Minimal contact packaging for process chamber components

Patent metadata

Field	Value
Publication number	US-12100613-B2
Application number	US-202017131572-A
Country	US
Kind code	B2
Filing date	Dec 22, 2020
Priority date	Dec 22, 2020
Publication date	Sep 24, 2024
Grant date	Sep 24, 2024

Abstract

Embodiments of packaged chamber components and methods of packaging chamber components are provided herein. In some embodiments, a packaged chamber component for use in a process chamber includes: an insert having an annular trench disposed about a raised inner portion, wherein the annular trench is disposed between the raised inner portion and an outer lip, wherein a ledge couples the raised inner portion to the outer lip, wherein the ledge includes a first portion and a second portion disposed radially outward of the first portion, and wherein the second portion includes a resting surface that extends upward and radially outward of an upper surface of the first portion; and a chamber component disposed in the annular trench of the insert and supported by the resting surface such that one or more critical surfaces of the chamber component are spaced apart from the insert.

First claim

The invention claimed is:

1. A packaged chamber component for use in a process chamber, comprising:
an insert having an annular trench disposed about a raised inner portion, wherein the annular trench is disposed between the raised inner portion and an outer lip, wherein a ledge couples the raised inner portion to the outer lip, wherein the ledge includes a first portion and a second portion disposed radially outward of the first portion, and wherein the second portion includes a resting surface that extends upward and radially outward of an upper surface of the first portion; and
a chamber component disposed in the annular trench of the insert and supported by the resting surface such that one or more critical surfaces of the chamber component are spaced apart from the insert, wherein an innermost diameter of the chamber component is greater than an outermost diameter of the raised inner portion.

2. The packaged chamber component of claim 1 , wherein the insert is made of a polymer material.

3. The packaged chamber component of claim 1 , wherein at least one of:
the outer lip has an inner diameter of about 15.1 inches to about 18.0 inches, or
the raised inner portion has an outer diameter of about 8.0 inches to about 12.0 inches.

4. The packaged chamber component of claim 1 , wherein the raised inner portion comprises an annular sidewall and a central opening disposed at a lower surface of the annular sidewall.

5. The packaged chamber component of claim 1 , wherein the one or more critical surfaces include a radially inner surface of the chamber component and at least a portion of a ledge-facing surface of the chamber component.

6. The packaged chamber component of claim 1 , wherein the ledge has a lower surface that is flat from the raised inner portion to the resting surface.

7. The packaged chamber component of claim 1 , wherein the outer lip extends downward from the ledge.

8. A packaged chamber component for use with a process chamber, comprising:
an insert made of a polymer material having an annular trench, wherein the annular trench is defined by a raised inner portion, a ledge extending radially outward from the raised inner portion, and an outer lip extending from the ledge, wherein the ledge includes a first portion and a second portion disposed radially outward of the first portion, wherein the second portion includes a resting surface that is raised from an upper surface of the first portion; and
a chamber component having an annular body disposed in the annular trench and supported by the resting surface such that a radially inner surface of the annular body and at least a portion of a ledge-facing surface of the annular body are spaced apart from the insert, wherein the chamber component extends from the resting surface to vertically beyond an upper surface of the outer lip.

9. The packaged chamber component of claim 8 , wherein the polymer material comprises at least one of acrylic, polycarbonate, polypropylene, acrylonitrile butadiene styrene, or polyethylene terephthalate.

10. The packaged chamber component of claim 8 , wherein the insert and the chamber component are disposed in a bag that is vacuum sealed, wherein the bag clamps the chamber component against the insert, and wherein the bag is spaced from the radially inner surface of the annular body and the portion of the ledge-facing surface of the annular body of the chamber component.

11. The packaged chamber component of claim 10 , wherein the bag is made of polyethylene.

12. The packaged chamber component of claim 10 , wherein the bag only contacts one or more surfaces of the chamber component that face away from a floor or sidewalls of the annular trench.

13. The packaged chamber component of claim 8 , wherein an upper surface of the raised inner portion is raised with respect to an upper surface of the outer lip.

14. The packaged chamber component of claim 8 , wherein the resting surface inclines radially outward and upward from an upper surface of the first portion of the ledge.

15. The packaged chamber component of claim 8 , wherein the insert includes a second resting surface raised from the upper surface of the first portion of the ledge, and wherein the chamber component rests on the resting surface and the second resting surface.

16. A method of packaging a chamber component for use with a process chamber, comprising:
placing the chamber component in an annular trench of an insert made of a polymer material, wherein an innermost diameter of the chamber component is greater than an outermost diameter of a raised inner portion of the insert, wherein the chamber component includes a critical surface, and wherein the annular trench includes one or more resting surfaces on a lower surface thereof for supporting the chamber component without touching the critical surface of the chamber component;
placing the chamber component and the insert in a bag made of a polymer material; and
vacuum sealing the chamber component and the insert in the bag to clamp the chamber component between the bag and the one or more resting surfaces.

17. The method of claim 16 , wherein the critical surface comprises at least one of a radially inner surface of the chamber component and at least a portion of an upper surface of the chamber component.

18. The method of claim 16 , further comprising turning the chamber component upside-down prior to placing the chamber component in the annular trench such that an upper surface of the chamber component faces the lower surface of the annular trench.

19. The method of claim 16 , wherein the one or more resting surfaces includes one resting surface that is disposed at a radially outer portion of the lower surface of the annular trench and that is raised from a remaining portion of the lower surface.

20. The method of claim 16 , wherein the chamber component is a quartz ring having a non-planar lower surface.

Assignees

• Applied Materials Inc

Inventors

• Behnke Joseph Frederick
• Wilantewicz Trevor
• Beaudry Christopher Laurent
• Toth Timothy Douglas
• Osterman Scott

Classifications

• H10P72/7606 Primary

  characterised by edge clamping, e.g. clamping ring · CPC title

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• B65B31/024

  specially adapted for wrappers or bags (B65B31/021, B65B31/022 take precedence) · CPC title

• C23C16/4585

  Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds · CPC title