Liquid discharge device and imprint apparatus

Patent metadata

Field	Value
Publication number	US-12083791-B2
Application number	US-202117500239-A
Country	US
Kind code	B2
Filing date	Oct 13, 2021
Priority date	Oct 14, 2020
Publication date	Sep 10, 2024
Grant date	Sep 10, 2024

Abstract

A liquid discharge device includes a container configured to contain a liquid; a discharge port which is formed by bonding a plurality of substrates and from which the liquid supplied from the container is discharged; a piezoelectric element provided in correspondence with the discharge port, and configured to generate energy for discharging the liquid from the discharge port; and a detection unit configured to detect peeling of a bonding surface between the plurality of substrates forming the discharge port.

First claim

What is claimed is:

1. A liquid discharge device comprising:
a container configured to contain a liquid;
a plurality of discharge ports which are formed by bonding a plurality of substrates and from which the liquid supplied from the container is discharged;
a plurality of piezoelectric elements provided in correspondence with each of the discharge ports, and configured to generate energy for discharging the liquid from the discharge ports;
a detection unit configured to detect peeling of bonding surfaces between the plurality of substrates forming the discharge ports; and
a display unit configured to display an error message if the detection unit detects that the bonding surfaces between the plurality of substrates respectively forming the plurality of discharge ports have continuously peeled off, and configured not to display the error message if the detection unit detects that the bonding surfaces have peeled off, but have not continuously peeled off.

2. The device according to claim 1 , wherein
the detection unit includes:
an obtainment unit configured to obtain a counter electromotive force from at least one of the piezoelectric elements when a driving current is supplied to the at least one piezoelectric element and the liquid is discharged from the corresponding discharge ports, and
a determination unit configured to determine, based on the counter electromotive force obtained by the obtainment unit, whether there is peeling of the bonding surface between the plurality of substrates forming the discharge ports.

3. The device according to claim 2 , further comprising:
a storage unit configured to store information, which is obtained in advance, indicating a waveform of a counter electromotive force from the piezoelectric elements obtained when a driving current is supplied to the at least one piezoelectric element and the liquid is normally discharged from the corresponding discharge port.

4. The device according to claim 3 , wherein
the determination unit includes:
a first comparison unit configured to compare the information indicating the waveform of the counter electromotive force obtained by the obtainment unit with the information stored in the storage unit, and
a second comparison unit configured to compare a waveform difference obtained from the comparison by the first comparison unit with a predetermined threshold value, and

the determination unit determines, based on the comparison by the second comparison unit, whether there is peeling of the bonding surface between the plurality of substrates forming the discharge ports.

5. The device according to claim 4 , wherein
the waveform difference is at least one of a waveform difference in amplitude and a waveform difference in phase.

6. The device according to claim 2 , further comprising:
a wiping unit configured to wipe a surface of the discharge ports before obtaining the counter electromotive force from at least one of the piezoelectric elements by the obtainment unit.

7. The device according to claim 2 , further comprising:
a pressure application unit configured to apply, to an interior of the container, a pressure to an extent that the liquid is not discharged from the discharge ports while the counter electromotive force is obtained from the piezoelectric elements by the obtainment unit.

8. The device according to claim 7 , wherein
the pressure is 2 to 3 kPa.

9. The device according to claim 7 , wherein
the surface of the discharge ports is coated with a liquid repellent.

10. The device according to claim 1 , wherein
the detection unit includes:
a measurement unit configured to measure a change in the surface of the discharge ports, and
a determination unit configured to determine, based on the change measured by the measurement unit, whether there is peeling of the bonding surface between the plurality of substrates forming the discharge ports.

11. The device according to claim 10 , wherein
the measurement unit includes an optical sensor.

12. An imprint apparatus that performs an imprint process on a substrate by discharging a liquid from a liquid discharge device defined in claim 1 .

Assignees

• Canon Kk

Inventors

• Ito Sari
• Kuri Masahiro
• Iimura Akiko
• Hasegawa Noriyasu

Classifications

• B41J2/16535

  using wiping constructions (B41J2/16552 takes precedence) · CPC title

• G03F7/0002

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title

• B41J2/04581

  controlling heads based on piezoelectric elements · CPC title

• B41J2/14201 Primary

  Structure of print heads with piezoelectric elements · CPC title

• B41J2002/14354

  Sensor in each pressure chamber · CPC title