Substrate processing method and substrate processing system
US-10403525-B2 · Sep 3, 2019 · US
US12057795B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12057795-B2 |
| Application number | US-202318535778-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 11, 2023 |
| Priority date | Aug 2, 2018 |
| Publication date | Aug 6, 2024 |
| Grant date | Aug 6, 2024 |
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A linear transport system comprises a first carriage and a second carriage, a linear motor for driving the first carriage and the second carriage and a guide rail. The linear motor comprises a stator and a first and a second rotor. The stator has a plurality of drive coils that are arranged along the guide rail individual motor modules comprise a plurality of drive coils. The first rotor is arranged on the first carriage and the second rotor is arranged on the second carriage. The first carriage has a first magnetic field generator. The second carriage has a second magnetic field generator. The first magnetic field generator differs from the second magnetic field generator at least in terms of its magnetic vector field, wherein the magnetic fields of the magnetic field generators are detected to identify the corresponding carriage.
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The invention claimed is: 1. A method for identifying a carriage of a linear transport system, wherein the linear transport system has a first carriage, a second carriage, a guide rail and a linear motor for driving the first and the second carriage along the guide rail, wherein the linear motor comprises a stator formed by motor modules having a plurality of drive coils and comprises a first and a second rotor, wherein the first rotor is arranged on the first carriage and the second rotor is arranged on the second carriage, wherein the first carriage has a first magnetic field generator that is configured to generate a first magnetic field, and the second carriage has a second magnetic field generator that is configured to generate a second magnetic field, wherein the first magnetic field generator comprises at least one magnet and the second magnetic field generator comprises a magnet, and wherein the first magnetic field generator differs from the second magnetic field generator at least in terms of its magnetic vector field, in which the pole orientation of the magnet of the first magnetic field generator of the first carriage is exactly opposite the pole orientation of the magnet of the second magnetic field generator of the second carriage, such that, when the magnetic field generators are considered in the case of first carriage and second carriage placed on the guide rail, the south pole of the magnet of one magnetic field generator and the north pole of the magnet of the other magnetic field generator are oriented facing the motor modules, the method comprising detecting the magnetic fields of the magnetic field generators to identify the corresponding carriage. 2. The method as claimed in claim 1 , wherein the magnetic field generators are used for position detection of the respective carriage by a position detection system provided in the linear transport system, wherein the first magnetic field generator and the second magnetic field generator are distinguished from each other in addition to the position using the position detection system, such that identification of the respective carriage is also made possible thereby. 3. The method as claimed in claim 2 , wherein the position detection system comprises a plurality of Hall sensors arranged along the guide rail. 4. The linear transport system as claimed in claim 1 , further comprising a plurality of Hall sensors, wherein the plurality of Hall sensors is arranged along the guide rail and detects the magnetic fields of the magnetic field generators to identify the corresponding carriage. 5. The linear transport system as claimed in claim 1 , wherein the currently measured magnetic field is compared with a pre-stored reference value such that, based on this comparison, the carriage associated with the corresponding magnetic field is configured to be identified either as the first carriage or as the second carriage. 6. A linear transport system, comprising: a first carriage and a second carriage, a guide rail, and a linear motor for driving the first carriage and the second carriage along the guide rail, wherein the linear motor comprises a stator, a first rotor and a second rotor, wherein the stator is formed by motor modules having a plurality of drive coils that are arranged along the guide rail, wherein the first rotor is arranged on the first carriage and the second rotor is arranged on the second carriage, wherein the first carriage has a first magnetic field generator, wherein the second carriage has a second magnetic field generator, wherein the first magnetic field generator has at least one magnet oriented along the guide rail and is configured to generate the first magnetic field, and the second carriage has a second magnetic field generator that has at least one magnet oriented along the guide rail and is configured to generate the second magnetic field, wherein the first magnetic field generator differs from the second magnetic field generator at least in terms of its magnetic vector field, in which the pole orientation of the magnets of the first magnetic field generator of the first carriage is exactly opposite the pole orientation of the magnets of the second magnetic field generator of the second carriage with regard to the orientation toward the motor modules, such that, when the magnetic field generators are considered in the case of first and second carriages placed on the guide rail, the south pole of the magnet of one magnetic field generator and the north pole of the magnet of the other magnetic field generator are oriented facing the motor modules, and wherein the magnetic fields of the magnetic field generators are detected to identify the corresponding carriage. 7. The linear transport system as claimed in claim 6 , further comprising a plurality of Hall sensors, wherein the plurality of Hall sensors is arranged along the guide rail and is constructed to detect the magnetic fields of the magnetic field generators to identify the corresponding carriage. 8. The linear transport system as claimed in claim 6 , wherein the currently measured magnetic field is compared with a pre-stored reference value such that, based on this comparison, the carriage associated with the corresponding magnetic field is configured to be identified either as the first carriage or as the second carriage. 9. The linear transport system as claimed in claim 6 , comprising a position detection system configured for detecting the position of the carriages along the guide rail, wherein the position detection system is configured to identify the carriages based on the magnetic fields of the magnetic field generators. 10. The linear transport system as claimed in claim 6 , wherein a first transmitter tab is arranged on the first carriage, the first transmitter tab interacting with a position detection system of the linear transport system in order to ascertain a position of the first carriage, and wherein a second transmitter tab is arranged on the second carriage, the second transmitter tab interacting with a position detection system of the linear transport system in order to ascertain a position of the second carriage. 11. The linear transport system as claimed in claim 6 , wherein the at least one magnet of first magnetic field generator and the at least one magnet of the second magnetic field generator are additional magnets that are arranged on the respective carriage in addition to drive magnets, which form the rotors of the respective carriages. 12. The linear transport system as claimed in claim 11 , wherein the at least one magnet of the first magnetic field generator and the at least one magnet of the second magnetic field generator as additional magnets are also used for position detection of the respective carriage. 13. The linear transport system as claimed in claim 6 , wherein the carriages comprise rollers and the guide rail comprises running surfaces on which the rollers are able to roll. 14. A linear transport system, comprising: a first carriage and a second carriage, a guide rail, and a linear motor for driving the first carriage and the second carriage along the guide rail, wherein the linear motor comprises a stator, a first rotor and a second rotor, wherein the stator is formed by motor modules having a plurality of drive coils that are arranged along the guide rail, wherein the first rotor is arranged on the first carriage and the second rotor is arranged on the second carriage, wherein the first carriage has a first magnetic field generator, wherein the second carriage has a second magnetic field generator, wherein the firs
of the permanent magnet type · CPC title
electrostatic, electric, or magnetic · CPC title
Magnetic effect devices, e.g. Hall-effect or magneto-resistive elements · CPC title
Machines with one stator and two {or more} rotors · CPC title
of the synchronous type · CPC title
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