Solution-based deposition method for preparing semiconducting thin films via dispersed particle self-assembly at a liquid-liquid interface

Patent metadata

Field	Value
Publication number	US-12040185-B2
Application number	US-201917613324-A
Country	US
Kind code	B2
Filing date	May 22, 2019
Priority date	May 22, 2019
Publication date	Jul 16, 2024
Grant date	Jul 16, 2024

Abstract

A device for coating semiconductor/semiconductor precursor particles on a flexible substrate and a preparation method of a semiconducting thin film, wherein the device includes: a container for a first and second solvent substantially immiscible; injection means for injecting a predetermined dispersion volume of at least one layered semiconductor particle material or its precursor(s), occurring at a liquid-liquid interface formed within the container and between the first and second solvent, and creating a particle film at the liquid-liquid interface; a first support means; substrate extracting means; substrate supply means; compression means, reducing a distance between particles and push the film onto the substrate, wherein the compression means includes several pushing means mounted on a drive device, wherein at least two of the several pushing means are at least partially submerged in the second solvent during drive device rotation, and moved through the second solvent toward the first support means.

First claim

The invention claimed is:

1. A device for coating semiconductor/semiconductor precursor particles on a flexible substrate, wherein the device comprises:
a container configured to contain a first solvent and a second solvent substantially immiscible with each other;
injection means configured to inject a predetermined volume of a dispersion of at least one layered semiconductor material or its precursor(s) in the form of particles from underneath and up to a liquid-liquid interface formed within the container and between the first solvent and the second solvent, and creating a film of particles at the liquid-liquid interface;
a first support means configured to be able to be at least partially submerged in the first solvent, wherein the first support means is configured to support at least a portion of a substrate;
substrate extracting means configured to exert a force on the substrate causing the substrate to be drawn away from the liquid-liquid interface;
substrate supply means configured to provide a supply of the substrate; compression means, configured to reduce a distance between particles of the at least one layered semiconductor material or its precursor(s) of the film at the liquid-liquid interface and push the film onto the substrate, wherein the compression means comprises a plurality of means for pushing mounted on a drive device, the plurality of means for pushing configured such that at least two of the plurality of means for pushing may be at least partially submerged in the second solvent during rotation of the drive device, and moved through the second solvent toward the first support means.

2. The device according to claim 1 , wherein the plurality of means for pushing are substantially perpendicular with respect to drive direction and substantially perpendicularly with respect to plane, when they are submerged in the second solvent.

3. The device according to claim 1 , wherein a means for pushing comprises at least two substantially parallel pushing bars.

4. The device according to claim 3 , wherein the shortest distance between opposing faces of the two substantially parallel pushing bars is at least 50 mm and at most 150 mm.

5. The device according to claim 3 , wherein the pushing bars are made of a fluorinated plastic, aluminium, steel, brass, stainless steel.

6. The device according to claim 1 , wherein the number of means for pushing is at least 3.

7. The device according to claim 1 , wherein the drive device comprises elements made of: tetrafluoroethylene-perfluoropropylene (FEP), ethylene-tetrafluoroethylene (ETFE), polyfluoroalkoxy (PFA), polyvinylidene fluoride (PVDF), polyvinyl chloride (PVC), polypropylene (PP); polyurethane; polychloroprene (pc-rubber); metals or metal alloys.

8. The device according to claim 1 , wherein the first support means, the substrate extracting means, and the substrate supply means, each comprise one or more rollers.

9. A method for preparing a semiconducting thin film on a substrate surface using a device as claimed in claim 1 , comprising the following steps:
(1) providing a liquid-liquid interface of a first solvent and a second solvent, wherein the first solvent is polar, and the second solvent is non-polar;
(2) providing at least one layered semiconductor material or its precursor(s) in the form of particles in a third solvent in the form of a dispersion;
(3) injecting the dispersion of step (2) at the liquid-liquid interface obtained in step (1), in order to obtain an assembly of semiconductor/semiconductor precursor particles at the liquid-liquid interface;
(4) bringing the assembly of semiconductor/semiconductor precursor particles at the liquid-liquid interface obtained in step (3) into contact with a flexible substrate; and
(5) applying a surface pressure to the dispersion obtained in step (4) using the compression means, in order to obtain a particle film of semiconductor/semiconductor precursor on the substrate,
wherein the first solvent has a higher density than the second solvent;
wherein the first solvent and the second solvent are immiscible with each other and their densities are different by at least 0.01 g/mL; and
wherein the third solvent is miscible at least with one of the first solvent or the second solvent.

10. The method according to claim 9 , wherein the at least one layered semiconductor material is a transition metal dichalcogenide.

11. The method according to claim 9 , wherein at least one layered semiconductor material or its precursor(s) are in the form of nanoflakes with a significantly larger dimension in a direction perpendicular to the thickness direction.

12. The method according to claim 9 , wherein the transition metal-dichalcogenide is selected from the group consisting of MOS2, WS 2 , MoSe 2 , WSe 2 and MoTe 2 .

13. The method according to claim 9 , wherein the first solvent is selected from the group consisting of water, carboxylic acids, alcohols, ketones, organic sulfoxides, organic nitriles, amides and mixtures thereof.

14. The method according to claim 9 , wherein the first solvent is selected from the group consisting of water, acetic acid, ethylene glycol, methanol, ethanol, n-propanol, n-butanol, acetone, ethyl acetate, dimethyl sulfoxide, acetonitrile, dimethylformamide (DMF), dimethylsulfoxide (DMSO) and mixtures thereof.

15. The method according to claim 9 , wherein the second solvent is selected from the group consisting of linear and cyclic hydrocarbons, ethers and mixtures thereof.

16. The method according to claim 9 , wherein the second solvent is selected form the group consisting of pentane, hexane, heptane, octane, benzene, diethyl ether and mixtures thereof.

17. The method according to claim 9 , wherein the third solvent is selected from the group consisting of hexylamine, isopropanol, butanol, hexanol, water and mixtures thereof.

18. The method according to claim 9 , wherein the third solvent is hexylamine, hexanol or tert-butanol or a mixture thereof.

19. The method according to claim 9 , wherein the combination of the first solvent, the second solvent, and the third solvent is: ethylene glycol, hexane, and hexylamine; water/acetonitrile, pentane and tert-butanol; or water, heptane and n-butanol.

20. The method according to claim 9 , wherein the substrate is selected from the group consisting of indium-doped tin oxide (GGO) and fluorine-doped tin oxide (FTO)-coated polyethyleneterephthalate (PET).

21. The method according to claim 9 , wherein the angle of extraction of the substrate, with respect to the plane of the top of the mixture of the first and second solvents, is at least 10°.

22. A semiconducting thin film prepared by the method according to claim 9 .

Assignees

• Toyota Motor Europe

Inventors

• Johnson Hannah
• Kinge Sachin
• Sivula Kevin
• Wells Rebekah Anne

Classifications

• H10P14/2922

  being non-crystalline insulating materials, e.g. glass or polymers · CPC title

• H10P14/265 Primary

  using solutions · CPC title

• H10P14/3436 Primary

  being chalcogenide semiconductor materials not being oxides, e.g. ternary compounds · CPC title

• H10P14/3234

  being oxide semiconducting materials (Group IIB-VIA semiconductors H10P14/3224) · CPC title

• B05D1/206

  LB troughs · CPC title