Fluid circuit with integrated electrostatic discharge mitigation

Patent metadata

Field	Value
Publication number	US-12117106-B2
Application number	US-202217838024-A
Country	US
Kind code	B2
Filing date	Jun 10, 2022
Priority date	Jun 1, 2016
Publication date	Oct 15, 2024
Grant date	Oct 15, 2024

Abstract

A flow path for a fluid from a fluid supply which may include a plurality of operative components including a body portion and a plurality of tubing connector fittings. The operative components may be connected by a plurality of tubing segments. Each body portion may include a nonconductive fluoropolymer portion and an outer conductor that extends between each of the plurality of tubing connector fittings and that is unitary with the non-conductive fluoropolymer portion. The plurality of tubing segments may include a non-conductive fluoropolymer tubing portion and an axial strip of conductive polymer. The outer conductor of each body portion conductively connected with tubing segments connected thereto. Each of the connectors may include a bridging component for conductively connecting the respective outer conductor of the body portion to the strip of conductive polymer of the connecting tubing segments.

First claim

What is claimed is:

1. A fluid circuit defining a flow path for a fluid from a fluid supply toward a process stage, the fluid circuit comprising:
a plurality of operative components, each operative component comprising a body portion with a fluid flow passageway therethrough and
a plurality of tubing connector fittings, the operative components connected by a plurality of tubing segments connecting to the components at their respective tubing connector fittings,
the plurality of tubing segments and operative components providing the flow path through the fluid circuit;
wherein each body portion comprises a non-conductive fluoropolymer portion, the non-conductive fluoropolymer portion defining the fluid passageway and extending to ends of each of the respective plurality of tubing connector fittings, each body portion further comprising an outer conductor that extends between each of the plurality of tubing connector fittings and that is unitary with the non-conductive fluoropolymer portion, the plurality of tubing segments each comprising a non-conductive fluoropolymer tubing portion and a strip of conductive polymer extending axially on and unitary with the non-conductive fluoropolymer tubing portion; wherein each of the connectors having a bridging component for conductively connecting the respective outer conductor of the body portion to the strip of conductive polymer of the tubing portion connected to the connector.

2. The fluid circuit of claim 1 , wherein each of the pair of tubing connector fittings comprises a threaded nipple portion and a conductive nut attachable to the threaded nipple portion, and wherein the bridging component is the conductive nut.

3. The fluid circuit of claim 1 , wherein the plurality of operative components includes any one of a valve, a filter, a T-connector, an elbow connector, a pump, and a sensor.

4. The fluid circuit of claim 1 , wherein at least one of the component body portions comprise an attachment feature that is conductively connected to the outer conductor of said respective component body portion.

5. The fluid circuit of claim 1 , further comprising a conductive O-ring.

6. The fluid circuit of claim 5 , wherein the conductive O-ring comprises a conductive fluoropolymer.

7. The fluid circuit of claim 6 , wherein the conductive fluoropolymer is a conductive perfluoroalkoxy alkane (PFA) fluoropolymer.

8. The fluid circuit of claim 1 , further comprising a nut comprising conductive fluoropolymer to electrically connect a tubing segment to an operative component.

9. The fluid circuit of claim 8 , wherein the conductive fluoropolymer is a conductive perfluoroalkoxy alkane (PFA) fluoropolymer.

10. The fluid circuit of claim 9 , wherein the conductive PEA is a PFA comprising conductive carbon.

11. A fluid circuit comprising:
a plurality of operative components, each operative component comprising a body portion with a fluid flow passageway therethrough, each operative component further comprising an electrical connector connectable to ground to reduce electrostatic discharge;
a plurality of tubing segments, each of the plurality tubing segment comprising an external conductive polymer stripe; and
a plurality of conductive tubing connector fittings connecting the plurality of tubing segments with the plurality of operative components,
wherein each of the plurality of conductive tubing connector fittings comprise:
a nipple to receive a respective tubing segment of the plurality of tubing segments; and
a conductive nut to secure the respective tubing segment of the plurality of tubing segments to the nipple, wherein the conductive nut electrically connects the external conductive polymer stripe of the tubing segment with the electrical connector of the operative component.

12. The fluid circuit of claim 11 , further comprising a conductive O-ring contacting the conductive nut.

13. The fluid circuit of claim 12 , wherein the conductive O-ring comprises a conductive fluoropolymer.

14. The fluid circuit of claim 13 , wherein the conductive fluoropolymer comprises a conductive carbon loaded perfluoroalkoxy alkane (PFA).

15. The fluid circuit of claim 11 , wherein the conductive nut comprises a conductive carbon loaded perfluoroalkoxy alkane (PFA).

Assignees

• Entegris Inc

Inventors

• Leys John A

Classifications

• B01D39/1692

  Other shaped material, e.g. perforated or porous sheets · CPC title

• B01D69/107

  Organic support material · CPC title

• B01D2313/44

  Cartridge types · CPC title

• F16L47/04

  with a swivel nut or collar engaging the pipe · CPC title

• B01D2325/26

  Electrical properties · CPC title