Surface acoustic wave electroacoustic device using gap grating for reduced transversal modes

Patent metadata

Field	Value
Publication number	US-12040775-B2
Application number	US-202117302221-A
Country	US
Kind code	B2
Filing date	Apr 27, 2021
Priority date	Apr 30, 2020
Publication date	Jul 16, 2024
Grant date	Jul 16, 2024

Abstract

Aspects of the disclosure relate to an electroacoustic device that includes a piezoelectric material and an electrode structure. The electrode structure includes a first busbar and a second busbar. The electrode structure further includes a first conductive structure connected to the first busbar and a second conductive structure connected to the second busbar. The first conductive structure and the second conductive structure is disposed between the first busbar and the second busbar. The first conductive structure and the second conductive structure each include a plurality of conductive segments separated from each other and extending towards one of the first busbar or the second busbar. The electrode structure further includes electrode fingers arranged in an interdigitated manner and each connected to either the first conductive structure or the second conductive structure. The electrode fingers have a pitch that is different than a pitch of the plurality of conductive segments.

First claim

What is claimed is:

1. An electroacoustic device, comprising:
a piezoelectric material; and
an electrode structure, comprising:
a first busbar and a second busbar;
a first conductive structure connected to the first busbar and a second conductive structure connected to the second busbar, the first conductive structure and the second conductive structure disposed between the first busbar and the second busbar, the first conductive structure and the second conductive structure each comprising a plurality of conductive segments separated from each other and extending towards one of the first busbar or the second busbar; and
electrode fingers arranged in an interdigitated manner and each connected to either the first conductive structure or the second conductive structure, the electrode fingers having a pitch that is different than a pitch of the plurality of conductive segments of the first conductive structure and the second conductive structure;
wherein a dimension of the first conductive structure in a direction in which the plurality of conductive segments extend is between 1.25 times and 4 times a wavelength for an operating frequency of the electroacoustic device.

2. The electroacoustic device of claim 1 , wherein the pitch of the plurality of conductive segments of the first conductive structure and the second conductive structure is smaller than the pitch of the electrode fingers.

3. The electroacoustic device of claim 1 , wherein the pitch of the plurality of conductive segments of the first conductive structure and the second conductive structure is within ten percent of the pitch of the electrode fingers.

4. The electroacoustic device of claim 1 , wherein the pitch of the plurality of conductive segments of the first conductive structure and the second conductive structure is greater than fifty percent of the pitch of the electrode fingers.

5. The electroacoustic device of claim 1 , wherein the electrode fingers have a central region with trap regions comprising a first trap region and a second trap region respectively located on boundaries of the central region, wherein a structural characteristic of the electroacoustic device is different in the first trap region and the second trap region relative to the central region.

6. The electroacoustic device of claim 5 , wherein the structural characteristic corresponds to a portion of each of the electrode fingers having at least one of an increased width or increased height within the first trap region and the second trap region relative to within the central region.

7. The electroacoustic device of claim 5 , wherein the structural characteristic corresponds to at least one of a dielectric material positioned over the trap regions, a mass loading within the trap regions, or a structural effect of a trimming operation.

8. The electroacoustic device of claim 5 , wherein an acoustic velocity in a region of the electroacoustic device defined by the first conductive structure and the second conductive structure is higher than in a region of the electroacoustic device defined by the first trap region, the second trap region, and the central region.

9. The electroacoustic device of claim 8 , wherein the acoustic velocity in the first trap region and the second trap region is lower than the acoustic velocity in the central region.

10. The electroacoustic device of claim 5 , wherein a dimension of the first trap region in the direction in which the electrode fingers extend is between one-half of the pitch of the electrode fingers and twice the pitch of the electrode fingers.

11. The electroacoustic device of claim 1 , wherein the electrode fingers have a central region with a first trap region and a second trap region respectively located on boundaries of the central region, wherein an acoustic velocity in a region of the electroacoustic device defined by the first trap region and the second trap region is lower than in a region of the electroacoustic device defined by the central region.

12. The electroacoustic device of claim 1 , wherein the plurality of conductive segments of the first conductive structure and the second conductive structure extend in a direction normal to a direction of the first busbar and the second busbar.

13. The electroacoustic device of claim 1 , wherein one or more of the plurality of conductive segments of the first conductive structure and the second conductive structure are connected to each other by conductive portions.

14. The electroacoustic device of claim 13 , wherein the conductive portions connecting one or more of the plurality of conductive segments of the first conductive structure and the second conductive structure is a conductive strip connected to at least a portion of the plurality of conductive segments on a side of the plurality of conductive segments distal to one of the respective first busbar or second busbar that the plurality of conductive segments of the first conductive structure and the second conductive structure are connected to.

15. The electroacoustic device of claim 1 , wherein the electrode fingers extend in a direction normal to a direction of the first busbar and the second busbar.

16. The electroacoustic device of claim 1 , wherein the piezoelectric material comprises lithium tantalate (LiTa03).

17. The electroacoustic device of claim 1 , further comprising:
a substrate;
a trap rich layer forming a portion of or being disposed on the substrate; and
a layer of dielectric material disposed on the substrate, the piezoelectric material disposed on the layer of dielectric material.

18. The electroacoustic device of claim 1 , further comprising:
a substrate; and
a compensation layer disposed on the substrate, the piezoelectric material disposed between the electrode structure and the compensation layer.

19. The electroacoustic device of claim 1 , wherein the electroacoustic device is at least a part of a SAW resonator that forms part of a filter circuit.

20. The electroacoustic device of claim 19 , wherein the filter circuit is part of a transceiver.

21. A method for forming an electroacoustic device, comprising:
forming a layer of a piezoelectric material; and
forming an electrode structure on or above the piezoelectric material, forming the electrode structure comprising:
forming a first busbar and a second busbar;
forming a first conductive structure connected to the first busbar and a second conductive structure connected to the second busbar, the first conductive structure and the second conductive structure disposed between the first busbar and the second busbar, the first conductive structure and the second conductive structure each formed from a plurality of conductive segments separated from each other and extending towards one of the first busbar or the second busbar; and
forming electrode fingers arranged in an interdigitated manner and each connected to either the first conductive structure or the second conductive structure, the electrode fingers formed to have a pitch that is different than a pitch of the plurality of conductive segments of the first conductive structure and the second conductive structure;
wherein a dimension of the first conductive structure in a direction in which the plurality of conductive segments extend is between 1.25 times and 4 times a wavelength for an operating frequency of the electroacoustic device.

22. The method of claim 21 , wherein the electrode fingers have a central region and a first trap region and a second t

Assignees

• Rf360 Singapore Pte Ltd

Inventors

• Ebner Thomas
• Geselbracht Philipp
• Mayer Markus
• Ammann Stefan
• Sabbagh Manuel

Classifications

• H03H9/02543

  Characteristics of substrate, e.g. cutting angles · CPC title

• H03H9/6406

  Filters characterised by a particular frequency characteristic · CPC title

• H03H3/08

  for the manufacture of resonators or networks using surface acoustic waves · CPC title

• H03H9/1457 Primary

  Transducers having different finger widths · CPC title

• H03H9/725

  Duplexers · CPC title