Method for collecting dust from single crystal growth system

Patent metadata

Field	Value
Publication number	US-12076677-B2
Application number	US-202318217687-A
Country	US
Kind code	B2
Filing date	Jul 3, 2023
Priority date	Jun 22, 2020
Publication date	Sep 3, 2024
Grant date	Sep 3, 2024

Abstract

A method for collecting dust from a single crystal growth system includes providing dry air and oxygen into an exit pipe connecting to the single crystal growth system, blowing a first inert gas into the exit pipe to compel the dust oxide toward a dust collecting device, collecting the dust oxide by the dust collecting device; and providing a rotary pump to transport residues of the dust oxide backward. The oxygen reacts with the unstable dust for forming dust oxide. The exit pipe is used to exhaust unstable dust from the single crystal growth system.

First claim

What is claimed is:

1. A method for collecting dust from a single crystal growth system, comprising steps as follows:
providing dry air and oxygen into an exit pipe connecting to the single crystal growth system, the oxygen reacting with unstable dust for forming dust oxide so as to stabilize the dust in the exit pipe, wherein the exit pipe is used to exhaust the unstable dust from the single crystal growth system;
blowing a first inert gas into the exit pipe to compel the dust oxide toward a dust collecting device;
collecting the dust oxide by the dust collecting device; and
providing a rotary pump to transport residues of the dust oxide from an outlet of the dust collecting device to an inlet of the rotary pump.

2. The method for collecting dust from the single crystal growth system as claimed in claim 1 , further providing an air compressor with a steam separator fluidly connected to the exit pipe to provide clean dry air into the exit pipe, a first valve being connected between the single crystal growth system and the exit pipe, and a second valve being connected between the air compressor and the exit pipe.

3. The method for collecting dust from the single crystal growth system as claimed in claim 1 , wherein the first inert gas is nitrogen, and a first airflow valve is connected to the exit pipe to control an airflow of the first inert gas.

4. The method for collecting dust from the single crystal growth system as claimed in claim 1 , wherein an exhaust pipe is connected between the exit pipe and the dust collecting device, a line valve is connected between the exit pipe and the dust collecting device, and a throttle valve is connected between the line valve and the dust collecting device.

5. The method for collecting dust from the single crystal growth system as claimed in claim 1 , wherein the dust collecting device is a cyclone filter, a collecting area of the cyclone filter is fluidly connected to a scrubber, and a second inert gas blows into the collecting area of the cyclone filter.

6. The method for collecting dust from the single crystal growth system as claimed in claim 5 , further comprising a second airflow valve connecting to the collecting area of the cyclone filter to control an airflow of the second inert gas, and a second stop valve being connected between the collecting area of the cyclone filter and the scrubber.

7. The method for collecting dust from the single crystal growth system as claimed in claim 5 , further comprising a step of blowing a third inert gas into the rotary pump to clean a rotator of the rotary pump.

8. The method for collecting dust from the single crystal growth system as claimed in claim 7 , further comprising a third stop valve being connected between the cyclone filter and the rotary pump, and a third airflow valve connecting between the third stop valve and the rotary pump to control an airflow of the third inert gas.

9. The method for collecting dust from the single crystal growth system as claimed in claim 7 , wherein the scrubber has a blower, and a drain valve to control an exit of the collected dust oxide.

10. The method for collecting dust from the single crystal growth system as claimed in claim 9 , further comprising a fourth inert gas source for blowing an inert gas into the pipe connected the scrubber, and a valve being connected between the rotary pump and the scrubber.

Assignees

• Globalwafers Co Ltd

Inventors

• Nakanishi Masami
• Su Yu-Sheng
• Li I-Ching

Classifications

• B01D53/46

  Removing components of defined structure · CPC title

• B01D2252/103

  Water · CPC title

• B04C9/00

  Combinations with other devices, e.g. fans, {expansion chambers, diffusors, water locks}(with filters B01D50/00) · CPC title

• B04C5/185 Primary

  Dust collectors · CPC title

• B04C2009/005

  with external rotors, e.g. impeller, ventilator, fan, blower, pump · CPC title