Holding device, method of determining attraction abnormality in holding device, lithography apparatus, and method of manufacturing article
US-2024393682-A1 · Nov 28, 2024 · US
US12037695B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12037695-B2 |
| Application number | US-202017120799-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 14, 2020 |
| Priority date | Dec 18, 2019 |
| Publication date | Jul 16, 2024 |
| Grant date | Jul 16, 2024 |
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A method for manufacturing metal horological components, includes the steps of forming a multilevel mould made of a photosensitive resin, with a UV-LIGA method, and galvanically depositing a layer of at least one metal starting from a conductive layer in order to form a block that substantially reaches the upper surface of the photosensitive resin.
Opening claim text (preview).
The invention claimed is: 1. A method for manufacturing at least one horological component, comprising: a) providing a substrate and applying a first resin layer of photosensitive resin on the substrate; b) performing a hot stamping, using a stamp, of the first resin layer, by pressing the stamp up to a predefined distance from the substrate so as to keep a layer of resin, in order to shape the first resin layer, the stamp being made of transparent material; c) irradiating the shaped first resin layer through the stamp while the stamp is pressed against the substrate and in contact with the first resin layer in order to define at least a first level of the component; d) applying a second layer of photosensitive resin covering a resultant structure from step c), then irradiating the second resin layer through a mask defining a second level of the component and dissolving non-irradiated regions of the second photosensitive resin layer in order to form a mould comprising a first level and a second level; e) depositing an electrically conductive layer on surfaces of the first resin layer and the second resin layer; f) depositing a metal layer by electroforming in the mould, starting from the electrically conductive layer, in order to form the component; g) machining the metal layer by a mechanical method, so as to adjust a height of the component, and releasing the component. 2. The method according to claim 1 , wherein step b) is carried out under vacuum. 3. The method according to claim 1 , wherein during step b), the first resin layer is heated to between 70° C. and 150° C. 4. The method according to claim 1 , wherein the stamp has an imprint in relief in order to define said at least first level of the component. 5. The method according to claim 1 , wherein during step e), the electrically conductive layer is implemented by global deposition on all exposed surfaces of the first resin layer and the second resin layer. 6. The method according to claim 1 , wherein during step e), the electrically conductive layer is deposited by a physical vapour deposition, or printing with an ink or conductive resin. 7. The method according to claim 1 , wherein said electrically conductive layer is Au, Ti, Pt, Ag, Cr or Pd. 8. The method according to claim 1 , wherein the substrate is made of silicon. 9. The method according to claim 1 , wherein the electrically conductive layer has a thickness of between 50 nm and 500 nm.
Finishing the coated layer, e.g. drying, baking, soaking · CPC title
using electric, electrostatic or magnetic means; powder coating · CPC title
Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface · CPC title
Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title
Wheels; Pinions; Spindles; Pivots (bearings G04B31/00 {; chain wheels, spindles for chain wheels, also chains and driving weights G04B1/08}) · CPC title
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