Semiconductor processing tool

Patent metadata

Field	Value
Publication number	US-12084769-B2
Application number	US-202318517387-A
Country	US
Kind code	B2
Filing date	Nov 22, 2023
Priority date	Apr 16, 2021
Publication date	Sep 10, 2024
Grant date	Sep 10, 2024

Abstract

A chuck vacuum line of a semiconductor processing tool includes a first portion that penetrates a sidewall of a main pumping line of the semiconductor processing tool. The chuck vacuum line includes a second portion that is substantially parallel to the sidewall of the main pumping line and to a direction of flow in the main pumping line. A size of the second portion increases between an inlet end of the second portion and an outlet end of the second portion along the direction of flow in the main pumping line.

First claim

What is claimed is:

1. A method, comprising:
applying, via a chuck vacuum line, a vacuum to a chuck provided within a process chamber body of a semiconductor processing tool,
wherein the chuck vacuum line comprises:
a first portion that penetrates a sidewall of a main pumping line, and
a second portion that extends in a direction of flow in the main pumping line,
wherein a size of an outlet end of the second portion is larger than a size of an inlet end of the second portion; and

removing a gas from the process chamber body via the main pumping line.

2. The method of claim 1 , wherein removing the gas comprises:
removing the gas from the process chamber body via a pump connected to the main pumping line.

3. The method of claim 1 , wherein applying the vacuum retains a semiconductor device against the chuck.

4. The method of claim 1 , wherein the size of the outlet end of the second portion relative to the size of the inlet end of the second portion is to prevent buildup of processing byproduct on interior walls of the main pumping line.

5. The method of claim 1 , wherein the second portion of the chuck vacuum line is substantially parallel to the sidewall of the main pumping line.

6. The method of claim 1 , wherein the second portion of the chuck vacuum line is substantially centered within the main pumping line.

7. The method of claim 1 , wherein the first portion penetrates the main pumping line at a bend area of the main pumping line.

8. The method of claim 1 , wherein the second portion includes a plurality of openings at or near the outlet end of the second portion.

9. The method of claim 8 , wherein the plurality of openings are symmetrically arranged about a center of a plane corresponding to the outlet end of the second portion.

10. The method of claim 8 , wherein the plurality of openings form at least two concentric rings of openings.

11. A chuck vacuum line, comprising:
a first portion that penetrates a sidewall of a main pumping line that is at least partially included in a semiconductor processing tool; and
a second portion that extends in a direction of flow in the main pumping line,
wherein a size of the second portion increases between an inlet end of the second portion and an outlet end of the second portion along the direction of flow in the main pumping line.

12. The chuck vacuum line of claim 11 , wherein the size of the outlet end of the second portion relative to the size of the inlet end of the second portion is to prevent buildup of processing byproduct on interior walls of the main pumping line.

13. The chuck vacuum line of claim 11 , wherein the size of the outlet end of the second portion is approximately 1.12 to approximately 1.95 times larger than the size of the inlet end of the second portion.

14. The chuck vacuum line of claim 11 , wherein the size of the second portion increases in a region at or near the outlet end of the second portion.

15. The chuck vacuum line of claim 11 , wherein a region at or near the outlet end of the second portion includes a plurality of openings.

16. The semiconductor processing tool of claim 15 , wherein the plurality of openings form at least two rings on sidewalls of the second portion.

17. The chuck vacuum line of claim 11 , wherein the second portion of the chuck vacuum line is substantially parallel to the sidewall of the main pumping line.

18. The chuck vacuum line of claim 11 , wherein the first portion of the chuck vacuum line penetrates the main pumping line at an angle of approximately 90 degrees to the main pumping line.

19. A semiconductor processing tool, comprising:
a process chamber body;
a chuck provided within the process chamber body to support a semiconductor device to be processed by the semiconductor processing tool;
a main pumping line connected to the process chamber body;
a chuck vacuum line connected to the chuck to apply a vacuum to the chuck, the chuck vacuum line comprising a first portion and a second portion,
wherein the first portion penetrates a sidewall of the main pumping line,
wherein the second portion is substantially parallel to a direction of flow in the main pumping line, and
wherein a size of an outlet end of the second portion is larger than a size of an inlet end of the second portion; and

a pump connected to the main pumping line, to cause the vacuum to be applied to the chuck via the chuck vacuum line.

20. The semiconductor processing tool of claim 19 , wherein a region at or near the outlet end of the second portion includes a plurality of openings to prevent processing byproduct from concentrating.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Liu Yung-Tsun
• Cheng Kuang-Wei
• Yang Sheng-Chun
• Lee Chih-Tsung
• Ni Chyi-Tsong

Classifications

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/78 Primary

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H10P72/04

  Apparatus for manufacture or treatment · CPC title

• C23C14/50

  Substrate holders · CPC title