High quality factor integrated acoustic resonant metamaterials with large frequency tuning range for reconfigurable radio-frequency front-ends

Patent metadata

Field	Value
Publication number	US-12034434-B2
Application number	US-202017627196-A
Country	US
Kind code	B2
Filing date	Aug 24, 2020
Priority date	Aug 23, 2019
Publication date	Jul 9, 2024
Grant date	Jul 9, 2024

Abstract

Piezoelectric acoustic metamaterial resonators include a piezoelectric substrate having a top surface and a bottom surface and a plurality of magnetostrictive members disposed on the top surface of the piezoelectric substrate and extending along a length of the piezoelectric substrate and spaced across a width of the piezoelectric substrate.

First claim

What is claimed is:

1. A piezoelectric acoustic metamaterial resonator, comprising:
a piezoelectric substrate having a top surface and a bottom surface; and
a plurality of magnetostrictive members disposed on the top surface of the piezoelectric substrate and extending along a length of the piezoelectric substrate and spaced across a width of the piezoelectric substrate,
wherein each of the magnetostrictive members includes a coil set which, when energized, produces a magnetic field that affects a mechanical property of the magnetostrictive members,
wherein the coil set for each magnetostrictive member is disposed on a top surface of the magnetostrictive member, and
wherein the coil set for each magnetostrictive member is configured to be energized with a DC current to change the Young's modulus of the magnetostrictive member.

2. A piezoelectric acoustic metamaterial resonator, comprising:
a piezoelectric substrate having a top surface and a bottom surface;
a plurality of magnetostrictive members disposed on the top surface of the piezoelectric substrate and extending along a length of the piezoelectric substrate and spaced across a width of the piezoelectric substrate; and
a coil set including a coil proximate to but physically separated from each magnetostrictive member which, when energized, produces a magnetic field that affects a mechanical property of at least one of the magnetostrictive members.

3. The piezoelectric acoustic metamaterial resonator of claim 2 wherein the coil set is included in a chip package containing the piezoelectric acoustic metamaterial resonator.

4. A piezoelectric acoustic metamaterial resonator, comprising:
a piezoelectric substrate having a top surface and a bottom surface;
a plurality of magnetostrictive members disposed on the top surface of the piezoelectric substrate and extending along a length of the piezoelectric substrate and spaced across a width of the piezoelectric substrate; and
at each of the magnetostrictive members:
a first electrode, having a first polarity, disposed between a corresponding one of the magnetostrictive members and the top surface of the piezoelectric substrate; and
a second electrode, having a second polarity, opposite the first polarity, disposed on the bottom surface of the piezoelectric substrate opposite the first electrode,

wherein the polarity of the first electrode of each successive magnetostrictive member of the plurality of magnetostrictive members alternates between positive and negative when an AC voltage is applied across each of the first and second electrodes.

5. The piezoelectric acoustic metamaterial resonator of claim 4 , wherein the first and second electrodes comprise aluminum.

6. A piezoelectric acoustic metamaterial resonator, comprising:
a piezoelectric substrate having a top surface and a bottom surface; and
a plurality of magnetostrictive members disposed on the top surface of the piezoelectric substrate and extending along a length of the piezoelectric substrate and spaced across a width of the piezoelectric substrate,
wherein each of the magnetostrictive members includes a coil set which, when energized, produces a magnetic field that affects a mechanical property of the magnetostrictive members, and
wherein each coil set further comprises:
a coil; and
an electrically insulating layer interposed between the coil and the top surface of the magnetostrictive member.

7. A piezoelectric acoustic metamaterial resonator, comprising:
a piezoelectric substrate having a top surface and a bottom surface;
a plurality of magnetostrictive members disposed on the top surface of the piezoelectric substrate and extending along a length of the piezoelectric substrate and spaced across a width of the piezoelectric substrate; and
a plurality of periodic cells, each including:
a first region extending along a width of each of the magnetostrictive members; and
a second region extending along the width of the spacing between two of the magnetostrictive members.

8. The piezoelectric acoustic metamaterial resonator of claim 7 , wherein the piezoelectric acoustic metamaterial resonator is configured to generate bandgaps in the first region responsive to the application of the AC voltage across each of the first and second electrodes simultaneous with energizing a coil of the magnetostrictive member with a DC current to change a mechanical property of the magnetostrictive member, the bandgaps preventing the first region from guiding energy between adjacent periodic cells to acoustically isolate the second region of the periodic cell from the adjacent periodic cells.

9. The piezoelectric acoustic metamaterial resonator of claim 7 , the piezoelectric acoustic metamaterial resonator configured to generate standing acoustic waves in the second region responsive to the application of the AC voltage across each of the first and second electrodes simultaneous with energizing a coil of the magnetostrictive member with a DC current to change a mechanical property of the magnetostrictive member.

10. The piezoelectric acoustic metamaterial resonator of claim 9 , wherein a resonant frequency of the standing acoustic waves is: fres=n·c(mod)/(W(a)+n·δ), wherein n is a mode order of the standing waves, W(a) is a width of the second region, and δ a penetration depth for a displacement field relative to the A0 mode in the first region.

11. A piezoelectric acoustic metamaterial resonator comprising:
a piezoelectric substrate having a top surface and a bottom surface;
a plurality of magnetostrictive members disposed on the top surface of the piezoelectric substrate and extending along a length of the piezoelectric substrate and spaced across a width of the piezoelectric substrate;
each magnetostrictive member having a coil set disposed on a top surface thereof and including:
a coil which is configured to be energized with a DC current to change the Young's modulus of the magnetostrictive member, and
an electrically insulating layer interposed between the coil and the top surface of the magnetostrictive member; and

at each of the magnetostrictive members:
a first electrode, having a first polarity, disposed between a corresponding one of the magnetostrictive members and the top surface of the piezoelectric substrate, and
a second electrode, having a second polarity, opposite the first polarity, disposed on the bottom surface of the piezoelectric substrate opposite the first electrode,

wherein the polarity of the first electrode of each successive magnetostrictive member of the plurality of magnetostrictive members alternates between positive and negative when an AC voltage is applied across each of the first and second electrodes.

12. A method for tuning a piezoelectric acoustic metamaterial resonator, comprising:
applying an AC voltage across each of a plurality of first and second electrodes, the first electrode having a first polarity and being disposed between a corresponding one of a magnetostrictive members and a top surface of a piezoelectric substrate on which the magnetostrictive members are disposed and the second electrode having a second polarity, opposite the first polarity and being disposed on a bottom surface of the piezoelectric substrate opposite the first electrode, wherein a polarity of the first electrode of each successive magnetostrictive member of the plurality of magnetostrictive members alternates between positive and negative; and
energizing, for at least one of the magnetostrictive members, a coil of a coil set disposed on a top surface thereof to produce a magnetic field to alter a mechanical property of the corresponding magnetostrictive member, wherein each

Assignees

• Univ Northeastern

Inventors

• Cassella Cristian

Classifications

• H03H9/02062

  Details relating to the vibration mode · CPC title

• H03B5/32

  being a piezoelectric resonator (selection of piezoelectric material H10N30/00) · CPC title

• H03H9/568

  consisting of a ladder configuration · CPC title

• H03L7/099

  concerning mainly the controlled oscillator of the loop · CPC title

• H03H9/22

  Constructional features of resonators consisting of magnetostrictive material · CPC title