System for monitoring environment and monitoring method based on system for monitoring environment

Patent metadata

Field	Value
Publication number	US-12117376-B2
Application number	US-202117504586-A
Country	US
Kind code	B2
Filing date	Oct 19, 2021
Priority date	Sep 16, 2020
Publication date	Oct 15, 2024
Grant date	Oct 15, 2024

Abstract

Embodiments provide a system for monitoring an environment and a monitoring method based on a system for monitoring an environment. The system for monitoring the environment includes: a sampling device, configured to collect environmental samples from the process areas and including a system sampling pipeline, the environmental sample containing air; an analysis device, connected to an output end of the system sampling pipeline and configured to analyze the collected environmental samples; and an air supply device, connected to the system sampling pipeline and configured to provide a purge gas and purge the system sampling pipeline using the purge gas. In a period for a single sampling, a ratio between a time period for purging the system sampling pipeline using the air supply device and a time period for sampling by the sampling device is controlled to be 1:5.

First claim

The invention claimed is:

1. A monitoring method based on a system for monitoring an environment, used for monitoring concentrations of airborne contaminants in a plurality of process areas in a clean room, the system for monitoring the environment comprising:
a sampling device, configured to collect environmental samples of the process areas and comprising a system sampling pipeline, the environmental sample comprising air; an analysis device, connected to an output end of the system sampling pipeline and configured to analyze the collected environmental samples; and an air supply device, connected to the system sampling pipeline and configured to provide a purge gas and purge the system sampling pipeline using the purge gas;
the monitoring method comprising: controlling a ratio between a time period for purging the system sampling pipeline by using the air supply device and a time period for sampling by using the sampling device to be 1:5, in a period for a single sampling;
wherein the sampling device further comprises a plurality of single sampling pipelines; each of the process areas is connected and corresponds to one of the single sampling pipelines, and the single sampling pipelines correspondingly connected to different process areas are different; the sampling device further comprises a sampling valve, configured to connect or disconnect the single sampling pipelines and the system sampling pipeline;
wherein the system for monitoring the environment further comprises:
a cleaning pipeline, having a first end configured to introduce a clean dry air and a second end connected to the single sampling pipeline, the sampling valve being further configured to control the single sampling pipeline to connect to the cleaning pipeline; and an air inlet pipeline, having one end connected to the first end of the cleaning pipeline and other end configured to introduce the clean dry air;
the monitoring method further comprises:
controlling a ratio between a time period for introducing the clean dry air through the air inlet pipeline and the time period for sampling by using the sampling device to be 1:5, in the period for the single sampling.

2. The monitoring method of claim 1 ,
further comprising: controlling the sampling valve to connect one of the single sampling pipelines corresponding to one of the target process areas to the system sampling pipeline, and disconnect other ones of the single sampling pipelines from the system sampling pipeline; analyzing the environmental sample collected from the one of the target process areas by using the analysis device.

3. The monitoring method of claim 1 , further comprising: in the period for the single sampling, controlling a purging for the system sampling pipeline by using the air supply device and the introducing of the clean dry air through the air inlet pipeline to start at the same time and stop at the same time.

4. The monitoring method of claim 1 , wherein the system for monitoring the environment further comprises a humidification device, configured to provide a water mist, connected between the air supply device and the system sampling pipeline, and also connected between the air inlet pipeline and the cleaning pipeline;
the monitoring method further comprises: generating the water mist by the humidification device to mix with the purge gas and then enter the system sampling pipeline; and cleaning the sampling valve and the single sampling pipeline through a mixture of the clean dry air and the water mist.

5. The monitoring method of claim 4 , wherein the humidification device comprises a humidification pipeline, connected between the system sampling pipeline and the air supply device;
the monitoring method further comprises: controlling the purge gas and the water mist to be mixed and transmitted to the system sampling pipeline via the humidification pipeline.

6. The monitoring method of claim 5 , wherein the humidification device further comprises a drying pipeline, independent of the humidification pipeline, connected between the air supply device and the system sampling pipeline, and configured to transmit the purge gas to the system sampling pipeline; and a switch valve, disposed on the humidification pipeline and the drying pipeline;
the monitoring method further comprises: switching one of the humidification pipeline and the drying pipeline to be connected to the system sampling pipeline, and the other one of the humidification pipeline and the drying pipeline to be disconnected from the system sampling pipeline, by using the switch valve.

7. The monitoring method of claim 6 , wherein the analysis device is further configured to analyze a gas purged from the system sampling pipeline to the analysis device;
the monitoring method further comprises: controlling, based on an analysis result of the analysis device, the switch valve to switch one of the drying pipeline and the humidification pipeline to be connected to the system sampling pipeline, and the other one of the drying pipeline and the humidification pipeline to be disconnected from the system sampling pipeline.

8. The monitoring method of claim 6 , further comprising: setting a time period for a connection between the humidification pipeline and the system sampling pipeline, and setting a time period for a connection between the drying pipeline and the system sampling pipeline.

9. The monitoring method of claim 1 , wherein the sampling device comprises a sampling pump, located between the system sampling pipeline and the analysis device;
the monitoring method further comprises: during sampling, operating the sampling pump to collect the environmental samples from the process areas, and transmitting the collected environmental samples to the analysis device.

10. A system for monitoring an environment, used for monitoring concentrations of airborne contaminants in a plurality of process areas in a clean room, the system comprising an air supply device, a sampling device, an analysis device, and a control device, wherein:
the air supply device is connected to a system sampling pipeline and configured to provide a purge gas and purge the system sampling pipeline by using the purge gas;
the sampling device comprises the system sampling pipeline and is configured to collect environmental samples from the process areas, the environmental sample comprising air;
the analysis device is connected to an output end of the system sampling pipeline and configured to analyze the collected environmental sample; and
the control device is configured to control, in a period for a single sampling, a ratio between a time period for purging the system sampling pipeline by using the air supply device and a time period for sampling by using the sampling device to be 1:5;
wherein the sampling device further comprises a plurality of single sampling pipelines; each of the process areas is connected and corresponds to one of the single sampling pipelines, and the single sampling pipelines correspondingly connected to different process areas are different:
the sampling device further comprises a sampling valve, configured to connect or disconnect the single sampling pipelines and the system sampling pipeline;
wherein the system further comprises a cleaning pipeline, having a first end configured to introduce a clean dry air and a second end connected to the single sampling pipeline, the sampling valve being further configured to control the single sampling pipeline to connect to the cleaning pipeline; and an air inlet pipeline, having one end connected to the first end of the cleaning pipeline and other end configured to introduce the clean dry air;
the control device is further configured to control, in the period for t

Assignees

• Changxin Memory Tech Inc

Inventors

• Wang Xubao
• Ding Yunxiao

Classifications

• G01N1/38

  Diluting, dispersing or mixing samples · CPC title

• G01N2001/2264

  with dilution · CPC title

• G01N2001/387

  mixing by blowing a gas, bubbling · CPC title

• G01N1/2273

  Atmospheric sampling · CPC title

• G01N1/2247 Primary

  Sampling from a flowing stream of gas · CPC title