Pre-concentrator with aligned three-dimensional porous structure and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-12070736-B2
Application number	US-201917046042-A
Country	US
Kind code	B2
Filing date	Feb 19, 2019
Priority date	Apr 9, 2018
Publication date	Aug 27, 2024
Grant date	Aug 27, 2024

Abstract

The disclosed pre-concentrator comprises: a base substrate having a trench; a metal layer conformally disposed along the inner surface of the trench; and a three-dimensional porous nanostructure disposed on the metal layer in the trench and having aligned pores connected to each other in three dimensions. The pre-concentrator can improve the concentration performance of a sample and the thermal desorption efficiency of a concentrated sample.

First claim

What is claimed is:

1. A method of manufacturing a pre-concentrator, which comprises:
forming a three-dimensional porous mold in a trench of a base substrate;
forming a reverse filled structure by filling pores of the three-dimensional porous mold; and
forming a three-dimensional porous nano structure including arranged pores three-dimensionally connected to each other by removing the three-dimensional porous mold,
wherein forming the three-dimensional porous mold comprises:
forming a photosensitive film in the trench such that an upper surface of the photosensitive film is lower than an upper surface of the base substrate where the trench is not formed;
coating a composition on the photosensitive film to fill the trench;
curing the composition to form an optical medium member, wherein the optical medium member has a protrusion, which is disposed in the trench to contact the upper surface of the photosensitive film, the optical medium member further contacts the upper surface of the base substrate, and the optical medium member has a flat upper surface having a width larger than a width of the trench;
disposing a phase mask having a concave and convex structure over the optical medium member such that the concave and convex structure contacts the flat upper surface of the optical medium member; and
irradiating a light of a three-dimensional distribution onto the photosensitive film through the phase mask and the optical medium member.

2. The method of manufacturing a pre-concentrator of claim 1 , wherein the phase mask and the optical medium member include a substantially same polymer.

3. The method of manufacturing a pre-concentrator of claim 2 , wherein the phase mask and the optical medium member include at least one selected from the group consisting of PDMS (polydimetyl siloxane), PUA (polyurethane acrylate) and PEPE (perfluoropolyether).

4. The method of manufacturing a pre-concentrator of claim 1 , wherein the three-dimensional nano structure includes at least one selected from the group consisting of cerium oxide (CeO 2 ), aluminum oxide (Al 2 O 3 ), titanium oxide (TiO 2 ), zirconium oxide (ZrO 2 ), zinc oxide (ZnO) and titanium nitride (TiN).

5. The method of manufacturing a pre-concentrator of claim 1 , wherein the three-dimensional nano structure includes at least one selected from the group consisting of gold, silver, platinum, palladium, ruthenium, rhodium, iridium, vanadium, nickel, cobalt, copper, tungsten, molybdenum, manganese, aluminum and iron.

Assignees

• Korea Advanced Inst Sci & Tech

Inventors

• Jeon Seokwoo
• Cho Donghwi
• Park Junyong

Classifications

• G01N33/0019

  by preconcentration · CPC title

• G03F1/26

  Phase shift masks [PSM]; PSM blanks; Preparation thereof · CPC title

• G01N33/0011

  Sample conditioning (preparing specimens for investigation G01N1/28) · CPC title

• B01J20/08

  comprising aluminium oxide or hydroxide; comprising bauxite · CPC title

• B01J20/06 Primary

  comprising oxides or hydroxides of metals not provided for in group B01J20/04 · CPC title