Vacuum pump including magnetic bearing and motor bearing operable as radial magnetic bearing, motor, and thrust magnetic bearing

Patent metadata

Field	Value
Publication number	US-12117009-B2
Application number	US-201917604230-A
Country	US
Kind code	B2
Filing date	Apr 25, 2019
Priority date	Apr 25, 2019
Publication date	Oct 15, 2024
Grant date	Oct 15, 2024

Abstract

A rotation mechanism ( 20 ) of a vacuum pump ( 100 ) includes a magnetic bearing unit ( 21 ) having a first outer diameter ( 91 ), the magnetic bearing unit ( 21 ) being operable as a first radial magnetic bearing ( 40 ), and a motor unit ( 22 ) provided on a side of a second end ( 11 b ) of a rotary shaft ( 11 ) relative to the magnetic bearing unit, the motor unit ( 22 ) having a second outer diameter ( 92 ) larger than the first outer diameter, the motor unit ( 22 ) being operable as both a motor ( 30 ) and a second radial magnetic bearing ( 50 ).

First claim

The invention claimed is:

1. A vacuum pump comprising:
a rotary body including a rotary shaft, the rotary shaft having a first end and a second end, the rotary shaft extending in an axial direction thereof, a blade support connected to the first end of the rotary shaft, the blade support having a shape extending such that an inner diameter thereof increases from the first end side toward the second end side in the axial direction of the rotary shaft, and a rotor blade provided on an outer peripheral surface of the blade support; and
a rotation mechanism including a motor configured to rotationally drive the rotary body, first and second radial magnetic bearings each configured to support the rotary body in a radial direction of the rotary shaft, and a thrust bearing configured to support the rotary body in the axial direction; wherein
the rotation mechanism includes:
a magnetic bearing unit provided around the rotary shaft between the rotary shaft and the blade support, the magnetic bearing unit having a first outer diameter, the magnetic bearing unit being operable as the first radial magnetic bearing; and
a motor unit provided around the rotary shaft on the second end side of the rotary shaft relative to the magnetic bearing unit, the motor unit having a second outer diameter larger than the first outer diameter, the motor unit being operable as both the motor and the second radial magnetic bearing, wherein
the thrust bearing includes a thrust magnetic bearing provided around the rotary shaft;
the thrust magnetic bearing includes a magnet and a thrust coil, both of which are configured to generate magnetic fluxes that pass through the rotary shaft in the axial direction, respectively,
the magnetic bearing unit is further operable as the thrust magnetic bearing, and
the magnetic bearing unit includes a first coil configured to form the first radial magnetic bearing, the thrust coil configured to form the thrust magnetic bearing, and a magnet configured to generate the magnetic flux that interacts with both a magnetic flux of the first coil and a magnetic flux of the thrust coil, and the magnet is provided in common with respect to the first coil and the thrust coil.

2. The vacuum pump according to claim 1 , wherein
the motor unit includes, in a plane orthogonal to the axial direction of the rotary shaft, a motor coil configured to form the motor, a second coil configured to form the second radial magnetic bearing, and a stator core with the motor coil and the second coil wound therearound.

3. The vacuum pump according to claim 2 , wherein
the rotary body has a center of gravity on the rotary shaft; and
the first coil of the magnetic bearing unit has a center located closer to the center of gravity of the rotary body than a center of the second coil of the motor unit in the axial direction of the rotary shaft.

4. The vacuum pump according to claim 3 , wherein the magnetic bearing unit has a range in the axial direction that overlaps a position of the center of gravity of the rotary body in the axial direction.

5. The vacuum pump according to claim 1 , wherein
the thrust magnetic bearing is configured to generate a bearing force in a thrust direction in the rotary shaft by interaction between the magnetic flux of the magnet and the magnetic flux of the thrust coil.

6. The vacuum pump according to claim 1 , wherein
the blade support includes a tapered portion inclined from the second end side toward the first end side of the rotary shaft; and
the magnetic bearing unit is arranged between the rotary shaft and the tapered portion in a plane orthogonal to the axial direction of the rotary shaft.

7. The vacuum pump according to claim 6 , wherein the magnetic bearing unit is arranged on the first end side relative to an end of the tapered portion on the second end side in the axial direction of the rotary shaft.

8. The vacuum pump according to claim 1 , further comprising:
a housing configured to house the rotary body and the rotation mechanism; wherein
the rotor blade is configured to form a first pump structure between the rotor blade and the housing;
the rotary body includes a cylindrical portion extending from the blade support toward the second end of the rotary shaft, the cylindrical portion being configured to form a second pump structure between the cylindrical portion and the housing; and
the motor unit includes at least a portion arranged in a housing space partitioned by an inner peripheral surface of the blade support and an inner peripheral surface of the cylindrical portion.

9. The vacuum pump according to claim 8 , wherein
the cylindrical portion includes a first cylindrical end connected to the blade support and a second cylindrical end on a side opposite to the blade support in the axial direction of the rotary shaft; and
the motor unit is arranged on a side of the first cylindrical end relative to the second cylindrical end of the cylindrical portion in the axial direction.

Assignees

• Shimadzu Corp

Inventors

• Mori Takahiro
• Inoue Tsunehiro
• Ota Tomoo

Classifications

• F16C32/0497

  generating torque and radial force · CPC title

• F16C2360/45

  Turbo-molecular pumps · CPC title

• F16C32/0489

  with active support of five degrees of freedom, e.g. two radial magnetic bearings combined with an axial bearing · CPC title

• F04D19/048 Primary

  comprising magnetic bearings · CPC title

• F16C32/0446

  Determination of the actual position of the moving member, e.g. details of sensors · CPC title