Membranes for removing metallic species from amines

Patent metadata

Field	Value
Publication number	US-12059656-B2
Application number	US-202117488897-A
Country	US
Kind code	B2
Filing date	Sep 29, 2021
Priority date	Oct 2, 2020
Publication date	Aug 13, 2024
Grant date	Aug 13, 2024

Abstract

The disclosure is directed to removal of metal contaminants from fluids, as well as ligand-modified filter materials useful for carrying out such methods. The filters and methods of this disclosure are particularly effective for removal of metals from liquid compositions comprising amines. Such liquid compositions with significantly reduced amounts of metals can be used in a microelectronic manufacturing process, such as liquids for removing photoresist or liquids used in etching. The ligand-modified filters, such as ligand-modified porous membranes, can be configured for use in a microelectronic manufacturing system, which can be utilized in the system as a point of use metal-removal feature for liquids entering the system.

First claim

What is claimed is:

1. A membrane comprising:
a polymer having appended thereto a ligand, the ligand comprising a moiety represented by the structure:

wherein Q is chosen from —CH 2 —, —N(R)—, or CH(N)—, and wherein each R is independently chosen from hydrogen and a C 1 -C 20 hydrocarbyl group, wherein the moiety is directly attached to the polymer backbone, and wherein indicates either a point of attachment of the moiety to the polymer backbone or to another group of atoms which form the remainder of the ligand.

2. The membrane of claim 1 , wherein the moiety comprises a guanidine moiety.

3. The membrane of claim 1 , wherein the moiety comprises an amidine moiety.

4. The membrane of claim 1 , wherein Q is —N(R)—, and wherein each R is independently chosen from hydrogen, C 1 -C 4 alkyl, cyclohexyl, and phenyl.

5. The membrane of claim 1 , wherein Q is —CH 2 .

6. The membrane of claim 1 , wherein the ligand comprises polyguanidines.

7. The membrane of claim 1 , wherein the membrane comprises a porous polymeric filter membrane comprising a polymeric material chosen from a polyamide, a polyimide, a polysulfone, a polyether-sulfone, a polyolefin, a halogenated polymer, or a combination thereof.

8. The membrane of claim 7 , wherein the polymeric material is chosen from ultra high molecular weight polyethylene and poly(tetrafluoroethylene).

9. The membrane of claim 1 , wherein the filter is capable of reducing the amount of Fe in an aqueous amine by at least 50%.

10. The membrane of claim 1 , wherein the filter is capable of reducing the amount of Fe in an amine by at least 90%.

11. The membrane of claim 1 , wherein the filter is capable of reducing the amount of metals chosen from Na, K, Mg, Mn, Cr, Al, Ni, Zn, Ba, and Pb present in an aqueous amine by at least 50%.

12. A method for removing an impurity from a liquid, wherein said liquid comprises at least one amine, which comprises contacting the liquid with the membrane of claim 1 .

13. A filter comprising the filter membrane of claim 1 .

Assignees

• Entegris Inc

Inventors

• Hamzik James
• Brewster Justin
• Sampath Siddarth
• Jaber Jad Ali
• Mir Aabid A

Classifications

• C08J2300/00

  Characterised by the use of unspecified polymers · CPC title

• B01D61/00

  Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor (separation of gases or vapours by diffusion B01D53/22) · CPC title

• B01D71/82 Primary

  characterised by the presence of specified groups, e.g. introduced by chemical after-treatment · CPC title

• C02F2101/38

  containing nitrogen · CPC title

• C02F1/683

  by addition of complex-forming compounds · CPC title