Light receiving device and light receiving apparatus

Patent metadata

Field	Value
Publication number	US-12044569-B2
Application number	US-202318124952-A
Country	US
Kind code	B2
Filing date	Mar 22, 2023
Priority date	May 30, 2022
Publication date	Jul 23, 2024
Grant date	Jul 23, 2024

Abstract

A light receiving device includes a semiconductor substrate having a first major surface and a second major surface opposite to the first major surface, and a metal pattern layer provided on the second major surface. The first major surface is provided with a first input port configured to receive an input of signal light, a second input port configured to receive an input of local oscillation light, a first light receiving element optically coupled to the first input port, an optical 90 degree hybrid element optically coupled to the first input port and the second input port, and a second light receiving element optically coupled to the optical 90 degree hybrid element. The metal pattern layer contains at least one of titanium or chromium.

First claim

What is claimed is:

1. A light receiving device comprising:
a semiconductor substrate having a first major surface and a second major surface opposite to the first major surface; and
a metal pattern layer provided directly on the second major surface,
wherein the first major surface is provided with a first input port configured to receive an input of signal light, a second input port configured to receive an input of local oscillation light, a first light receiving element optically coupled to the first input port, an optical 90 degree hybrid element optically coupled to the first input port and the second input port, and a second light receiving element optically coupled to the optical 90 degree hybrid element, and
wherein the metal pattern layer contains at least one of titanium or chromium.

2. The light receiving device according to claim 1 , wherein the metal pattern layer includes a portion between the first light receiving element and the second input port as seen from a direction normal to the first major surface.

3. The light receiving device according to claim 2 , the portion overlaps a line segment connecting the first light receiving element and the second input port as seen from the direction.

4. The light receiving device according to claim 1 , wherein the metal pattern layer includes a first layer and a second layer,
wherein the first layer is disposed between the second layer and the semiconductor substrate,
wherein the first layer contains at least one of titanium or chromium, and
wherein the second layer contains gold.

5. The light receiving device according to claim 1 , wherein the metal pattern layer is situated so as not to overlap the optical 90 degree hybrid element as seen from a direction normal to the first major surface.

6. The light receiving device according to claim 1 , wherein the second major surface has an uneven region.

7. The light receiving device according to claim 6 , wherein the metal pattern layer includes a portion on the uneven region.

8. The light receiving device according to claim 1 , wherein the first major surface is provided with a variable optical attenuator optically coupled to the first input port and the optical 90 degree hybrid element.

9. The light receiving device according to claim 8 , wherein the metal pattern layer is situated to overlap the variable optical attenuator as seen from a direction normal to the first major surface.

10. The light receiving device according to claim 1 , wherein the first major surface is provided with at least one optical demultiplexer optically coupled to the first input port and the optical 90 degree hybrid element.

11. The light receiving device according to claim 10 , wherein the metal pattern layer is situated to overlap the at least one optical demultiplexer as seen from a direction normal to the first major surface.

12. The light receiving device according to claim 11 , wherein the at least one optical demultiplexer comprises a first optical demultiplexer and a second optical demultiplexer, wherein the first optical demultiplexer is disposed between the first input port and the second optical demultiplexer, wherein the first optical demultiplexer is optically coupled to the first light receiving element.

13. The light receiving device according to claim 12 , wherein the first major surface is provided with a variable optical attenuator optically coupled to the first input port and the optical 90 degree hybrid element, wherein the second optical demultiplexer is optically coupled to the variable optical attenuator.

14. A light receiving apparatus comprising:
the light receiving device according to claim 1 ; and
a carrier including a support substrate having a third major surface disposed so as to oppose the second major surface, and a solder pattern layer provided on the third major surface and joined to the metal pattern layer.

15. The light receiving device according to claim 1 , wherein the first input port, the second input port, the first light receiving element, the second light receiving element and the optical 90 degree hybrid element are monolithically integrated on the first major surface.

16. The light receiving device according to claim 1 , wherein the first light receiving element is not optically coupled to the optical 90 degree hybrid element.

17. The light receiving device according to claim 1 , wherein the first light receiving element is optically coupled to the first input port via an optical waveguide and a variable optical attenuator.

18. The light receiving device according to claim 1 , wherein
the semiconductor substrate is a III-V compound semiconductor substrate, and
the first light receiving element comprises a III-V compound semiconductor layer.

Assignees

• Sumitomo Electric Industries

Inventors

• Okimoto Takuya
• Yagi Hideki
• Mitarai Takuya

Classifications

• G01J2001/446

  Photodiode · CPC title

• G02B6/4204

  the coupling comprising intermediate optical elements, e.g. lenses, holograms (encapsulated active devices H01S5/02208) · CPC title

• G02B6/4215

  the intermediate optical elements being wavelength selective optical elements, e.g. variable wavelength optical modules or wavelength lockers (G02B6/4246 takes precedence) · CPC title

• H04B10/61

  Coherent receivers · CPC title

• G01J2003/123

  Indexed discrete filters · CPC title