High refractive index imprint compositions and materials and processes for making the same

Patent metadata

Field	Value
Publication number	US-12044963-B2
Application number	US-202016941304-A
Country	US
Kind code	B2
Filing date	Jul 28, 2020
Priority date	Jan 22, 2020
Publication date	Jul 23, 2024
Grant date	Jul 23, 2024

Abstract

Embodiments of the present disclosure generally relate to imprint compositions and materials and related processes useful for nanoimprint lithography (NIL). In one or more embodiments, an imprint composition contains one or more types of nanoparticles, one or more surface ligands, one or more solvents, one or more additives, and one or more acrylates.

First claim

What is claimed is:

1. An imprint composition, comprising:
nanoparticles, wherein each nanoparticle comprises a core and a shell, and wherein the core comprises metal oxide and the shell comprises silicon oxide;
one or more solvents;
a surface ligand, wherein the surface ligand comprises oleic acid, stearic acid, propionic acid, benzoic acid, palmitic acid, myristic acid, methylamine, oleylamine, butylamine, or any combination thereof, and wherein the surface ligand is at a concentration of about 6 weight percent (wt %) to about 50 wt %, based on the weight of the nanoparticles; and
an additive, wherein the additive comprises fluorosurfactant, fluorocarbon, glycolic acid ethoxylate oleyl ether, or any combination thereof, and wherein the additive is at a concentration of about 0.01 wt % to about 3 wt %, based on the weight of the nanoparticles; and
an acrylate;
wherein the imprint composition has a viscosity of 5 cP to about 50 cP, as measured at a temperature of 23° C.

2. The imprint composition of claim 1 , wherein the imprint composition comprises:
about 1 wt % to about 25 wt % of the nanoparticles;
about 60 wt % to about 85 wt % of the solvent;
about 6 wt % to about 35 wt % of the surface ligand;
about 0.05 wt % to about 3 wt % of the additive; and
about 0.3 wt % to about 8 wt % of the acrylate, based on the weight of the nanoparticles.

3. The imprint composition of claim 1 , wherein the nanoparticles comprise niobium oxide or a diamond material, and wherein the nanoparticle has a diameter of about 5 nm to about 200 nm.

4. The imprint composition of claim 1 , wherein the core comprises titanium oxide, niobium oxide, or zirconium oxide.

5. The imprint composition of claim 1 , wherein the core has a diameter of about 2 nm to about 500 nm and the shell has a thickness of about 0.1 nm to about 100 nm.

6. The imprint composition of claim 1 , wherein the surface ligand further comprises benzyl alcohol, oleyl alcohol, butanol, octanol, dodecanol, octyltrimethoxy silane, octyltriethoxy silane, octenyltrimethoxy silane, octenyltriethoxy silane, 3-(trimethoxysilyl)propyl methacrylate, propyltriethoxy silane, salts thereof, esters thereof, complexes thereof, or any combination thereof, and wherein the surface ligand is at a concentration of about 8 wt % to about 35 wt %, based on the weight of the nanoparticles.

7. The imprint composition of claim 1 , wherein the solvent comprises a nanoparticle dispersion solvent, and wherein the nanoparticle dispersion solvent comprises a glycol ether, an alcohol, an acetate, esters thereof, salts thereof, derivatives thereof, or any combination thereof.

8. The imprint composition of claim 7 , wherein the nanoparticle dispersion solvent comprises a p-series glycol ether, an e-series glycol ether, or a combination thereof, and wherein the imprint composition comprises the nanoparticle dispersion solvent at a concentration of about 0.5 wt % to about 20 wt %.

9. The imprint composition of claim 1 , wherein the solvent comprises an imprinting solvent, wherein the imprinting solvent comprises an alcohol, an ester, salts thereof, or combinations thereof, and wherein the imprint composition comprises the imprinting solvent at a concentration of about 60 wt % to about 95 wt %.

10. The imprint composition of claim 1 , wherein the additive further comprises a diol, an alcohol with three or more alcohol groups, or any combination thereof.

11. The imprint composition of claim 1 , wherein the additive further comprises a perfluoroalkyl ether, a polyglycol, a fatty acid, a silane, a siloxane, or any combination thereof.

12. The imprint composition of claim 1 , wherein the additive further comprises lauric acid, myristic acid, stearic acid, palmitic acid, dimethyldiethoxysilane, polydimethylsiloxane, polydiphenylsiloxane, hexamethylcyclotrisiloxane, octamethylcyclotetrasiloxane, silanol terminated polydimethylsiloxane, vinyl terminated polydimethylsiloxane, salts thereof, esters thereof, complexes thereof, or any combination thereof.

13. The imprint composition of claim 1 , wherein the additive is at a concentration of about 0.01 wt % to about 2.5 wt %, based on the weight of the nanoparticles.

14. The imprint composition of claim 1 , wherein the acrylate comprises a methacrylate, an ethylacrylate, a propylacrylate, a butylacrylate, a mono-functional acrylate, a di-functional acrylate, a tri-functional acrylate, or other multi-functional acrylates, or any combination thereof, and wherein the acrylate is at a concentration of about 0.05 wt % to about 10 wt %, based on the weight of the nanoparticles.

15. The imprint composition of claim 1 , wherein the imprint composition has a viscosity of 5 cP to about 40 cP, as measured at a temperature of 23° C., and a refractive index of about 1.7 to about 2.0.

16. An imprint composition, comprising:
about 0.5 wt % to about 40 wt % of nanoparticles, wherein each nanoparticle comprises a core and a shell, and wherein the core comprises metal oxide and the shell comprises silicon oxide;
about 50 wt % to about 90 wt % of a solvent;
about 5 wt % to about 40 wt % of a surface ligand, based on the weight of the nanoparticles, the surface ligand comprising oleic acid, stearic acid, propionic acid, benzoic acid, palmitic acid, myristic acid, methylamine, oleylamine, butylamine, or any combination thereof;
about 0.01 wt % to about 5 wt % of an additive, based on the weight of the nanoparticles, the additive comprising fluorosurfactant, fluorocarbon, glycolic acid ethoxylate oleyl ether, or any combination thereof; and
about 0.1 wt % to about 10 wt % of an acrylate, based on the weight of the nanoparticles;
wherein the imprint composition has a viscosity of 5 cP to about 50 cP, as measured at a temperature of 23° C.

17. The imprint composition of claim 16 , wherein the viscosity is about 10 cP to about 40 cP, as measured at a temperature of 23° C., and wherein the imprint composition has a refractive index of about 1.7 to about 2.0.

18. An imprint composition, comprising:
nanoparticles, wherein each nanoparticle comprises a core and a shell, and wherein the core comprises metal oxide and the shell comprises silicon oxide;
one or more solvents;
a surface ligand, wherein the surface ligand comprises benzyl alcohol, oleyl alcohol, butanol, octanol, dodecanol, octyltrimethoxy silane, octyltriethoxy silane, octenyltrimethoxy silane, octenyltriethoxy silane, 3-(trimethoxysilyl)propyl methacrylate, propyltriethoxy silane, salts thereof, esters thereof, complexes thereof, or any combination thereof, and wherein the surface ligand is at a concentration of about 6 wt % to about 50 wt %, based on the weight of the nanoparticles;
an additive, wherein the additive comprises one or more of fluorosurfactant, fluorocarbon, glycolic acid ethoxylate oleyl ether, or any combination thereof; and
an acrylate;
wherein the imprint composition has a viscosity of 5 cP to about 50 cP.

19. The imprint composition of claim 18 , wherein the imprint composition comprises:
about 1 wt % to about 25 wt % of the nanoparticles;
about 60 wt % to about 85 wt % of the solvent;
about 6 wt % to about 35 wt % of the surface ligand;
about 0.05 wt % to about 3 wt % of the additive, based on the weight of the nanoparticles; and
about 0.3 wt % to about 8 wt % of the acrylate, based on the weight of the nanoparticles.

20. The imprint composition of claim 18 , wherein the viscosity is about 10 cP to about 40 cP, as measured at a temperature of 23° C., and wherein the imprint composition has

Assignees

• Applied Materials Inc

Inventors

• Joshi Amita
• Mcmackin Ian Matthew
• Hourani Rami
• Luo Yingdong
• Ganapathiappan Sivapackia
• Godet Ludovic

Classifications

• B29C59/005

  characterised by the choice of material · CPC title

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• B82Y10/00

  Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic · CPC title

• B29C71/02

  Thermal after-treatment {(B29C71/0063 and B29C71/0072 take precedence)} · CPC title

• B29C71/04

  by wave energy or particle radiation {, e.g. for curing or vulcanising preformed articles (during moulding, e.g. in a mould B29C35/08)} · CPC title