Film forming device

Patent metadata

Field	Value
Publication number	US-12123093-B2
Application number	US-202217674856-A
Country	US
Kind code	B2
Filing date	Feb 18, 2022
Priority date	Sep 30, 2019
Publication date	Oct 22, 2024
Grant date	Oct 22, 2024

Abstract

Provided is a film forming device that deposits, on a substrate, a product generated by decomposing raw material gas by a plasma discharged from a discharge port of a double tube, the device including: an inner tube through which raw material gas containing a film-forming raw material flows and is guided to the discharge port on a downstream side; an outer tube that has the inner tube inserted thereinto and through which plasma-generating gas flows and a plasma generated by discharge is guided to the discharge port on the downstream side; a first electrode that is formed in an annular shape around the outer tube and grounded; and a second electrode that is formed in an annular shape around the outer tube and to which a voltage is applied. The second electrode is disposed on the downstream side with respect to the first electrode, and assuming that a length of the second electrode in an axial direction is L1 and a diameter of the outer tube is D1, a relationship of L1≥D1 is satisfied.

First claim

What is claimed is:

1. A film forming device that deposits, on a substrate, a product generated by decomposing raw material gas by a plasma discharged from a discharge port of a double tube, the device comprising:
an inner tube through which raw material gas containing a film-forming raw material flows and is guided to the discharge port on a downstream side;
an outer tube that has the inner tube inserted thereinto and through which plasma-generating gas flows and a plasma generated by an electric discharge is guided to the discharge port on the downstream side;
a first electrode that is formed in an annular shape around the outer tube and grounded; and
a second electrode that is formed in an annular shape around the outer tube and to which a voltage is applied,
wherein the second electrode is disposed on the downstream side with respect to the first electrode, and assuming that a length of the second electrode in an axial direction is L1 and a diameter of the outer tube is D1, a relationship of L1≥D1 is satisfied, and
wherein no other electrodes are disposed between the second electrode and the discharge port.

2. The film forming device according to claim 1 ,
wherein a relationship of 1≤L1/D1≤10 is satisfied.

3. The film forming device according to claim 1 ,
wherein assuming that a diameter of the inner tube is D2, a relationship of D2/D1≤0.7 is satisfied.

4. The film forming device according to claim 1 ,
wherein, at the discharge port, a protrusion amount of an end part of the inner tube in the axial direction with respect to an end part of the outer tube is more than 0 mm.

5. The film forming device according to claim 1 ,
wherein the substrate is an insulator, and a third electrode is formed on a surface of the substrate opposite to a surface facing the discharge port.

6. The film forming device according to claim 5 ,
wherein the third electrode is grounded.

7. The film forming device according to claim 5 ,
wherein a negative voltage is applied to the third electrode.

8. The film forming device according to claim 7 ,
wherein the negative voltage applied to the third electrode is a direct current or a direct current pulse.

9. The film forming device according to claim 1 , further comprising:
a transport unit that relatively moves the substrate with respect to the discharge port.

10. The film forming device according to claim 1 ,
wherein an AC voltage or a pulsed voltage having a frequency of 500 kHz or less is applied to the second electrode.

Assignees

• Fujifilm Corp

Inventors

• Mochizuki Yoshihiko
• Seki Tomokazu

Classifications

• H05H1/26

  Plasma torches · CPC title

• H01J37/32568

  Relative arrangement or disposition of electrodes; moving means · CPC title

• C23C16/45576

  Coaxial inlets for each gas · CPC title

• H01J37/32825

  Working under atmospheric pressure or higher · CPC title

• C23C16/515 Primary

  using pulsed discharges · CPC title