Spectroscopic camera and inspection system
US-11209312-B2 · Dec 28, 2021 · US
US12112491B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12112491-B2 |
| Application number | US-202117556202-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 20, 2021 |
| Priority date | Dec 22, 2020 |
| Publication date | Oct 8, 2024 |
| Grant date | Oct 8, 2024 |
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Provided is a spectrometry method that includes (a) identifying a common feature between a first spectral image and at least one second spectral image other than the first spectral image of a plurality of spectral images acquired by an imaging element, (b) detecting a relative position shift amount between the first spectral image and the second spectral image, and (c) aligning the first spectral image and the second spectral image based on the relative position shift amount being detected. The aligning of (c) includes correcting a position of the second spectral image with respect to a position of the first spectral image based on the common feature.
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What is claimed is: 1. A spectrometry method in a spectrometer which includes a spectral element configured to change a wavelength of light to be selected and configured to disperse light from a target object, and an imaging element configured to receive light dispersed into a plurality of wavelengths by the spectral element to acquire a plurality of spectral images, the spectrometry method comprising: (a) identifying a common feature between a first spectral image and a second spectral image other than the first spectral image of the plurality of spectral images acquired by the imaging element; (b) detecting a relative position shift amount between the first spectral image and the second spectral image; and (c) aligning the first spectral image and the second spectral image based on the relative position shift amount being detected, wherein the alignment of (c) includes correcting a position of the second spectral image with respect to a position of the first spectral image based on the common feature, and an interval between a center wavelength of a first transmission peak of light corresponding to the first spectral image and a center wavelength of a second transmission peak of light corresponding to the second spectral image is no more than twice a first full width at half maximum of the first transmission peak or a second full width at half maximum of the second transmission peak. 2. The spectrometry method according to claim 1 , wherein the correction includes any or all of the position, rotation, and scaling. 3. A spectrometry system, comprising: a spectral element configured to change a wavelength of light to be selected and configured to disperse light from a target object; an imaging element configured to receive light dispersed into a plurality of wavelengths by the spectral element to acquire a plurality of spectral images; and one or a plurality of processors configured to: (a) identify a common feature between a first spectral image and a second spectral image other than the first spectral image of the plurality of spectral images acquired by the imaging element; (b) detect a relative position shift amount between the first spectral image and the second spectral image; and (c) align the first spectral image and the second spectral image based on the relative position shift amount being detected, wherein the alignment of (c) includes correcting a position of the second spectral image with respect to a position of the first spectral image based on the common feature, and an interval between a center wavelength of a first transmission peak of light corresponding to the first spectral image and a center wavelength of a second transmission peak of light corresponding to the second spectral image is no more than twice a first full width at half maximum of the first transmission peak or a second full width at half maximum of the second transmission peak. 4. A non-transitory computer-readable storage medium storing instructions which, when executed by one or a plurality of processors to execute a spectrometry method including: a spectral element configured to change a wavelength of light to be selected and configured to disperse light from a target object, and an imaging element configured to receive light dispersed into a plurality of wavelengths by the spectral element to acquire a plurality of spectral images, the spectrometry method comprising: (a) identifying a common feature between a first spectral image and a second spectral image other than the first spectral image of the plurality of spectral images acquired by the imaging element; (b) detecting a relative position shift amount between the first spectral image and the second spectral image; and (c) aligning the first spectral image and the second spectral image based on the relative position shift amount being detected, wherein the alignment of (c) includes correcting a position of the second spectral image with respect to a position of the first spectral image based on the common feature, and an interval between a center wavelength of a first transmission peak of light corresponding to the first spectral image and a center wavelength of a second transmission peak of light corresponding to the second spectral image is no more than twice a first full width at half maximum of the first transmission peak or a second full width at half maximum of the second transmission peak.
using transform domain methods · CPC title
Imaging spectrometer · CPC title
using feature-based methods · CPC title
Varying illumination · CPC title
relating to hyperspectral data · CPC title
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