lens unit of the first resonance mirror.

17. The laser light source of claim 15 , wherein
the reflection coating layer is disposed inside the lens unit between the first surface and the second surface of the lens unit.

18. The laser light source of claim 15 , wherein
the reflection coating layer is disposed on the first surface of the lens unit of the first resonance mirror.

19. The laser light source of claim 15 , wherein
a point where the first inclined surface, the second inclined surface, the third inclined surface, and the fourth inclined surface of the lens unit all meet has a minimum thickness of the lens unit in a direction perpendicularly extending from the second surface.

20. The laser light source of claim 15 , wherein
a point where the first inclined surface, the second inclined surface, the third inclined surface, and the fourth inclined surface of the lens unit all meet has a maximum thickness of the lens unit in a direction perpendicularly extending from the second surface.

Assignees

• Samsung Display Co Ltd

Inventors

• Choi Kyong Sik
• Shin Dong Hoon
• Ryoo Hoon Chul
• Kim Kyeong Mok
• Moon Jae-Woong
• Park Kyong Ho
• Seok Ki Hwan
• Son Myoung Seok
• Lee Hong Ro

Classifications

• H10P14/3808

  using laser beams · CPC title

• H10P72/0436 Primary

  mainly by radiation · CPC title

• H10P34/42

  with electromagnetic radiation, e.g. laser annealing (laser cutting H10P54/20) · CPC title

• H01S5/0071

  for beam steering, e.g. using a mirror outside the cavity to change the beam direction · CPC title

• G02B1/10

  Optical coatings produced by application to, or surface treatment of, optical elements (G02B1/08 takes precedence) · CPC title