Glass carriers for fan-out packaging having target coefficients of thermal expansion and methods for making the same

Patent metadata

Field	Value
Publication number	US-12084373-B2
Application number	US-202017435539-A
Country	US
Kind code	B2
Filing date	Feb 24, 2020
Priority date	Mar 7, 2019
Publication date	Sep 10, 2024
Grant date	Sep 10, 2024

Abstract

Methods for manufacturing glass articles having a target effective coefficient of thermal expansion CTETeff averaged over a temperature range comprise selecting a glass core composition having an average core glass coefficient of thermal expansion CTEcore that is greater than the target effective CTETeff and a glass clad composition having an average clad glass coefficient of thermal expansion CTEclad that is less than the target effective CTETeff; and manufacturing a glass laminate comprising a glass core layer formed from the glass core composition and two or more glass cladding layers fused to the glass core layer, each of the two or more glass cladding layers formed from the glass clad composition such that a ratio of a thickness of the glass core layer to a total thickness of the two or more glass cladding layers is selected to produce the glass laminate having an effective coefficient of thermal expansion CTEeff that is within ±0.5 ppm/° C. of the target effective CTETeff.

First claim

What is claimed is:

1. A method for manufacturing a glass article having a target effective coefficient of thermal expansion CTE Teff averaged over a temperature range, the method comprising:
selecting a glass core composition having an average core glass coefficient of thermal expansion CTE core over the temperature range that is greater than the target effective CTE Teff and a glass clad composition having an average clad glass coefficient of thermal expansion CTE clad over the temperature range that is less than the target effective CTE Teff , and
manufacturing a glass laminate comprising a glass core layer formed from the glass core composition and two or more glass cladding layers fused to the glass core layer, each of the two or more glass cladding layers formed from the glass clad composition such that a ratio of a thickness of the glass core layer to a total thickness of the two or more glass cladding layers is selected to produce the glass laminate having an effective coefficient of thermal expansion CTE eff over the temperature range that is within ±0.5 ppm/° C. of the target effective CTE Teff ,
wherein the glass laminate has an optical transmission of at least 20% over a range of wavelengths from 250 nm to 400 nm for a total substrate thickness of from 0.3 mm to 2 mm.

2. The method of claim 1 , wherein each of the glass core layer and the two or more glass cladding layers comprises a Young's modulus of greater than 50 GPa.

3. The method of claim 1 , wherein the two or more glass cladding layers each have a residual compressive stress of greater than 80 MPa.

4. The method of claim 1 , wherein the glass laminate has an optical transmission of greater than 60% over a range of wavelengths from 300 nm to 400 nm for a total substrate thickness of from 0.3 mm to 2 mm.

5. The method of claim 1 , wherein the glass laminate has an optical transmission of greater than 20% over a range of wavelengths from 250 nm to 300 nm for a total substrate thickness of from 0.3 mm to 2 mm.

6. A method for manufacturing a glass article having a target effective coefficient of thermal expansion CTE Teff averaged over a temperature range, the method comprising:
selecting a glass core composition having an average core glass coefficient of thermal expansion CTE core over the temperature range that is greater than the target effective CTE Teff and a glass clad composition having an average clad glass coefficient of thermal expansion CTE clad over the temperature range that is less than the target effective CTE Teff , and
manufacturing a glass laminate comprising a glass core layer formed from the glass core composition and two or more glass cladding layers fused to the glass core layer, each of the two or more glass cladding layers formed from the glass clad composition such that a ratio of a thickness of the glass core layer to a total thickness of the two or more glass cladding layers is selected to produce the glass laminate having an effective coefficient of thermal expansion CTE eff over the temperature range that is within ±0.5 ppm/° C. of the target effective CTE Teff ,
wherein the glass laminate has a stored tensile energy per area of less than 20 J/m 2 .

7. A method for manufacturing a glass article having a target effective coefficient of thermal expansion CTE Teff averaged over a temperature range, the method comprising:
manufacturing an initial glass laminate comprising a glass core layer formed from a glass core composition and two or more glass cladding layers fused to the glass core layer, each of the two or more glass cladding layers formed from a glass clad composition having a first ratio of a thickness of the glass core layer to a total thickness of the two or more glass cladding layers, wherein the glass core composition has an average core glass coefficient of thermal expansion CTE core over the temperature range, the glass clad composition has an average clad glass coefficient of thermal expansion CTE clad over the temperature range, and the initial glass laminate has an initial effective coefficient of thermal expansion CTE Ieff ,
determining the target effective coefficient of thermal expansion CTE Teff averaged over the temperature range, wherein the target effective CTE Teff is within #1 ppm/° C. of the initial effective CTE Ieff , and
manufacturing a modified glass laminate comprising a modified glass core layer formed from the glass core composition and two or more modified glass cladding layers fused to the modified glass core layer, each of the two or more modified glass cladding layers formed from the glass clad composition such that a ratio of a modified thickness of the modified glass core layer to a modified total thickness of the two or more modified glass cladding layers is selected to produce the modified glass laminate having an effective coefficient of thermal expansion CTE eff over the temperature range that is within ±0.5 ppm/° C. of the target effective CTE Teff .

8. The method of claim 7 , wherein each of the glass core layer and the two or more glass cladding layers in the initial glass laminate and each of the modified glass core layer and the two or more modified glass cladding layers in the modified glass laminate comprises a Young's modulus of greater than 50 GPa.

9. The method of claim 7 , wherein the two or more glass cladding layers in the initial glass laminate and the two or more glass modified cladding layers in the modified glass laminate each have a residual compressive stress of greater than 80 MPa.

10. The method of claim 7 , wherein the modified glass laminate has an optical transmission of greater than 60% over a range of wavelengths from 300 nm to 400 nm for a total substrate thickness of from 0.3 mm to 2 mm.

11. The method of claim 7 , wherein the modified glass laminate has an optical transmission of greater than 20% over a range of wavelengths from 250 nm to 300 nm for a total substrate thickness of from 0.3 mm to 2 mm.

12. The method of claim 7 , wherein the modified glass laminate has a stored tensile energy per area of less than 20 J/m 2 .

13. The method of claim 7 , wherein the initial effective CTE Ieff is greater than the target CTE Teff , and the ratio of the modified thickness of the modified glass core layer to the modified total thickness of the two or more modified glass cladding layers is less than the first ratio.

14. The method of claim 7 , wherein the initial effective CTE Ieff is less than the target CTE Teff , and the ratio of the modified thickness of the modified glass core layer to the modified total thickness of the two or more modified glass cladding layers is greater than the first ratio.

Assignees

• Corning Inc

Inventors

• Boek Heather Debra
• Gross Timothy Michael
• Kim Jin Su
• Kohl Jesse
• Lu Hung Cheng
• Xiao Yu
• Zhang Liying
• Zhang Lu

Classifications

• C03C3/093

  containing zinc or zirconium · CPC title

• C03C3/091 Primary

  containing aluminium · CPC title

• C03B17/064

  by the overflow downdraw fusion process; Isopipes therefor · CPC title

• B32B2307/30

  having particular thermal properties · CPC title

• B32B17/06

  comprising glass as the main or only constituent of a layer, next to another layer of a specific {material} · CPC title