Web edge metrology

Patent metadata

Field	Value
Publication number	US-12080869-B2
Application number	US-202117543360-A
Country	US
Kind code	B2
Filing date	Dec 6, 2021
Priority date	Dec 10, 2020
Publication date	Sep 3, 2024
Grant date	Sep 3, 2024

Abstract

Metrology systems and processing methods for continuous lithium ion battery (LIB) anode pre-lithiation and solid metal anode protection are provided. In some embodiments, the metrology system integrates at least one complementary non-contact sensor to measure at least one of surface composition, coating thickness, and nanoscale roughness. The metrology system and processing methods can be used to address anode edge quality. The metrology system and methods can facilitate high quality and high yield closed loop anode pre-lithiation and anode protection layer deposition, alloy-type anode pre-lithiation stage control improves LIB coulombic efficiency, and anode coating with pinhole free and electrochemically active protection layers resist dendrite formation.

First claim

The invention claimed is:

1. A method, comprising:
transferring a continuous sheet of flexible material from a feed reel in an unwinding chamber to a deposition module arranged downstream from the unwinding chamber, the deposition module comprising a first coating drum capable of guiding the continuous sheet of flexible material past a plurality of deposition units;
guiding the continuous sheet of flexible material past the plurality of deposition units along a travel direction while depositing a lithium metal film on the continuous sheet of flexible material via the plurality of deposition units, wherein the chambers are radially disposed about the coating drum;
guiding the continuous sheet of flexible material past a metrology module, comprising a plurality of non-contact optical sensors positioned side-by-side along a transverse direction, wherein the optical sensors have a field of view coinciding with a travel path traversed by the continuous sheet of flexible material, and the transverse direction is perpendicular to the travel direction; and
obtaining a first contactless electrical resistivity measurement of the lithium metal film on the continuous sheet of flexible material in the field of view.

2. The method of claim 1 , further comprising:
determining a first thickness of the lithium metal film using the first contactless electrical resistivity measurement, wherein determining the first thickness of the lithium metal film comprises comparing the first contactless electrical resistivity measurement with a previously determined correlation between electrical resistivity measurements and respective thickness of lithium metal films;
obtaining a contactless laser interferometry measurement of the continuous sheet of flexible material in the field of view;
determining web flutter of the continuous sheet of flexible material based on the contactless laser interferometry measurement of the continuous sheet of flexible material;
adjusting the first thickness measurement of the lithium metal film based on the web flutter to determine a corrected first thickness of the lithium metal film; and
aging the lithium metal film for a period of time.

3. The method of claim 2 , further comprising:
obtaining a second contactless electrical resistivity measurement of the lithium metal film on the continuous sheet of flexible material in the field of view after aging the lithium metal film for a period of time;
determining a second thickness of the lithium metal film using the second contactless electrical resistivity measurement, wherein determining the second thickness of the lithium metal film comprises comparing the second contactless electrical resistivity measurement with a previously determined correlation between electrical resistivity measurements and respective thickness of lithium metal films; and
determining a pre-lithiation amount of an anode film deposited on the continuous sheet of flexible material by comparing the first thickness of the lithium metal film with the second thickness of the lithium metal film.

4. The method of claim 3 , further comprising aging the lithium metal film for a period of time.

5. The method of claim 4 , wherein the field of view coincides with a travel path traversed by the continuous sheet of flexible material, and the transverse direction is perpendicular to the travel direction.

6. A method, comprising:
transferring a continuous sheet of flexible material from a feed reel in an unwinding chamber to a deposition module arranged downstream from the unwinding chamber, the deposition module comprising a first coating drum capable of guiding the continuous sheet of flexible material past a plurality of deposition units;
guiding the continuous sheet of flexible material past the plurality of deposition units along a travel direction while depositing a lithium metal film on the continuous sheet of flexible material via the plurality of deposition units, wherein the chambers are radially disposed about the coating drum;
guiding the continuous sheet of flexible material past a metrology module, comprising a plurality of non-contact optical sensors positioned side-by-side along a transverse direction; and
obtaining a first contactless electrical resistivity measurement of the lithium metal film on the continuous sheet of flexible material in a field of view of the optical sensors.

7. The method of claim 6 , further comprising:
determining a first thickness of the lithium metal film using the first contactless electrical resistivity measurement, wherein determining the first thickness of the lithium metal film comprises comparing the first contactless electrical resistivity measurement with a previously determined correlation between electrical resistivity measurements and respective thickness of lithium metal films.

8. The method of claim 7 , further comprising:
obtaining a contactless laser interferometry measurement of the continuous sheet of flexible material in the field of view; and
determining web flutter of the continuous sheet of flexible material based on the contactless laser interferometry measurement of the continuous sheet of flexible material.

9. The method of claim 8 , further comprising adjusting the first thickness measurement of the lithium metal film based on the web flutter to determine a corrected first thickness of the lithium metal film.

10. The method of claim 9 , further comprising obtaining a second contactless electrical resistivity measurement of the lithium metal film on the continuous sheet of flexible material in the field of view after aging the lithium metal film for a period of time.

11. The method of claim 10 , further comprising determining a second thickness of the lithium metal film using the second contactless electrical resistivity measurement, wherein determining the second thickness of the lithium metal film comprises comparing the second contactless electrical resistivity measurement with a previously determined correlation between electrical resistivity measurements and respective thickness of lithium metal films.

12. The method of claim 11 , further comprising determining a pre-lithiation amount of an anode film deposited on the continuous sheet of flexible material by comparing the first thickness of the lithium metal film with the second thickness of the lithium metal film.

Assignees

• Applied Materials Inc

Inventors

• Ishikawa David Masayuki
• Gopalakrishnan Nair Girish Kumar
• Rangasamy Ezhiylmurugan
• Alvarez David
• Zhao Kent Qiujing

Classifications

• H01M4/661

  Metal or alloys, e.g. alloy coatings (H01M4/669 take precedence) · CPC title

• H01M2220/20

  Batteries in motive systems, e.g. vehicle, ship, plane · CPC title

• G01B7/105 Primary

  for measuring thickness of coating · CPC title

• G01B11/303

  using photoelectric detection means · CPC title

• H01M4/382

  Lithium (H01M4/405 takes precedence) · CPC title