Composition, method of producing substrate, and polymer

Patent metadata

Field	Value
Publication number	US-12065534-B2
Application number	US-202117541317-A
Country	US
Kind code	B2
Filing date	Dec 3, 2021
Priority date	Jun 10, 2019
Publication date	Aug 20, 2024
Grant date	Aug 20, 2024

Abstract

A composition includes a polymer and a solvent. The polymer includes: a structural unit including a ring structure; and a functional group capable of bonding to a metal atom. An atom chain constituting the ring structure constitutes a part of a main chain of the polymer. The polymer preferably includes at an end of the main chain or at an end of a side chain, a group including the functional group. The functional group is preferably a cyano group, a phosphono group, or a dihydroxyboryl group. The ring structure preferably includes an alicyclic structure.

First claim

What is claimed is:

1. A composition comprising:
a polymer comprising: a structural unit comprising a ring structure; and a functional group capable of bonding to a metal atom; and
a solvent,
wherein an atom chain constituting the ring structure constitutes a part of a main chain of the polymer, and
wherein the structural unit is represented by formula (1):

wherein, in the formula (1), R 1 to R 6 each independently represent a hydrogen atom, a halogen atom, or a monovalent organic group having 1 to 10 carbon atoms; R 7 represents a hydrogen atom or a monovalent organic group having 1 to 10 carbon atoms; and p is an integer of 0 to 4, wherein in a case in which p is 1, R 8 represents a halogen atom, a hydroxy group, or a monovalent organic group having 1 to 20 carbon atoms, and wherein in a case in which p is no less than 2, a plurality of R 8 s are identical or different from each other and each represent a halogen atom, a hydroxy group, or a monovalent organic group having 1 to 20 carbon atoms, or at least two of the plurality of R 8 s taken together represent a ring structure having 4 to 20 ring atoms together with the carbon chain to which the at least two of the plurality of R 8 s bond.

2. The composition according to claim 1 , wherein the polymer comprises at an end of the main chain or at an end of a side chain, a group comprising the functional group.

3. The composition according to claim 1 , wherein the functional group is a cyano group, a phosphono group, or a dihydroxyboryl group.

4. The composition according to claim 1 , wherein the composition is suitable for chemical modification of a surface of a base comprising the metal atom in a surface layer thereof.

5. A method of producing a substrate, the method comprising:
forming a coating film directly or indirectly on a base comprising a metal atom in a surface layer thereof by applying the composition according to claim 1 ; and
heating the coating film.

6. The method according to claim 5 , wherein the base comprises:
a first region comprising the metal atom in a surface layer thereof; and a second region not comprising the metal atom in a surface layer thereof.

7. The method according to claim 5 , wherein the metal atom constitutes a metal simple substance, an alloy, an electrically conductive nitride, or a silicide.

8. The method according to claim 5 , wherein the metal atom is an atom of copper, iron, zinc, cobalt, aluminum, titanium, tin, tungsten, zirconium, tantalum, germanium, molybdenum, ruthenium, gold, silver, platinum, palladium, or nickel.

9. The method according to claim 5 , further comprising after the heating,
bringing a removing liquid into contact with a film formed by the heating.

10. The method according to claim 9 , wherein the removing liquid comprises an acid, a base, or both.

11. The method according to claim 5 , wherein the polymer comprises at an end of the main chain or at an end of a side chain, a group comprising the functional group.

12. The method according to claim 5 , wherein the functional group is a cyano group, a phosphono group, or a dihydroxyboryl group.

13. The composition according to claim 1 , wherein a proportion of the structural unit with respect to total structural units constituting the polymer is 0.1 to 80 mol %.

14. The composition according to claim 1 , wherein a proportion of the structural unit with respect to total structural units constituting the polymer is 10 to 30 mol %.

15. The composition according to claim 1 , wherein a proportion of the polymer with respect to total components other than the solvent in the composition is 80% by mass or more.

16. The composition according to claim 1 , wherein a proportion of the polymer with respect to total components other than the solvent in the composition is 95% by mass or more.

17. The method according to claim 5 , wherein a proportion of the structural unit with respect to total structural units constituting the polymer is 0.1 to 80 mol %.

18. The method according to claim 5 , wherein a proportion of the structural unit with respect to total structural units constituting the polymer is 10 to 30 mol %.

19. The method according to claim 5 , wherein a proportion of the polymer with respect to total components other than the solvent in the composition is 80% by mass or more.

20. The method according to claim 5 , wherein a proportion of the polymer with respect to total components other than the solvent in the composition is 95% by mass or more.

Assignees

• Jsr Corp

Inventors

• Komatsu Hiroyuki
• SHIRATANI Motohiro
• Sakai Tatsuya

Classifications

• C09D165/00

  Coating compositions based on macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain (C09D107/00 - C09D157/00, C09D161/00 take precedence); Coating compositions based on derivatives of such polymers · CPC title

• B05D3/0254

  After-treatment · CPC title

• B05D1/208

  After-treatment of monomolecular films · CPC title

• B05D3/107

  Post-treatment of applied coatings · CPC title

• B05D1/005

  Spin coating · CPC title