Multilayer integrated photonic structure

Patent metadata

Field	Value
Publication number	US-12044882-B2
Application number	US-202218068066-A
Country	US
Kind code	B2
Filing date	Dec 19, 2022
Priority date	Dec 20, 2021
Publication date	Jul 23, 2024
Grant date	Jul 23, 2024

Abstract

Example embodiments relate to multilayer integrated photonic structures. An example multilayer integrated photonic structure includes a propagation region formed in a first photonic layer. The propagation region includes a plurality of waveguides and a slab region in which the plurality of waveguides terminates. The multilayer integrated photonic structure also includes an outcoupling structure formed in a second photonic layer on top of the first photonic layer. The outcoupling structure is configured to couple light into and out of the multilayer integrated photonic structure. Additionally, the multilayer integrated photonic structure includes a reflector configured to optically couple the slab region of the first photonic layer and the second photonic layer. The reflector includes a first reflector element included in the slab region of the first photonic layer and a second reflector element included in the second photonic layer. The first and second reflector element are in optical communication with each other.

First claim

What is claimed is:

1. A multilayer integrated photonic structure for optical beamforming, wherein the multilayer integrated photonic structure comprises:
a propagation region formed in a first photonic layer, wherein the propagation region comprises a plurality of waveguides and a slab region in which the plurality of waveguides terminates;
an outcoupling structure formed in a second photonic layer on top of the first photonic layer, wherein the outcoupling structure is configured to couple light into and out of the multilayer integrated photonic structure; and
a reflector configured to optically couple the slab region of the first photonic layer and the second photonic layer,
wherein the reflector comprises:
a first reflector element comprised in the slab region of the first photonic layer; and
a second reflector element comprised in the second photonic layer, and

wherein the first reflector element and the second reflector element are in optical communication with each other.

2. The multilayer integrated photonic structure according to claim 1 , wherein the first photonic layer and the second photonic layer are connected to each other at the reflector, and wherein the reflector extends continuously at a junction between the first photonic layer and the second photonic layer.

3. The multilayer integrated photonic structure according to claim 1 , wherein the multilayer integrated photonic structure further comprises:
one or more intermediate photonic layers formed between the first photonic layer and the second photonic layer;
a first intermediate reflector element comprised in a first intermediate photonic layer and in optical communication with the first reflector element, wherein the first intermediate reflector element is configured to optically couple the first intermediate photonic layer with the slab region of the first photonic layer;
a second intermediate reflector element comprised in a second intermediate photonic layer and in optical communication with the second reflector element, wherein the second intermediate reflector element is configured to optically couple the second intermediate photonic layer with the second photonic layer; and
one or more intermediate reflectors configured to optically couple two of the intermediate photonic layers with each other.

4. The multilayer integrated photonic structure according to claim 3 , wherein the intermediate photonic layers comprise different slab effective indexes.

5. The multilayer integrated photonic structure according to claim 4 , wherein the intermediate photonic layers comprise different materials with different dispersion.

6. The multilayer integrated photonic structure according to claim 4 , wherein the intermediate photonic layers comprise sub-wavelength patterns with varying fill factor.

7. The multilayer integrated photonic structure according to claim 6 ,
wherein the first photonic layer and the first intermediate photonic layer are connected by the first reflector element and the first intermediate reflector element, and
wherein the second intermediate photonic layer and the second photonic layer are connected by the second reflector element and the second intermediate reflector element.

8. The multilayer integrated photonic structure according to claim 7 ,
wherein the first reflector element and the first intermediate reflector element extend continuously at a junction between the first photonic layer and the first intermediate photonic layer, and
wherein the second reflector element and the second intermediate reflector element extend continuously at a junction between the second intermediate photonic layer and the second photonic layer.

9. The multilayer integrated photonic structure according to claim 8 ,
wherein each intermediate reflector comprises two intermediate reflector elements,
wherein each intermediate photonic layer comprises two intermediate reflector elements,
wherein one of the intermediate reflector element is formed in the intermediate photonic layer and is configured to optically couple the intermediate photonic layer with an intermediate photonic layer formed on top of the intermediate photonic layer along a direction extending from the first photonic layer to the second photonic layer, and
wherein the other intermediate reflector element is formed in the intermediate photonic layer and is configured to optically couple the intermediate photonic layer with an intermediate photonic layer formed below the intermediate photonic layer along the direction extending from the first photonic layer to the second photonic layer.

10. The multilayer integrated photonic structure according to claim 9 , wherein the intermediate photonic layers are connected to each other via two of the intermediate reflector elements.

11. The multilayer integrated photonic structure according to claim 3 , wherein the reflector or one or more of the intermediate reflectors are curved reflectors.

12. The multilayer integrated photonic structure according to claim 1 , wherein the outcoupling structure is an optical fiber grating coupler.

13. The multilayer integrated photonic structure according to claim 1 , wherein the propagation region comprises:
one or more input ports configured to allow light to be coupled to or from the multilayer integrated photonic structure;
a plurality of output ports configured to optically couple the propagation region and the slab region;
a power divider section; and
a splitter tree network.

14. The multilayer integrated photonic structure according to claim 1 , wherein the slab region comprises a slab waveguide.

15. A method for manufacturing a multilayer integrated photonic structure for optical beamforming, wherein the method comprises:
forming a propagation region in a first photonic layer, wherein the propagation region comprises a plurality of waveguides and a slab region in which the plurality of waveguides terminates;
forming an outcoupling structure in a second photonic layer on top of the first photonic layer, wherein the outcoupling structure is configured to couple light into and out of the multilayer integrated photonic structure; and
forming a reflector configured to optically couple the slab region of the first photonic layer and the second photonic layer,
wherein the reflector comprises:
a first reflector element comprised in the slab region of the first photonic layer; and
a second reflector element comprised in the second photonic layer, and

wherein the first reflector element and the second reflector element are in optical communication with each other.

16. The method according to claim 15 , further comprising:
forming one or more intermediate photonic layers between the first photonic layer and the second photonic layer;
forming a first intermediate reflector element comprised in a first intermediate photonic layer and in optical communication with the first reflector element, wherein the first intermediate reflector element is configured to optically couple the first intermediate photonic layer with the slab region of the first photonic layer;
forming a second intermediate reflector element comprised in a second intermediate photonic layer and in optical communication with the second reflector element, wherein the second intermediate reflector element is configured to optically couple the second intermediate photonic layer with the second photonic layer; and
forming one or more intermediate reflectors configured to optically couple two of the intermediate photonic layers with each other.

17. The method according to cla

Assignees

• Imec Vzw

Inventors

• Figeys Bruno

Classifications

• G02B2006/12104

  Mirror; Reflectors or the like · CPC title

• G02B6/3608

  Fibre wiring boards, i.e. where fibres are embedded or attached in a pattern on or to a substrate, e.g. flexible sheets (optical ribbon cables in support members G02B6/4401) · CPC title

• G02B2006/12154

  Power divider · CPC title

• G02B2006/1215

  Splitter · CPC title

• G02B6/136

  by etching · CPC title