System and method for diagnosing the operating state of a microelectromechanical sensor

Patent metadata

Field	Value
Publication number	US-12060265-B2
Application number	US-202016917202-A
Country	US
Kind code	B2
Filing date	Jun 30, 2020
Priority date	Jul 2, 2019
Publication date	Aug 13, 2024
Grant date	Aug 13, 2024

Abstract

A system for diagnosing the operating state of a MEMS sensor includes a stimulation circuit, external to the MEMS sensor, configured to generate a stimulation signal designed to be detected by the MEMS sensor. The system has control circuitry, operatively coupled to the stimulation circuit and to the MEMS sensor, so as to control the stimulation circuit to generate the stimulation signal and receive a diagnostic signal generated by the MEMS sensor in response to the stimulation signal. The control circuitry determines an operating state of the MEMS sensor based on the diagnostic signal and an expected response to the stimulation signal by the MEMS sensor.

First claim

The invention claimed is:

1. A system, comprising:
an industrial machine;
a board on the industrial machine;
a micro-electro-mechanical system (MEMS) sensor coupled to the board, the MEMS sensor configured to output a detection signal in a normal operating condition;
control circuitry coupled to the board and to the MEMS sensor, the control circuitry configured to:
process the detection signal to verify an existence of an alarm condition;
initiate a diagnostic procedure while the MEMS is in the normal operating condition in response to the alarm condition;

a stimulation device coupled to the board and configured to generate vibrations in a plurality of frequencies in response to the diagnostic procedure being initiated, the MEMS sensor being external to the stimulation device, the MEMS sensor configured to sense the vibrations and generate a diagnostic signal in response to the vibrations, the control circuitry configured to receive the diagnostic signal;
a verification sensor coupled to the board and external to the MEMS sensor and the stimulation circuitry, the verification sensor configured to also receive the vibrations and generate a verification signal based on the vibrations, the control circuitry configured to receive the verification signal, the control circuitry configured to:
compare the verification signal to a first reference to determine if the stimulation device has properly generated the vibrations;
if the stimulation device has properly generated the vibrations, determine whether the alarm condition is verified by comparing the diagnostic signal from the MEMS sensor to a reference signal; and
output a state of the MEMS device with a status of the alarm condition;

a management unit coupled to the industrial machine and configured to receive the state of the MEMS device and the status of the alarm condition.

2. The system according to claim 1 , wherein the control circuitry is configured to perform a joint time-frequency analysis of the diagnostic signal and to check for a response pattern in the joint time-frequency analysis.

3. The system according to claim 2 , wherein the MEMS sensor is a triaxial sensor and the diagnostic signal has components along a first, a second, and a third axes of a reference system; and wherein the joint time-frequency analysis includes uniaxial responses with respect to each of the first, second, and third axes, respectively, and a combination of the uniaxial responses.

4. The system according to claim 2 , comprising a neural-network configured to perform automatic classification based on the joint time-frequency analysis in order to determine the operating state of the MEMS sensor.

5. The system according to claim 4 , wherein the control circuitry is configured to perform an analysis of a detection signal generated by the MEMS sensor and indicative of one or more characteristics of movement of the industrial machine, the neural-network being configured to perform automatic classification of the detection signal to determine one or more parts of the electronic or mechanical system having a faulty operation or a failure.

6. The system according to claim 5 , wherein the control circuitry is configured to perform a preventive and predictive analysis to predict a faulty operation or a failure of one or more parts of the industrial machine.

7. The system according to claim 5 , wherein the stimulation device is configured to generate the vibrations having characteristics detectable by the MEMS sensor.

8. The system according to claim 7 , wherein the vibrations have frequencies being in a detection band of the MEMS sensor and distinct from a frequency band in which the industrial machine operates.

9. The system according to claim 1 , wherein the MEMS sensor is a movement sensor and the verification sensor is a microphone sensor.

10. The system according to claim 1 , wherein the control circuitry is configured to confirm or reject an alarm condition associated with a detection signal generated by the MEMS sensor and indicative of characteristics of movement of the industrial machine, according to the operating state of the MEMS sensor determined based on the diagnostic signal.

11. A method, comprising:
triggering an alarm by a controller in response to a detection signal from a microelectromechanical (MEMS) sensor, the controller and the MEMS sensor both being attached to a printed circuit board attached to a machine;
performing a diagnostic test in response to the alarm by:
generating vibrations in a plurality of frequencies with a stimulation device that is separate and distinct from the MEMS sensor and that is attached to the printed circuit board and electrically coupled to the controller;
generating a verification signal by a verification sensor based on the vibrations, the verification sensor is separate and distinct from the MEMS sensor and the stimulation circuit, the verification sensor being attached to the printed circuit board and electrically coupled to the controller;
determining, with the controller, whether or not the stimulation device is operating properly based on the verification signal;
generating a diagnostic signal by the MEMS sensor based on the vibrations;
comparing, with the controller, the diagnostic signal to a threshold response;
determining, with the controller a malfunction of the MEMS sensor if the stimulation device is functioning properly and the diagnostic signal does not satisfy a threshold response;
determining that the machine is faulty if the stimulation device is operating properly and the diagnostic signal satisfies the threshold response; and
transmitting the malfunction of the MEMS sensor to a management unit of the machine, the management unit being distinct from the printed circuit board.

12. The method according to claim 11 , wherein the determining the malfunction of the MEMS sensor includes executing a joint time-frequency analysis of the diagnostic signal and checking for an expected response pattern in the joint time-frequency analysis.

13. The method according to claim 11 , comprising conducting automatic classification using a neural network based on the joint time-frequency analysis in order to determine the malfunction of the MEMS sensor.

14. The method according to claim 13 , comprising performing operations of conducting automatic classification of a detection signal generated by the MEMS sensor and indicative of characteristics of movement of the machine and determining one or more parts of the machine having a faulty operation or a failure based on the automatic classification.

15. The method according to claim 11 , comprising: executing a preliminary verification of the stimulation signal, and consequently of the reliability of the determining the malfunction of the MEMS sensor, based on the verification signal.

16. The method according to claim 11 , comprising confirming or rejecting the alarm associated with a detection signal generated by the MEMS sensor and indicative of characteristics of movement of the machine, according to the malfunction of the MEMS sensor determined based on the diagnostic signal.

17. A system, comprising:
a printed circuit board;
a micro-electro-mechanical-system (MEMS) sensor coupled to a first side of the printed circuit board;
a stimulation device coupled to a second side of the printed circuit board, the stimulation device being configured to generate vibrations in a plurality of frequencies to be sensed by the MEMS sensor, the MEMS sensor being external to the stimulation circuitry and configured to generate a diagnostic signal

Assignees

• St Microelectronics Srl

Inventors

• Alessi Enrico Rosario
• Passaniti Fabio
• Prati Daniele

Classifications

• G01P21/00

  Testing or calibrating of apparatus or devices covered by the preceding groups · CPC title

• B81B2201/0257

  Microphones or microspeakers · CPC title

• G01C19/5776

  Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719 · CPC title

• G01C25/00

  Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass (testing, calibrating or compensating compasses G01C17/38) · CPC title

• B81B7/008 Primary

  MEMS characterised by an electronic circuit specially adapted for controlling or driving the same (B81B7/0087 takes precedence; arrangements for starting, regulating, braking, or otherwise controlling an actuator H02N; control arrangements or circuits for visual indicators G09G3/00) · CPC title