Method for the fabrication of a pore comprising metallic membrane and a pore comprising membrane

Patent metadata

Field	Value
Publication number	US-12048901-B2
Application number	US-201917294748-A
Country	US
Kind code	B2
Filing date	Nov 14, 2019
Priority date	Nov 19, 2018
Publication date	Jul 30, 2024
Grant date	Jul 30, 2024

Abstract

The invention relates to a method for a fabrication of a pore comprising membrane and a pore comprising membrane. The pore comprising membrane ( 1 ) comprises at least a porous metallic layer ( 3 ) on a porous substrate ( 6 ), wherein the porous metallic layer ( 3 ) is connected to the porous substrate ( 6 ) and the pores ( 4 ) of the metallic layer ( 3 ) overlap at least partially with the pores ( 7 ) of the porous substrate ( 6 ). The method comprises at least the following steps: i) deposition of the metallic layer ( 3 ) onto a support material ( 2 ), wherein the deposited metallic layer ( 3 ) forms a plurality of feedthroughs, in particular a percolation network on the support material ( 2 ), ii) removal of the support material ( 2 ), iii) connecting of the metallic layer ( 3 ) with the porous substrate ( 6 ) such that pores ( 4 ) of the metallic layer ( 3 ) overlap at least partially with the pores ( 7 ) of the porous substrate ( 6 ).

First claim

The invention claimed is:

1. Method for a fabrication of a pore comprising membrane ( 1 ),
comprising at least a porous metallic layer ( 3 ) on a porous substrate ( 6 ), wherein
the porous metallic layer ( 3 ) is connected to the porous substrate ( 6 ) and
the pores ( 4 ) of the metallic layer ( 3 ) overlap at least partially with the pores ( 7 ) of the porous substrate ( 6 ),

wherein the method comprises at least the following steps:
i) deposition of the metallic layer ( 3 ) onto a support material ( 2 ),
wherein the deposited metallic layer ( 3 ) forms a plurality of feedthroughs,

ii) removal of the support material ( 2 ),
iii) connecting of the metallic layer ( 3 ) with the porous substrate ( 6 ) such that pores ( 4 ) of the metallic layer ( 3 ) overlap at least partially with the pores ( 7 ) of the porous substrate ( 6 ).

2. Method for a fabrication of a pore comprising membrane ( 1 ) as claimed in claim 1 , wherein the method further comprises the steps of:
i) prior to removal of the support material ( 2 ), covering the metallic layer ( 3 ) with a protection material ( 5 ), in that a multilayer composition forms with the metallic layer ( 3 ) confined between the support material ( 2 ) and the protection material ( 5 ),
ii) removal of the support material ( 2 ), resulting in the metallic layer ( 3 ) being deposited on the protection material ( 5 ),
iii) removal of the protection material ( 5 ).

3. Method for a fabrication of a pore comprising membrane ( 1 ) as claimed in claim 1 , wherein the method further comprises the step of:
prior to removal of the support material ( 2 ), covering the metallic layer ( 3 ) by the porous substrate ( 6 ), resulting in a composite of these layers.

4. Method for a fabrication of a pore comprising membrane ( 1 ) according to claim 2 , further comprising
deposition of the metallic layer ( 3 ) on the porous substrate ( 6 ), comprising at least the steps of
i) covering the metallic layer ( 3 ) deposited on the protection material ( 5 ) with the porous substrate ( 6 ), in that a multilayer composition forms with the metallic layer ( 3 ) confined between the protection material ( 5 ) and the porous substrate ( 6 ),
ii) removal of the protection material ( 5 ) yielding the metallic layer ( 3 ) deposited on the porous substrate ( 6 ).

5. Method for a fabrication of a pore comprising membrane ( 1 ) according to claim 2 , characterized in that during the removal of the support material ( 2 ) conditions are applied such that the metallic layer ( 3 ) as well as the protection material ( 5 ) are at least temporally inert.

6. Method for a fabrication of a pore comprising membrane ( 1 ) according to claim 3 , characterized in that during the removal of the support material ( 2 ) conditions are applied such that the metallic layer ( 3 ) as well as the porous substrate ( 6 ) are at least temporally inert.

7. Method for a fabrication of a pore comprising membrane according to claim 4 , characterized in that during the removal of the protection material ( 5 ) conditions are applied such that the metallic layer ( 3 ) as well as the porous substrate ( 6 ) are at least temporally inert.

8. Method for a fabrication of a pore comprising membrane according to claim 1 , wherein the metallic material of the metallic layer ( 3 ) is gold, platinum, silver, tungsten, copper, tantalum, molybdenum, palladium, iron, titanium, rhodium or osmium and any alloy thereof.

9. Method for a fabrication of a pore comprising membrane ( 1 ) according to claim 1 , wherein the support material ( 2 ) has a surface energy that differs from the surface energy of the metallic layer, such that a dewetting between the support material ( 2 ) and the material of the metallic layer ( 3 ) occurs.

10. Method for a fabrication of a pore comprising membrane ( 1 ) according to claim 2 , wherein the protection material ( 5 ) is a polymer or a photoresist.

11. Method for a fabrication of a pore comprising membrane ( 1 ) according to claim 1 , wherein the material of the porous substrate ( 6 ) is ceramic, polymer, oxide or metal or a mixture thereof.

12. Method for a fabrication of a pore comprising membrane ( 1 ) according to claim 1 , wherein the metallic layer ( 3 ) is deposited in such a way on the surface of the support material ( 2 ) that the surface of the support material ( 2 ) is partially wetted by the metallic layer ( 3 ), forming non-wetted spaces between metallic layer ( 3 ) accumulations realizing the plurality of feedthroughs.

13. Method for a fabrication of a pore comprising membrane ( 1 ) according to claim 1 , wherein the material of the metallic layer ( 3 ) is deposited onto the support material ( 2 ) by means of electron beam evaporation, sputtering, or atomic layer deposition.

14. A pore comprising membrane ( 1 ) manufactured by means of the method for a fabrication of a pore comprising membrane ( 1 ) as claimed in claim 1 , wherein the pore size of the metallic layer ( 3 ) is 1 nm to 1000 nm, and the pore size of the porous substrate ( 6 ) is 5 nm to 200 μm.

Assignees

• Eth Zuerich

Inventors

• Park Hyung Gyu
• Wyss Roman

Classifications

• B01D2325/02833

  more than 10 and up to 100 nm · CPC title

• B01D69/107

  Organic support material · CPC title

• B01D69/1216

  Three or more layers · CPC title

• Y02E60/50

  Fuel cells · CPC title

• Y02E60/10

  Energy storage using batteries · CPC title