Substrate cleaning method and apparatus

Patent metadata

Field	Value
Publication number	US-12100586-B2
Application number	US-201917755505-A
Country	US
Kind code	B2
Filing date	Nov 1, 2019
Priority date	Nov 1, 2019
Publication date	Sep 24, 2024
Grant date	Sep 24, 2024

Abstract

A method for cleaning a substrate with pattern structures comprises the following steps: using gas-liquid atomization to clean a substrate surface (601); using TEBO megasonic to clean the substrate surface (602); and drying the substrate (603). The TEBO megasonic cleaning is used to remove small size particles on the substrate and the gas-liquid atomization cleaning is used to remove large size particles on the substrate. The method enables achieving an effect of cleaning the substrate without or with less device damage. A substrate cleaning apparatus is also provided.

First claim

What is claimed is:

1. An apparatus for cleaning a substrate with pattern structures, comprising:
a substrate holding device, configured to hold a substrate;
a mega sonic cleaning device, configured to provide a cleaning liquid to the substrate, and apply mega sonic waves to the substrate, a power of the mega sonic waves is 10 to 50 watts;
a gas-liquid atomization cleaning device, configured to provide gas-liquid atomization cleaning, a gas flow rate of the gas-liquid atomization cleaning is 20 to 40 lpm; and
a process chamber, wherein the substrate holding device, the mega sonic cleaning device and the gas-liquid atomization cleaning device are located in the process chamber,
wherein:
the mega sonic cleaning device comprises:
a shielding cover;
a mega sonic device;
a connecting arm; and
a nozzle device, wherein the nozzle device comprises at least one nozzle configured to discharge liquid onto the substrate,

the gas-liquid atomization cleaning device comprises:
a fixing member; and
a gas-liquid atomization device comprising a liquid inlet pipe, a gas inlet pipe, and a jet-spray nozzle,

the mega sonic device is fixed at the bottom of the shielding cover,
a first side of the shielding cover is connected to the connecting arm,
a second side of the shielding cover is connected to the nozzle device,
a first side of the fixing member is connected to the nozzle device, and
a second side of the fixing member is connected to the gas-liquid atomization device such that the nozzle device is positioned between the shielding cover and the gas-liquid atomization device, and wherein the connecting arm is configured to support the mega sonic device, the nozzle device, and the gas-liquid atomization device above the substrate such that movement of the connecting arm can cause movement of the mega sonic device, the nozzle device, and the gas-liquid atomization device above the substrate.

2. The apparatus according to claim 1 , wherein the mega sonic cleaning device comprises:
a connecting spindle, being connected to the connecting arm; and
a driving mechanism, being connected to the connecting spindle for driving the connecting spindle to rotate and move up and down.

3. The apparatus according to claim 1 , wherein the mega sonic cleaning device is capable of removing small size particles, the size of small particles is 0.5 um or less than 0.5 um.

4. The apparatus according to claim 1 , wherein the gas-liquid atomization cleaning device is capable of removing large size particles, the size of large particles is greater than 0.5 um.

Assignees

• Acm Research Shanghai Inc

Inventors

• Wang Wenjun
• Yao Ting
• Zhang Xiaoyan
• Chen Fuping
• Wang Hui

Classifications

• H10P72/0414 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• H10P70/20 Primary

  Cleaning during device manufacture · CPC title

• B08B2220/04

  Polymers · CPC title

• B08B3/12

  by sonic or ultrasonic vibrations · CPC title

• B08B3/041

  Cleaning travelling work · CPC title