Compact traversing robot

Patent metadata

Field	Value
Publication number	US-12128558-B2
Application number	US-202117189381-A
Country	US
Kind code	B2
Filing date	Mar 2, 2021
Priority date	Mar 2, 2020
Publication date	Oct 29, 2024
Grant date	Oct 29, 2024

Abstract

An apparatus includes a spindle platform; a traversing platform configured to move in a first direction; a lift system connected to the spindle platform and the traversing platform, the lift system configured to move the spindle platform in a second direction perpendicular to the first direction; a movable arm connected to the spindle platform, the movable arm including a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link, and a first actuator connected to the spindle platform and configured to cause a rotation of the first link, and a second actuator in the movable arm and configured to cause a rotation of the second link. The first actuator extends from the spindle platform into the first link to occupy a combined thickness of the spindle platform and the first link.

First claim

What is claimed is:

1. An apparatus, comprising:
a spindle platform;
a traversing platform configured to move in a first direction;
a lift system connected to the spindle platform and the traversing platform, the lift system being configured to move the spindle platform in a second direction between a collapsed position and an extended position, the second direction being perpendicular to the first direction;
at least one movable arm connected to the spindle platform, the at least one movable arm comprising a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link,
at least one first actuator connected to the spindle platform and being configured to cause a rotation of the first link, and at least one second actuator in the at least one movable arm and being configured to cause a rotation of the second link; and
a master control located on the traversing platform, the master control coordinating a first control of the at least one first actuator, a second control of the at least one second actuator, and a third control of the lift system;
wherein the at least one first actuator extends from the spindle platform into the first link to occupy a combined thickness of the spindle platform and the first link; and
wherein the at least one first actuator is configured to nest with the at least one second actuator.

2. The apparatus of claim 1 , wherein the at least one first actuator and the at least one second actuator are configured to overlap in a vertical direction.

3. The apparatus of claim 1 , further comprising a linear guidance system on the traversing platform, the linear guidance system being configured to constrain a motion of the traversing platform in a linear direction.

4. The apparatus of claim 3 , wherein the linear guidance system comprises at least one linear bearing on the traversing platform, the at least one linear bearing being configured to engage and slide on a rail.

5. The apparatus of claim 1 , further comprising a linear actuation system on the traversing platform, the linear actuation system being configured to move the traversing platform in a linear direction.

6. The apparatus of claim 5 , wherein the linear actuation system comprises a linear actuator and at least one position sensor.

7. The apparatus of claim 6 , wherein the linear actuator comprises a permanent magnet motor having at least one coil, the at least one coil being configured to magnetically engage a track.

8. The apparatus of claim 6 , wherein the at least one position sensor is located on the traversing platform and is configured to be controlled along the linear direction using a control.

9. The apparatus of claim 1 , wherein the lift system comprises at least one linkage extending between and rotatable relative to the traversing platform and the spindle platform.

10. The apparatus of claim 9 , wherein the at least one linkage is rotatable on the traversing platform using a rotary actuator.

11. The apparatus of claim 10 , wherein the rotary actuator is controllable using a control to maintain the spindle platform in a substantially leveled position relative to the traversing platform.

12. The apparatus of claim 1 , wherein the lift system further comprises a counterbalancing spring.

13. A method, comprising:
providing a traversing platform configured to move in a first direction;
providing a spindle platform;
providing a lift system connected to the spindle platform and the traversing platform, the lift system being configured to move the spindle platform in a second direction between a collapsed position and an extended position, the second direction being perpendicular to the first direction; and
providing at least one movable arm connected to the spindle platform, the at least one movable arm comprising a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link;
providing at least one first actuator connected to the spindle platform and being configured to cause a rotation of the first link, and providing at least one second actuator in the at least one movable arm and being configured to cause a rotation of the second link; and
providing a master control on the traversing platform, the master control coordinating a first control of the at least one first actuator, a second control of the at least one second actuator, and a third control of the spindle platform;
wherein the first actuator extends from the spindle platform into the first link to occupy a combined thickness of the spindle platform and the first link; and
wherein the at least one first actuator and the at least one second actuator are configured to overlap in a vertical direction.

14. The method of claim 13 , further comprising providing a linear guidance system on the traversing platform, the linear guidance system being configured to constrain a motion of the traversing platform in a linear direction.

15. The method of claim 13 , further comprising providing a linear actuation system on the traversing platform, the linear actuation system being configured to move the traversing platform in a linear direction.

16. The method of claim 13 , further comprising using a position sensor and a control to control a movement of the traversing platform in the first direction.

17. The method of claim 13 , further comprising using the third control to control a movement of the spindle platform in the second direction.

18. An apparatus, comprising:
at least one processor; and
at least one non-transitory memory including computer program code, the at least one memory and the computer program code configured to, with the at least one processor, cause the apparatus at least to perform:
moving a traversing platform in a first direction;
operating a lift system connected to the traversing platform and to a spindle platform to move the spindle platform in a second direction between a collapsed position and an extended position, the second direction being perpendicular to the first direction;
operating at least one movable arm connected to the spindle platform, the at least one movable arm comprising a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link;
operating at least one first actuator means connected to the spindle platform and being configured to cause a rotation of the first link, and at least one second actuator means in the at least one movable arm and being configured to cause a rotation of the second link; and
operating a master control on the traversing platform, the master control coordinating a first control of the at least one first actuator means, a second control of the at least one second actuator means, and a third control of the movement of the spindle platform in the second direction;
wherein the first actuator means extends from the spindle platform into the first link to occupy a combined thickness of the spindle platform and the first link; and
wherein the first actuator means is nested with the second actuator means.

19. The apparatus of claim 18 , wherein moving the traversing platform in the first direction comprises using a linear drive system to move the traversing platform along a rail.

20. The apparatus of claim 19 , wherein using a linear drive system to move the traversing platform along the rail comprises operating a permanent magnet motor having a coil arrangement along a magnet track

Assignees

• Persimmon Tech Corporation

Inventors

• Hosek Martin

Classifications

• B25J11/0095 Primary

  Manipulators transporting wafers · CPC title

• B25J9/126

  Rotary actuators · CPC title

• B25J5/02 Primary

  travelling along a guideway · CPC title

• B25J9/123

  Linear actuators · CPC title

• B25J9/1005

  comprising adjusting means · CPC title