Composite member, heat radiation member, semiconductor device, and method of manufacturing composite member
US-2019297725-A1 · Sep 26, 2019 · US
US12112993B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12112993-B2 |
| Application number | US-201917289259-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 30, 2019 |
| Priority date | Oct 31, 2018 |
| Publication date | Oct 8, 2024 |
| Grant date | Oct 8, 2024 |
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A heat radiation member excellent in electrical insulation and better in thermal conduction is provided. The heat radiation member includes a substrate composed of a composite material containing diamond and a metallic phase, an insulating plate provided on at least a part of front and rear surfaces of the substrate and composed of an aluminum nitride, and a single bonding layer interposed between the substrate and the insulating plate, the heat radiation member having thermal conductivity not lower than 400 W/m·K.
Opening claim text (preview).
The invention claimed is: 1. A heat radiation member for a semiconductor element comprising: a substrate composed of a composite material containing diamond and a metallic phase; an insulating plate provided on a surface of the substrate and composed of aluminum nitride; and a single bonding layer formed on the surface of the substrate, interposed between the substrate and the insulating plate, wherein a constituent metal of the metallic phase is pure silver or a silver-based alloy, the bonding layer is composed of an alloy containing Ag, Cu, and Ti, and a concentration of the Ti in the bonding layer is not lower than 40 atomic % and not higher than 95 atomic % with a total amount of Ag, Cu, and Ti being defined as 100 atomic %. 2. The heat radiation member according to claim 1 , wherein the bonding layer is composed of an alloy containing Ti and a main metal element that makes up the metallic phase. 3. The heat radiation member according to claim 1 , wherein the bonding layer comprise a brazing material composed of a silver-based alloy based on the eutectic alloy of Ag and Cu and containing Ti. 4. The heat radiation member according to claim 3 , the concentration of Ti is not lower than 0.5 atomic % and not higher than 3.0 atomic % with the total amount of Ag, Cu, and Ti being defined as 100 atomic %.
Metallic materials (H10W40/254, H10W40/257, H10W40/255, H10W40/251, H10W40/253 take precedence) · CPC title
having a laminate or multilayered structure, e.g. direct bond copper [DBC] ceramic substrates · CPC title
Diamond · CPC title
Ti as the principal constituent · CPC title
Soldering of electronic components · CPC title
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