Organic vapor jet printing system

Patent metadata

Field	Value
Publication number	US-12089482-B2
Application number	US-202318103667-A
Country	US
Kind code	B2
Filing date	Jan 31, 2023
Priority date	Jun 18, 2018
Publication date	Sep 10, 2024
Grant date	Sep 10, 2024

Abstract

Embodiments of the disclosed subject matter provide a device including a micronozzle array having separate redundant groups of depositors that each include a delivery aperture disposed between two exhaust apertures. The device may include a first row of depositors of a first redundant group, each of which may be connected in parallel to first common delivery lines and first common exhaust lines. The device may include a second row of depositors of a second redundant group, each of which is connected in parallel to second common delivery and second common exhaust lines. The first row of depositors and the second row of depositors may operate independently from one another. The device may be disposed within a deposition chamber and in proximity of a substrate.

First claim

We claim:

1. A device comprising:
a micronozzle array having separate redundant groups of depositors that each include a delivery aperture disposed between two exhaust apertures, including:
a first row of depositors of a first redundant group, each of which is connected in parallel to first common delivery lines and first common exhaust lines; and
a second row of depositors of a second redundant group, each of which is connected in parallel to second common delivery lines and second common exhaust lines that are different from the first common delivery lines and the first common exhaust lines; and
a first valve coupled to the first row of depositors, the second row of depositors, and a common delivery line, wherein the first valve switches a delivery flow from the common delivery line between at least one of the first common delivery lines and at least one of the second common delivery lines,
wherein features to be printed on a substrate by the first redundant group of depositors is functionally similar or the same to that to be printed by the second redundant group of depositors within the micronozzle array.

2. The device of claim 1 , wherein the first row of depositors and the second row of depositors operate independently from one another.

3. The device of claim 1 , wherein the first row of depositors and the second row of depositors are operated at different times from one another.

4. The device of claim 1 , wherein the micronozzle array includes more than two redundant groups of depositors.

5. The device of claim 1 , wherein the first row of depositors and the second row of depositors are aligned along a printing direction.

6. The device of claim 1 , wherein at least one of the first common exhaust lines and at least one of the second common exhaust lines are connected to a common exhaust line using a second valve that switches an exhaust flow from the common exhaust line between at least one of the first common exhaust lines and at least one of the second common exhaust lines.

7. The device of claim 1 , wherein at least one of the first common exhaust lines is fluidly coupled to a first flow controller, and at least one of the second common exhaust lines is fluidly coupled to a second flow controller,
wherein the first flow controller and the second flow controller regulate exhaust flow independently of each other.

8. A system comprising:
a deposition chamber with a controlled atmosphere;
a print head, disposed within the deposition chamber and in proximity of a substrate, having a die with a micronozzle array at its tip held within a ported clamp;
a first redundant group and a second redundant group disposed on the micronozzle array,
wherein the first redundant group is connected to a first delivery line and a first exhaust line which pass through the clamp, and the second redundant group is connected to a second delivery line and a second exhaust line that pass through the clamp,
wherein the first delivery line and the second delivery line from the clamp are coupled at a first valve that switches a delivery flow from a common delivery line between the first delivery line and the second delivery line, and
wherein features to be printed on a substrate by the first redundant group is functionally similar or the same to that to be printed by the second redundant group of the micronozzle array.

9. The system of claim 8 , wherein the first exhaust line and the second exhaust line are connected to a common exhaust line using a second valve that switches an exhaust flow from a common exhaust line between the first exhaust line and the second exhaust line.

10. The system of claim 8 , wherein the first exhaust line is fluidly connected to a first flow controller, and the second exhaust line is fluidly connected to a second flow controller,
wherein the first flow controller and the second flow controller regulate exhaust flow independently of each other.

11. The system of claim 8 , wherein the die is divided down its center such that first redundant group is connected to the first delivery line and the first exhaust line which pass through a first side of the clamp, and the second redundant group is connected to the second delivery line and a second exhaust line that pass through a second side of the clamp.

12. The system of claim 8 , wherein the first redundant group and the second redundant group are operated independently of one another.

13. The system of claim 8 , wherein the first redundant group and the second redundant group are operated at different times from one another.

14. The system of claim 8 , wherein wetted components of the first valve and the second valve are heated to a temperature greater than a sublimation temperature of an organic vapor deposited by an OVJP (organic vapor jet printing) tool to prevent condensation.

15. The system of claim 8 , wherein the first valve and the second valve are positioned inside of the chamber to minimize the length of unused line when a section of at least one from the group consisting of: the first delivery line, the second delivery line, the first exhaust line, and the second exhaust line is shut off.

16. The system of claim 8 , wherein a common heated delivery line disposed upstream of the first valve is fed by one or more sublimation sources.

17. The system of claim 16 , wherein the one or more sublimation sources are independently heated and loaded with dissimilar materials to promote co-deposition of doped films.

18. The system of claim 16 , wherein each of the one or more sublimation sources is provided with a controlled mass flow of heated process gas.

19. The system of claim 8 , wherein the first redundant group includes at least one first depositor having a first aperture area, and the second redundant group includes at least one second depositor having a second aperture area.

Assignees

• Universal Display Corp

Inventors

• Quinn William E
• Mcgraw Gregory
• Kottas Gregg
• Xu Xin
• Brown Julia J

Classifications

• H10P72/0424 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• H10K71/40

  Thermal treatment, e.g. annealing in the presence of a solvent vapour · CPC title

• H10K2101/40

  Interrelation of parameters between multiple constituent active layers or sublayers, e.g. HOMO values in adjacent layers · CPC title

• H10K2101/10

  Triplet emission · CPC title

• H10K71/00

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title