Variable inductor for plasma generator

Patent metadata

Field	Value
Publication number	US-12087546-B2
Application number	US-202117365081-A
Country	US
Kind code	B2
Filing date	Jul 1, 2021
Priority date	Jul 1, 2021
Publication date	Sep 10, 2024
Grant date	Sep 10, 2024

Abstract

This disclosure describes systems, methods, and apparatus for waveform control, comprising: a power supply having an input terminal, and at least one output terminal for coupling to a load; a controller; a variable inductor coupled to at least one of the output terminals, the variable inductor comprising a first magnetic core having a plurality of arms, including at least a first inductor arm and a first control arm, wherein an inductance winding having one or more turns is wound around the first inductor arm, and wherein a first control winding comprising one or more turns is wound around the first control arm; and a DC current source coupled to the first control arm and the controller, the controller configured to adjust a DC bias applied by the DC current source to the first control arm to control an output waveform at the at least one output terminal.

First claim

What is claimed:

1. A system for waveform control, comprising:
a power supply having an input terminal and at least one output terminal, the at least one output terminal configured to be coupled to a load;
a controller;
a variable inductor configured to be coupled to one of the at least one output terminal of the power supply, the variable inductor comprising a first magnetic core, the first magnetic core comprising a plurality of arms, including at least a first inductor arm and a first control arm, wherein an inductance winding having one or more turns is wound around the first inductor arm, and wherein a first control winding comprising one or more turns is wound around the first control arm; and
a DC current source configured to be coupled to the first control arm and the controller, and wherein the controller is configured to adjust a DC bias applied by the DC current source to the first control arm to control an output waveform at the at least one output terminal of the power supply;
wherein the controller is configured to control the DC bias and thereby a shape of the output waveform based on one or more of voltage and current feedback from the power supply, and wherein controlling the DC bias based on the current feedback comprises maintaining a constant or substantially constant relationship between a peak to peak current value and a measured time for waves of the output waveform, wherein the measured time is selected from a group consisting of a rising time, a falling time, and a timespan between a first and a second pre-defined current level.

2. The system of claim 1 , wherein the power supply produces a load-dependent output.

3. The system of claim 1 , wherein the variable inductor is a double E variable inductor comprising the first control arm and a second control arm, and wherein a second control winding comprising one or more turns is wound around the second control arm.

4. The system of claim 3 , wherein the first inductor arm comprises two sections separated by an air gap.

5. The system of claim 4 , wherein the inductance winding generates a first AC magnetic flux component in the first inductor arm that flows through the first inductor arm and splits into a second AC magnetic flux component that flows through one of the two control arms, and a third AC magnetic flux component that flows through the other of the two control arms.

6. The system of claim 5 , wherein the DC bias generates a DC magnetic flux component in each of the two control arms, and wherein each of the DC magnetic flux components substantially circulate through the two control arms in the same direction, and wherein the second and third AC magnetic flux components are equal in magnitude and flow in opposite directions.

7. The system of claim 6 , wherein the DC magnetic flux components flowing through the two controls arms bias the AC magnetic flux component flowing through the first inductor arm.

8. The system of claim 1 , wherein an effective inductance of the variable inductor is based at least in part on the DC bias.

9. The system of claim 1 , wherein the at least one output terminal comprises two output terminals, and wherein the controller is configured to receive first and second voltage measurements from a first and a second output terminal, respectively, of the two output terminals.

10. The system of claim 9 , wherein controlling the DC bias based on the voltage feedback comprises maintaining a constant or substantially constant relationship between a peak to peak value and a measured time for voltage differential waves associated with the output waveform, wherein the voltage differential waves are based at least in part on the first and second voltage measurements, and wherein the measured time is selected from a group consisting of a rising time, a falling time, and a timespan between a first and a second pre-defined voltage differential level.

11. The system of claim 1 , wherein the variable inductor is a triple E variable inductor, and wherein the first magnetic core comprises an inductor core section having the first inductor arm and a control core section having the first control arm.

12. The system of claim 1 , wherein the variable inductor is a quadruple U variable inductor, the quadruple U variable inductor further comprising:
a second magnetic core having a second inductor arm, a second control arm, and another inductance winding having one or more turns wound around the second inductor arm;
and wherein the first and the second magnetic core are separated by a spacer, and wherein the first control winding is wound around the spacer and the first and the second control arm.

13. The system of claim 1 , wherein the DC bias generates a DC magnetic flux component in the first control arm; wherein the inductance winding is configured to receive a pulsed waveform, and wherein the DC magnetic flux component alters an inductance of the inductance winding.

14. A system for waveform control, comprising:
a power supply having an input terminal and at least one output terminal, the at least one output terminal configured to be coupled to a load;
a controller;
a variable inductor configured to be coupled to one of the at least one output terminal of the power supply, the variable inductor comprising a first magnetic core, the first magnetic core comprising a plurality of arms, including at least a first inductor arm and a first control arm, wherein an inductance winding having one or more turns is wound around the first inductor arm, and wherein a first control winding comprising one or more turns is wound around the first control arm; and
a DC current source configured to be coupled to the first control arm and the controller, and wherein the controller is configured to adjust a DC bias applied by the DC current source to the first control arm to control an output waveform at the at least one output terminal of the power supply;
wherein the variable inductor is a triple E variable inductor, and wherein the first magnetic core comprises an inductor core section having the first inductor arm and a control core section having the first control arm.

15. A system for waveform control, comprising:
a power supply having an input terminal and at least one output terminal, the at least one output terminal configured to be coupled to a load;
a controller;
a variable inductor configured to be coupled to one of the at least one output terminal of the power supply, the variable inductor comprising a first magnetic core, the first magnetic core comprising a plurality of arms, including at least a first inductor arm and a first control arm, wherein an inductance winding having one or more turns is wound around the first inductor arm, and wherein a first control winding comprising one or more turns is wound around the first control arm; and
a DC current source configured to be coupled to the first control arm and the controller, and wherein the controller is configured to adjust a DC bias applied by the DC current source to the first control arm to control an output waveform at the at least one output terminal of the power supply;
wherein the variable inductor is a quadruple U variable inductor, the quadruple U variable inductor further comprising:
a second magnetic core having a second inductor arm, a second control arm, and another inductance winding having one or more turns wound around the second inductor arm;
and wherein the first and the second magnetic core are separated by a spacer, and wherein the first control winding is wound around the spacer and the first and the second control arm.

Assignees

• Advanced Energy Ind Inc

Inventors

• Vicinanza Fabio

Classifications

• H01J37/32183

  Matching circuits · CPC title

• H01J37/32146

  Amplitude modulation, includes pulsing · CPC title

• H01J37/32045

  Circuits specially adapted for controlling the glow discharge · CPC title

• H01J37/32027

  DC powered · CPC title

• H01F21/08

  by varying the permeability of the core, e.g. by varying magnetic bias · CPC title