Optical scanning system using micro-electro-mechanical system (mems) micro-mirror arrays (MMAs)

Patent metadata

Field	Value
Publication number	US-12061334-B2
Application number	US-202117231898-A
Country	US
Kind code	B2
Filing date	Apr 15, 2021
Priority date	Apr 15, 2021
Publication date	Aug 13, 2024
Grant date	Aug 13, 2024

Abstract

An optical scanning system includes one or more Micro-Electro-Mechanical System (MEMS) Micro-Mirror Arrays (MMAs) used to scan a field-of-view (FOV) over a field-of-regard (FOR). The MEMS MMA is configured such that optical radiation from each point in the FOV does not land on or originate from out-of-phase mirror segments and a diffraction limited resolution of the optical system is limited by the size of the entrance pupil and not by the size of individual mirrors.

First claim

We claim:

1. An optical scanning system, comprising:
an active optical component including an optical detector or source;
an optical system including one or more optical elements configured to propagate optical radiation focused at a near point at the active optical component and collimated toward a distant conjugate point within a field-of-view (FOV), wherein optical radiation at each point in the FOV passes through an entrance pupil; and
one or more Micro-Electro-Mechanical System (MEMS) Micro-Mirror Arrays (MMAs) each comprising a plurality of mirrors, each said MEMS MMA responsive to command signals to partition the MMA into one or more mirror segments, each mirror segment including one or more mirrors, and to at least tip and tilt the mirrors in at least 2 degrees-of-freedom (DOF) to approximate a continuous reflective surface in each mirror segment at a specified scan angle to scan the FOV over a field-of-regard (FOR) such that optical radiation from each point in the FOV does not land on or originate from out-of-phase mirror segments and a diffraction limited resolution of the optical system is limited by the size of the entrance pupil and not by the size of individual mirrors.

2. The optical scanning system of claim 1 , wherein a plurality of said MEMS MMAs are arranged to address different portions of the FOR, only one said MEMS MMA being active to scan the FOV over its portion of the FOR, further comprising a fold mirror that selects the active MEMS MMA to propagate optical radiation between the active optical component and the active MEMS MMA.

3. The optical scanning system of claim 2 , wherein the fold mirror comprises a secondary MEMS MMA in which the mirrors are responsive to command signals to at least tip and tilt to select the active MEMS MMA.

4. The optical scanning system of claim 3 , in which the secondary MEMS MMA is responsive to command signals to partition the secondary MMA into one or more mirror segments, each mirror segment including one or more mirrors, and to at least tip and tilt the mirrors to approximate a continuous reflective surface in each mirror segment at a specified steering angle to select the active MEMS MMA such that optical radiation from each point in the FOV does not land on or originate from out-of-phase mirror segments and a diffraction limited resolution of the optical system is limited by the size of the entrance pupil and not by the size of the mirror segments.

5. The optical scanning system of claim 1 , wherein the mirrors tip, tilt and piston in 3 DOF to scan the FOV over the FOR.

6. The optical scanning system of claim 5 , wherein responsive to additional command signals the mirrors piston to adjust for path length differences across a wavefront of the optical radiation.

7. The optical scanning system of claim 5 , wherein responsive to the command signals the MEMS MMA is partitioned into a single mirror segment including all of the mirrors, wherein the mirrors are tipped, tilted and pistoned to approximate a single continuous reflective surface at the specified scan angle.

8. The optical scanning system of claim 5 , wherein the maximum translation of each said mirror to piston is z, wherein responsive to command signals the MEMS MMA is partitioned into a minimum number of mirror segments each having a maximum size as limited by the maximum translation z to approximate the continuous reflective surface at the specified scan angle.

9. The optical scanning system of claim 5 , wherein the optical radiation is coherent at specified wavelength, wherein the MEMS MMA responsive to command signals pistons each of a plurality of mirror segments such that the optical path differences between the mirror segments are a multiple of 2*pi times the specified wavelength to maintain phase matching across a wavefront of the coherent optical radiation.

10. The optical scanning system of claim 9 , wherein the maximum translation of each said mirror to piston is z, wherein responsive to command signals the MEMS MMA is partitioned into a minimum number of mirror segments each having maximum size as limited by the maximum translation z to approximate the continuous reflective surface at the specified scan angle.

11. The optical scanning system of claim 1 , wherein the size of the entrance pupil is less than the size of one mirror segment.

12. The optical scanning system of claim 11 , wherein the maximum translation of each said mirror to piston is z, wherein responsive to command signals the MEMS MMA is partitioned into a minimum number of mirror segments each having a maximum size as limited by the maximum translation z to approximate the continuous reflective surface at the specified scan angle.

13. The optical scanning system of claim 1 , wherein the one or more MEMS MMAs are positioned at or near an intermediate image plane in the optical system.

14. An optical scanning system, comprising:
an active optical component including an optical detector or source;
an optical system including one or more optical elements configured to propagate coherent optical radiation at a specified wavelength focused at a near point at the active optical component and collimated toward a distant conjugate point within a field-of-view (FOV), wherein optical radiation at each point in the FOV passes through an entrance pupil; and
one or more Micro-Electro-Mechanical System (MEMS) Micro-Mirror Arrays (MMAs) each comprising a plurality of mirrors, each said MEMS MMA responsive to command signals to partition the MMA into a plurality of mirror segments, each mirror segment including one or more mirrors, and to tip, tilt and piston the mirrors in 3 degrees-of-freedom (DOF) to approximate a continuous reflective surface in each mirror segment at a specified scan angle such that the optical path differences between the mirror segments multiples of 2*pi times the specified wavelength to maintain phase matching across a wavefront of the coherent optical radiation to scan the FOV over a field-of-regard (FOR).

15. An optical scanning system, comprising:
an active optical component including an optical detector or source;
an optical system including one or more optical elements configured to propagate optical radiation focused at a near point at the active optical component and collimated toward a distant conjugate point within a field-of-view (FOV), wherein optical radiation at each point in the FOV passes through an entrance pupil;
a plurality of Micro-Electro-Mechanical System (MEMS) Micro-Mirror Arrays (MMAs) arranged to address different portions of a field-of-regard (FOR), each comprising a plurality of mirrors, and
a fold mirror responsive to command signals to direct optical radiation between the active optical component and one said active MEMS MMA at a time,
said active MEMS MMA responsive to command signals to partition the MMA into a plurality of mirror segments, each mirror segment including one or more mirrors, and to at least tip and tilt the mirrors to approximate a continuous reflective surface in each mirror segment at a specified scan angle to scan the FOV over its portion of the FOR.

16. The optical scanning system of claim 15 , wherein responsive to the command signals the active MEMS MMA is partitioned into a single mirror segment including all of the mirrors, wherein the mirrors are tipped, tilted and pistoned to approximate a single continuous reflective surface at the specified scan angle.

17. The optical scanning system of claim 15 , wherein the maximum translation of each said mirror to piston is z, wherein responsive to command signals the active MEMS MMA

Assignees

• Raytheon Co

Inventors

• Knapp David J
• Uyeno Gerald P
• Keller Sean D
• Gleason Benn H
• Rogala Eric
• Lange Mark K
• Odom Garret A
• Shott Craig O
• Barker Zachary D

Classifications

• G02B26/0833 Primary

  the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B) · CPC title

• B81B2201/042

  Micromirrors, not used as optical switches · CPC title

• B81B2203/058

  Rotation out of a plane parallel to the substrate · CPC title

• B81B3/0083

  Optical properties · CPC title

• B81B2207/053

  of movable structures · CPC title