Support element for a precision device, support frame for a precision device and precision device having such a support element or support frame

Patent metadata

Field	Value
Publication number	US-12031813-B2
Application number	US-202017608988-A
Country	US
Kind code	B2
Filing date	May 13, 2020
Priority date	May 28, 2019
Publication date	Jul 9, 2024
Grant date	Jul 9, 2024

Abstract

A support member for a precision device includes a vertical support element and a horizontal support element. The vertical support element extends along a vertical main direction of extent and includes a material with a low thermal expansion coefficient. The horizontal support element horizontally surrounds at least a portion of the vertical support element and is configured to horizontally support the vertical support element against tilting from the main direction of extent. The horizontal support element bounds a thermally insulating interior space in which the vertical support element is partially accommodated.

First claim

The invention claimed is:

1. A support member for a precision device, the support member comprising: a vertical support element extending along a vertical main direction of extent, the vertical support element including a material with a low thermal expansion coefficient; and a horizontal support element which horizontally surrounds at least a portion of the vertical support element and which is configured to horizontally support the vertical support element against tilting from the main direction of extent, the horizontal support element bounding a thermally insulating interior space in which the vertical support element is partially accommodated, wherein the interior space is sealed air-tight.

2. The support member as recited in claim 1 , wherein a vacuum is present in the interior space.

3. The support member as recited in claim 1 , wherein a linear thermal expansion coefficient of the vertical support element is at least a factor of two smaller than a linear thermal expansion coefficient of the horizontal support element.

4. The support member as recited in claim 1 , wherein the material with the low thermal expansion coefficient includes an Invar alloy.

5. The support member as recited in claim 1 , wherein the horizontal support element includes steel and/or aluminum.

6. The support member as recited in claim 1 , wherein the horizontal support element is axially symmetric with respect to the main direction of extent.

7. The support member as recited in claim 1 , wherein the horizontal support element is cylindrical in shape or square in a horizontal cross section.

8. The support member as recited in claim 1 , wherein the horizontal support element has a bearing portion that horizontally supports the vertical support element.

9. The support member as recited in claim 8 , wherein the bearing portion provides an air bearing for the vertical support element.

10. The support member as recited in claim 8 , wherein the bearing portion provides a fluid-tight bearing for the vertical support element.

11. The support member as recited in claim 8 , wherein a leaf spring is disposed between the vertical support element and the horizontal support element.

12. A support frame for a precision device, the support frame comprising a plurality of interconnected support members configured according to claim 1 , the vertical support elements of the plurality of support members having different main directions of extent in space.

13. A precision device in the form of an optical suspension, a metrology frame and/or a precision work surface, the precision device comprising at least one support member according to claim 1 .

14. A support member for a precision device, the support member comprising:
a vertical support element extending along a vertical main direction of extent, the vertical support element including a material with a low thermal expansion coefficient; and
a horizontal support element which horizontally surrounds at least a portion of the vertical support element and which is configured to horizontally support the vertical support element against tilting from the main direction of extent, the horizontal support element bounding a thermally insulating interior space in which the vertical support element is partially accommodated,
wherein a vacuum is present in the interior space.

Assignees

• Etel Sa

Inventors

• Garcia-Herreros Ivan
• Kobel Philipp

Classifications

• G01M11/04 Primary

  Optical benches therefor · CPC title

• G01B5/0014

  due to temperature (on machine tools B23Q11/0003) · CPC title

• G02B7/008

  with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation · CPC title

• G01B5/0004 Primary

  Supports (G01B5/025 takes precedence) · CPC title

• G01D11/30

  Supports specially adapted for an instrument; Supports specially adapted for a set of instruments · CPC title