Apparatus and method for capturing an object surface by electromagnetic radiation

Patent metadata

Field	Value
Publication number	US-12055384-B2
Application number	US-201916514956-A
Country	US
Kind code	B2
Filing date	Jul 17, 2019
Priority date	Jul 17, 2018
Publication date	Aug 6, 2024
Grant date	Aug 6, 2024

Abstract

An apparatus and method for capturing an object surface by electromagnetic radiation are provided. The apparatus includes a radiation generation device having a beam source and being configured to radiate a first and a second electromagnetic radiation having a first and second wavelength, respectively, onto a measurement point or a region of the object surface without emitting radiation onto the measurement point or onto the region, or without emitting radiation utilized for surface capturing, in a wavelength range between the first and the second wavelengths, a capturing device to capture for the measurement point a first and a second measurement value, the first measurement value being based on reflected radiation having the first wavelength and the second measurement value being based on reflected radiation having the second wavelength, and each of the first and second measurement values representing a distance between the capturing device and the object surface.

First claim

What is claimed is:

1. An apparatus for capturing an object surface, the apparatus comprising:
a radiation generation device having at least one beam source, and being configured to:
radiate a first electromagnetic radiation having a first wavelength and a second electromagnetic radiation having a second wavelength onto at least one measurement point of the object surface to be measured or onto a region of the object surface to be measured, the region including the at least one measurement point, wherein the first electromagnetic radiation and the second electromagnetic radiation are radiated (1) without emitting radiation in a wavelength range between the first wavelength and the second wavelength onto the at least one measurement point of the object surface or onto the region of the object surface, or (2) without emitting the radiation utilized for surface capturing in the wavelength range between the first wavelength and the second wavelength onto the at least one measurement point of the object surface or onto the region of the object surface;
a capturing device configured to capture for the at least one measurement point at least one first measurement value and at least one second measurement value, the at least one first measurement value being based on the radiation having the first wavelength and being reflected by the object surface and the at least one second measurement value being based on the radiation having the second wavelength and being reflected by the object surface; and
each of the at least one first measurement value and the at least one second measurement value being a distance value representing a distance between the capturing device and the object surface,
wherein the capturing device includes an optical separating element configured to divide the reflected radiation reflected by the object surface into a first radiation component and a second radiation component,
wherein the first radiation component and the second radiation portion impinge on different sites of incidence on a photosensitive unit of the capturing device or on different photosensitive units of the capturing device after being divided by the optical separating element, and
wherein the first and second radiation components have different wavelengths which are identical to the originally emitted first and second wavelengths, respectively.

2. The apparatus as claimed in claim 1 , wherein the radiation generation device is configured to radiate the first electromagnetic radiation having the first wavelength and the second electromagnetic radiation having the second wavelength at least temporarily simultaneously onto the object surface.

3. The apparatus as claimed in claim 1 , wherein the apparatus is configured to radiate the first electromagnetic radiation having the first wavelength and the second electromagnetic radiation having the second wavelength onto the object surface with intensities that deviate from one another.

4. The apparatus as claimed in claim 1 , further comprising:
a radiation attenuator configured to for attenuate at least one of the first electromagnetic radiation having the first wavelength and the second electromagnetic radiation having the second wavelength before the first and second electromagnetic radiations are captured by the capturing device, and/or
wherein the capturing device has a first sensitivity for the first electromagnetic radiation having the first wavelength and a second sensitivity for the second electromagnetic radiation having the second wavelength, and the first sensitivity is different from the second sensitivity.

5. The apparatus as claimed in claim 1 , wherein the radiation generation device is configured to radiate the first electromagnetic radiation having the first wavelength and the second electromagnetic radiation having the second wavelength onto the object surface at an angle with respect to one another.

6. The apparatus as claimed in claim 1 , wherein the radiation generation device is configured to radiate the first electromagnetic radiation having the first wavelength and the second electromagnetic radiation having the second wavelength onto the object surface substantially along or parallel with respect to a common radiation axis.

7. The apparatus as claimed in claim 1 , further comprising:
an information determining device configured to determine object information based on the at least one first measurement value and the at least one second measurement value, wherein for the at least one measurement point, or for each of the at least one measurement point, at least one of the at least one first measurement value and the at least one second measurement value is taken into account.

8. The apparatus as claimed in claim 7 , wherein the information determining device is configured to take into account only one of the at least one first measurement value or the at least one second measurement value for the at least one measurement point and/or to determine a total measurement value based on the at least one first measurement value and the at least one second measurement value for the at least one measurement point.

9. The apparatus as claimed in claim 1 , wherein the radiation generation device includes a first beam source configured to generate the first electromagnetic radiation and a second beam source configured to generate the second electromagnetic radiation, and
wherein each of the first and second beam sources is configured as a laser source.

10. The apparatus as claimed in claim 1 , wherein the wavelength range in which the radiation is not radiated and which lies between the first and second wavelengths is at least 50 nm.

11. The apparatus as claimed in claim 1 , wherein the wavelength range in which the radiation is not radiated and which lies between the first and second wavelengths is at least 100 nm.

12. The apparatus as claimed in claim 1 , wherein the wavelength range in which the radiation is not radiated and which lies between the first and second wavelengths is at least 200 nm.

13. The apparatus as claimed in claim 1 , further comprising:
a radiation attenuator configured to for attenuate at least one of the first electromagnetic radiation having the first wavelength and the second electromagnetic radiation having the second wavelength before the first and second electromagnetic radiations are captured by the capturing device, and
wherein the radiation attenuator is an optical filter.

14. The apparatus as claimed in claim 1 , wherein the optical separating element is a lens of the capturing device.

15. The apparatus as claimed in claim 1 , further comprising:
an information determining device configured to determine object information based on the at least one first measurement value and the at least one second measurement value, wherein for the at least one measurement point, or for each of the at least one measurement point, the at least one first measurement value and the at least one second measurement value is taken into account, and
wherein the object information is information relating to three-dimensional characteristics of the object surface.

16. The apparatus as claimed in claim 1 , further comprising:
an information determining device configured to determine object information based on the at least one first measurement value and the at least one second measurement value, wherein for the at least one measurement point, or for each of the at least one measurement point, the at least one first measurement value and the at least one second measurement value is taken into account,
wherein the object information is informat

Assignees

• Zeiss Carl Industrielle Messtechnik Gmbh

Inventors

• Betsche Andreas
• Beckmann Dirk

Classifications

• G01B11/22

  for measuring depth · CPC title

• G01S7/4817

  relating to scanning · CPC title

• G01S17/89

  for mapping or imaging · CPC title

• G01B11/14

  for measuring distance or clearance between spaced objects or spaced apertures (G01B11/26 takes precedence; rangefinders G01C3/00) · CPC title

• G01S17/48

  Active triangulation systems, i.e. using the transmission and reflection of electromagnetic waves other than radio waves · CPC title