System and method for testing a filter

Patent metadata

Field	Value
Publication number	US-12105003-B2
Application number	US-202117461955-A
Country	US
Kind code	B2
Filing date	Aug 30, 2021
Priority date	Aug 30, 2021
Publication date	Oct 1, 2024
Grant date	Oct 1, 2024

Abstract

A system and a method for testing a filter used in ultrapure water are provided. The method for testing a filter, which is used for removing particles from ultrapure water, comprises: providing a testing solution with particles; detecting the particles in the testing solution by a particle counter; passing the testing solution through a filter; and detecting the particles in the testing solution, which is passed through the filter, by another particle counter.

First claim

What is claimed is:

1. A method for testing a filter, comprising:
providing a first testing solution with a number of particles;
detecting the number of the particles in the first testing solution by a first particle counter;
passing the first testing solution through the filter;
detecting the number of the particles in the first testing solution, which is passed through the filter, by a second particle counter; and
calculating a first data detected by the first particle counter and a second data detected by the second particle counter to obtain a filter retention efficiency of the filter;
wherein the number of the particles in the first testing solution is known and a particle size of the particles in the first testing solution is known, and wherein the number of the particles in the first testing solution is 100/ml to 500/ml and the particle size of the particles in the first testing solution is 20 nanometers to 50 nanometers.

2. The method of claim 1 , wherein the first particle counter and the second particle counter are the same particle counter.

3. The method of claim 1 , further comprising: controlling a flow rate of the first testing solution.

4. The method of claim 1 , further comprising: controlling a pressure drop of the filter.

5. The method of claim 1 , further comprising: comparing the known number of the particles in the first testing solution and the first data detected by the first particle counter.

6. The method of claim 1 , further comprising:
providing a second testing solution with a number of particles;
detecting the number of the particles in the second testing solution by the first particle counter;
passing the second testing solution through the filter;
detecting the number of the particles in the second testing solution, which is passed through the filter, by the second particle counter; and
comparing a third data detected by the first particle counter and a fourth data detected by the second particle counter.

7. The method of claim 6 , wherein the number of the particles in the first testing solution is known and a particle size of the particles in the first testing solution is known, and wherein the number of the particles in the first testing solution is known and a particle size of the particles in the second testing solution is known, and wherein the number of the particles in the second testing solution is different from the number of the particles in the first testing solution and/or the particle size of the particles in the second testing solution is different from the particle size of the particles in the first testing solution.

8. The method of claim 6 , wherein the first testing solution and the second testing solution are prepared by diluting a high concentration solution with a number of particles, wherein the number of the particles in the high concentration solution is greater than the number of the particles in the first testing solution or the number of the particles in the second testing solution.

9. The method of claim 6 , wherein the step of providing the first testing solution with the number of particles, the step of detecting the number of the particles in the first testing solution by the first particle counter, the step of passing the first testing solution through the filter and the step of detecting the number of the particles in the first testing solution, which is passed through the filter, by the second particle counter are performed in three cycles, and wherein the step of providing the second testing solution with the number of particles, the step of detecting the number of the particles in the second testing solution by the first particle counter; passing the second testing solution through the filter; and the step of detecting the number of the particles in the second testing solution, which is passed through the filter, by the second particle counter are performed in three cycles.

10. The method of claim 1 , further comprising:
detecting a first pressure of the first testing solution before passing the first testing solution through the filter; and
detecting a second pressure of the first testing solution after passing the first testing solution through the filter.

11. The method of claim 1 , wherein the step of providing a first testing solution with a number of particles, the step of detecting the number of the particles in the first testing solution by a first particle counter, the step of passing the first testing solution through the filter and the step of detecting the number of the particles in the first testing solution, which is passed through the filter, by a second particle counter are performed in three cycles.

12. The method of claim 1 , further comprises: preparing the first testing solution by diluting a concentration solution, wherein a number of particles in the concentration solution is 10 5 /ml.

13. A method for testing a filter for filtering ultrapure water used in semiconductor manufacturing, comprising:
providing a first testing solution, wherein the first testing solution comprises nanometer-sized particles and wherein a number of the nanometer-sized particles in the first testing solution is known and a particle size of the nanometer-sized particles in the first testing solution is known;
detecting the first testing solution to obtain a first value regarding the number of the nanometer-sized particles in the first testing solution;
passing the first testing solution through the filter;
detecting the first testing solution to obtain a second value regarding the number of the nanometer-sized particles in the first testing solution; and
obtaining a filter retention efficiency of the filter based on the first value and the second value;
wherein the number of the nanometer-sized particles in the first testing solution is 100/ml to 500/ml and the particle size of the nanometer-sized particles in the first testing solution is 20 nanometers to 50 nanometers.

14. The method of claim 13 , wherein the first value and the second value are obtained by a single particle counter or respective two particle counters.

15. The method of claim 14 , prior to providing the first testing solution, further comprising:
providing a second testing solution;
detecting the second testing solution for multiple cycles to obtain a third value regarding a number of particles in the second testing solution;
performing the step of providing the second testing solution and the step of detecting the second testing solution so as to obtain the multiple third values; and
checking a detection efficiency of the particle counter by comparing the multiple third values.

16. A method for testing a filter for filtering ultrapure water used in semiconductor manufacturing, comprising:
preparing a test solution by diluting a concentration solutions, wherein the concentration solution comprises nanometer-sized particles;
providing the test solution in a container, wherein the test solution comprises the nanometer-sized particles from the concentration solution, and wherein a number of the nanometer-sized particles in the test solution is 100/ml to 500/ml and a particle size of the nanometer-sized particles in the testing solution is 20 nanometers to 50 nanometers;
drawing the test solution from the container into a first passageway;
detecting the nanometer-sized particles of the test solution by a first particle counter connected to the first passageway;
passing the test solution through the filter;
drawing the test solution into a second passageway;
detecting the nanometer-sized particles of the test solution by a second particle

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Yu Chwen
• Lin En Tian
• Kuo Chi Wen

Classifications

• G01N2015/1024

  Counting particles by non-optical means · CPC title

• G01N15/10

  Investigating individual particles · CPC title

• G01N15/02

  Investigating particle size or size distribution (by measuring osmotic pressure G01N7/10; investigating sedimentation of particle suspensions G01N15/04; investigating individual particles G01N15/10) · CPC title

• G01N15/06 Primary

  Investigating concentration of particle suspensions (by weighing G01N5/00; investigating sedimentation of particle suspensions G01N15/04; investigating individual particles G01N15/10) · CPC title

• G01N2015/084

  Testing filters · CPC title