Double-sided imprinting

Patent metadata

Field	Value
Publication number	US-12083733-B2
Application number	US-202217938550-A
Country	US
Kind code	B2
Filing date	Oct 6, 2022
Priority date	May 25, 2017
Publication date	Sep 10, 2024
Grant date	Sep 10, 2024

Abstract

Systems, apparatus, and methods for double-sided imprinting are provided. An example system includes first rollers for moving a first web including a first template having a first imprinting feature, second rollers for moving a second web including a second template having a second imprinting feature, dispensers for dispensing resist, a locating system for locating reference marks on the first and second webs for aligning the first and second templates, a light source for curing the resist, such that a cured first resist has a first imprinted feature corresponding to the first imprinting feature on one side of the substrate and a cured second resist has a second imprinted feature corresponding to the second imprinting feature on the other side of the substrate, and a moving system for feeding in the substrate between the first and second templates and unloading the double-imprinted substrate from the first and second webs.

First claim

What is claimed is:

1. A double-sided imprinting method comprising:
drawing a first web along first rollers, the first web comprising a first template having a first imprinting feature;
dispensing a first resist on the first template;
waiting until the first resist spreads into the first imprinting feature of the first template;
loading a substrate onto the first template, such that a first side of the substrate is in contact with the first resist on the first template;
clamping the substrate onto the first template, such that the substrate is movable together with the first template;
dispensing a second resist on a second side of the substrate;
aligning a first reference mark on the first web with a second reference mark on a second web that includes a second template, wherein the second template has a second imprinting feature, such that the second imprinting feature is aligned with the first imprinting feature;
after the aligning, drawing the first web along the first rollers and drawing the second web along second rollers simultaneously at a same rate;
curing the first resist and the second resist, such that the cured first resist has a first imprinted feature corresponding to the first imprinting feature on the first side of the substrate and the cured second resist has a second imprinted feature corresponding to the second imprinting feature on the second side of the substrate; and
unloading the substrate with the first imprinted feature on the first side and the second imprinted feature on the second side.

2. The method of claim 1 , wherein the first imprinting feature comprises a grating feature and the grating feature is configured such that the first resist uniformly fills into the grating feature.

3. The method of claim 1 , wherein aligning the first reference mark on the first web with the second reference mark on the second web comprises:
locating the first reference mark and the second reference mark by using at least one of a camera system or a laser system.

4. The method of claim 1 , wherein the first reference mark is positioned ahead of the first imprinting feature on the first web along a direction of drawing the first web, and the second reference mark is positioned ahead of the second imprinting feature on the second web along the direction.

5. The method of claim 1 , further comprising:
locating the first reference mark on the first web using a detecting system positioned before one of the first rollers, the detecting system comprising at least a camera system or a laser system.

6. The method of claim 1 , further comprising:
before clamping the substrate onto the first template,
locating the first reference mark on the first web and a reference mark on the substrate; and
aligning the first reference mark on the first web with the reference mark on the substrate.

7. The method of claim 1 , wherein the first template comprises one or more pre-patterned through holes, and
wherein clamping the substrate onto the first web comprises holding with vacuum the substrate by a vacuum chuck through the one or more pre-patterned through holes.

8. The method of claim 1 , wherein the first rollers comprise two first z-rollers arranged in a horizontal direction, and the second rollers comprise two second z-rollers arranged in the horizontal direction.

9. The method of claim 8 , wherein the two first z-rollers define a first moving range for the first web and the two second z-rollers define a second moving range for the second web, and
wherein the first moving range is larger than the second moving range and encloses the second moving range.

10. The method of claim 8 , wherein the first rollers and the second rollers are arranged to define a vertical distance between the first template and the second template, and
wherein the vertical distance is defined such that the second resist is pressed onto the second side of the substrate and filled into the second imprinting feature on the second template.

11. The method of claim 1 , further comprising:
before the curing, moving a squeegee roller onto the second web to push the second template into the second resist, such that the second resist fills into the second imprinting feature.

12. The method of claim 1 , further comprising:
after the aligning, moving the second rollers together with the second web to be in contact with the second resist on the second side of the substrate, such that the second template is pressed into the second resist and the second resist fills into the second imprinting feature.

13. The method of claim 1 , wherein unloading the substrate comprises:
pulling the second web away from one of the second rollers to separate from the substrate; and
unclamping the substrate and taking from the first web the substrate.

14. A double-sided imprinting method comprising:
drawing a first web along first rollers and drawing a second web along second rollers until a first template of the first web and a second template of the second web are brought together into an imprinting zone that is between adjacent two of the first rollers and between adjacent two of the second rollers;
aligning reference marks for the first template and the second template in the imprinting zone;
dispensing a first resist on a first side of a substrate and a second resist on a second side of the substrate;
feeding the substrate into the imprinting zone between the first template and the second template;
after the substrate is fed into the imprinting zone, pressing the first template and the second template onto the substrate in the imprinting zone, such that the first resist fills into a first imprinting feature of the first template on the first side of the substrate and the second resist fills into a second imprinting feature of the second template on the second side of the substrate;
curing the first resist and the second resist, such that the cured first resist has a first imprinted feature corresponding to the first imprinting feature on the first side of the substrate and the cured second resist has a second imprinted feature corresponding to the second imprinting feature on the second side of the substrate; and
unloading the substrate with the first imprinted feature on the first side and the imprinted feature on the second side.

15. The method of claim 14 , wherein pressing the first template and the second template onto the substrate comprises applying a first press dome on the first template and a second press dome on the second template,
wherein the method further comprises:
bringing the first press dome into contact with the first template and bringing the second press dome into contact with the second template; and
making a correction for alignment of the first template and the second template.

16. The method of claim 14 , wherein pressing the first template and the second template onto the substrate comprises:
moving a first squeegee roller onto the first web to push the first template into the first resist, such that the first resist fills into the first imprinting feature on the first template; and
moving a second squeegee roller onto the second web to push the second template into the second resist, such that the second resist fills into the second imprinting feature on the second template.

17. A double-sided imprinting method comprising:
drawing a first web along a first roller and a second roller, the first web comprising a first template having a first imprinting feature;
drawing a second web along a third roller and a fourth roller, the second web comprising a second

Assignees

• Magic Leap Inc

Inventors

• Patterson Roy
• Carden Charles Scott
• Sadam Satish
• Christiansen Ryan
• Shafran Matthew S
• Fleckenstein Christopher John
• Singh Vikramjit
• Miller Michael Nevin
• Luo Kang

Classifications

• G03F9/7023

  Aligning or positioning in direction perpendicular to substrate surface · CPC title

• G03F7/0002 Primary

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title

• B29C43/58

  Measuring, controlling or regulating {(for bank adjustment in calendering B29C43/245)} · CPC title

• B29C43/52

  Heating or cooling · CPC title

• B29C43/50

  Removing moulded articles · CPC title