Safeguarding device, wafer transport container with at least one safeguarding device, safeguarding system and method with the safeguarding device

Patent metadata

Field	Value
Publication number	US-12106987-B2
Application number	US-201816982234-A
Country	US
Kind code	B2
Filing date	Mar 22, 2018
Priority date	Mar 22, 2018
Publication date	Oct 1, 2024
Grant date	Oct 1, 2024

Abstract

A safeguarding device includes one or more positive-fit units that safeguard a wafer-transport-container opening element of a wafer transport container, which is held in its closure position by a closing mechanism. The closing mechanism includes one or more chambers, which includes a pressure connection channel that allows a variation of an inner pressure in the chamber relative to a reference pressure. A differential pressure is calculated from the inner pressure of the chamber and the reference pressure and influences a safeguarding status of the positive-fit unit.

First claim

The invention claimed is:

1. A safeguarding device with at least one positive-fit unit configured at least for a safeguarding of a wafer-transport-container opening element of a wafer transport container, wherein the wafer transport container is held in its closure position by a closing mechanism, wherein in the closure position the wafer-transport-container opening element closes the opening of a base body of the wafer transport container, wherein the closing mechanism comprises at least one chamber, wherein the at least one chamber comprises a pressure connection channel that is configured to allow a variation of an inner pressure in the at least one chamber relative to a reference pressure, wherein a differential pressure is based on the inner pressure of the at least one chamber and the reference pressure and is configured to influence a safeguarding status of the at least one positive-fit unit, wherein the safeguarding device comprises at least one further chamber having, in a safeguard state of the safeguarding device and in a non-safeguard state of the safe-guarding device, an inner pressure that has the same value as an ambient pressure.

2. The safeguarding device according to claim 1 , wherein the at least one positive-fit unit comprises at least one positive-fit recess and at least one positive-fit element, wherein the at least one positive-fit recess and the at least one positive-fit element are configured to couple with one another in a contact-free fashion in a proper safeguarding.

3. The safeguarding device according to claim 1 , further comprising an at least partial integral implementation with the wafer transport container.

4. The safeguarding device according to claim 1 , further comprising at least one reset element, which is configured to at least one of re-deflect the at least one positive-fit unit at least partly into a safeguarding position and hold the at least one positive-fit unit in the safeguarding position.

5. The safeguarding device according to claim 1 , further comprising at least one reset element, which is configured to re-deflect the at least one positive-fit unit at least partly into at least one of a safeguarding position and hold the at least one positive-fit unit in the safeguarding position, wherein the at least one reset element is arranged, at least partly, inside the at least one chamber.

6. The safeguarding device according to claim 1 , wherein the at least one positive-fit unit comprises at least one movably supported positive-fit element, wherein a position of the at least one positive-fit element relative to at least one chamber wall of the at least one chamber depends on the differential pressure.

7. The safeguarding device according to claim 1 , wherein the at least one positive-fit unit is configured to take a non-safeguard position if the differential pressure exceeds a limit differential pressure.

8. The safeguarding device at least according to claim 1 , further comprising at least one movably supported setting element, which delimits the at least one chamber and the at least one further chamber at least partly.

9. The safeguarding device according to claim 8 , wherein the at least one setting element is configured to vary, depending on a pressure difference of the inner pressures of the at least one chamber and the at least one further chamber, an inner volume of the at least one chamber, and an inner volume of the further chamber.

10. The safeguarding device according to claim 1 , further comprising at least one additional further chamber, which is configured to have, in at least one operating state, an inner pressure that differs from an ambient pressure.

11. The safeguarding device according to claim 1 , further comprising a linear bearing that is configured to permit a translational movement of the at least one positive-fit unit.

12. The safeguarding device according to claim 1 , wherein the pressure connection channel is configured to couple at least the at least one chamber with a vacuum-clamping device of a loading and unloading station that is configured at least for loading and unloading at least one wafer into or from the wafer transport container.

13. The safeguarding device according to claim 1 , further comprising at least one emergency safeguarding and emergency release element, which is configured for at least one of manual emergency safeguarding and manual emergency release of the safeguarding device.

14. The safeguarding device according to claim 13 , wherein the at least one emergency safeguarding and emergency release element is arranged at least partly in at the least one further chamber.

15. The safeguarding device according to claim 1 , further comprising at least one status sensor, which is configured to sense a safeguarding status of the safeguarding device.

16. A wafer transport container with at least one safeguarding device according to claim 1 , which is configured to prevent, in a safeguarding case, a complete removal of the wafer-transport-container opening element from the base body of the wafer transport container.

17. The wafer transport container according to claim 16 , wherein the at least one safeguarding device is embodied integrally with the base body of the wafer transport container.

18. The wafer transport container according to claim 16 , wherein the wafer transport container comprises at least one positive-fit recess, the at least one positive-fit recess implementing a further pressure connection channel, which is configured for an evacuation of an additional further chamber of the safeguarding device.

19. A safeguarding system with at least one safeguarding device according to claim 1 , with a wafer transport container, and with a loading and unloading station which is configured at least for loading and unloading wafers into or from the wafer transport container.

20. The safeguarding system according to claim 19 , further comprising a vacuum pump unit, which is configured at least for a vacuum-clamping of the wafer transport container on the loading and unloading station in a loading and unloading position, and for varying the inner pressure in the at least one chamber.

21. A method with the safeguarding device according to claim 1 , wherein the wafer-transport-container opening element of the wafer transport container, which is held in its closure position by the closing mechanism, is safeguarded by means of the at least one positive-fit unit.

22. The method according to claim 21 , wherein the safeguarding of the at least one positive-fit unit is realized by the variation of the inner pressure in the at least one chamber of the safeguarding device.

23. The method according to claim 21 , wherein, in a fault-free normal operation of the closing mechanism, the wafer-transport-container opening element is safeguarded by the at least one positive-fit unit in a contact-free fashion, wherein, in case of a malfunction of the closing mechanism, a touch contact is established of a positive-fit element of the at least one positive-fit unit, with the wafer-transport-container opening element for the purpose of establishing a holding of the wafer-transport-container opening element in a proximity of the closure position.

Assignees

• Vat Holding Ag

Inventors

• Ehrne Florian
• Netzer Martin
• Hofer Andreas

Classifications

• H10P72/3406

  involving removal of lid, door or cover · CPC title

• H10P72/1924

  characterised by atmosphere control · CPC title

• H10P72/1914 Primary

  characterised by locking systems · CPC title

• B65G47/91

  incorporating pneumatic, e.g. suction, grippers · CPC title

• H01L21/67772

  Electricity · mapped topic