Substrate transfer mechanism and substrate transferring method
US-11705359-B2 · Jul 18, 2023 · US
US12030759B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12030759-B2 |
| Application number | US-202017778615-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 2, 2020 |
| Priority date | Nov 25, 2019 |
| Publication date | Jul 9, 2024 |
| Grant date | Jul 9, 2024 |
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Official abstract text for this publication.
In a stacker crane, a cover to cover an elevation area of an elevation portion is integrally attachable to side surface portions of a mast, which includes a reinforcement portion and an adjuster. The reinforcement portion between a pair of the side surface portions in a Y direction extends toward an opposite direction to an elevation surface of an elevation surface defining portion and has a higher stiffness than that of each of the pair of side surface portions. The adjuster is spaced from the elevation surface defining portion in an X direction perpendicular to a Z direction and the Y direction, and both edges thereof extendible in the Y direction are contactable with the reinforcement portion and each of the pair of side surface portions.
Opening claim text (preview).
The invention claimed is: 1. A stacker crane, comprising: a mast including an elevation surface defining portion including an elevation surface extending in a first direction in which an elevation portion moves up and down and in a second direction perpendicular or substantially perpendicular to the first direction and a pair of side surface portions extending in a third direction perpendicular or substantially perpendicular to the first direction and the second direction from both edges of the elevation surface defining portion in the second direction toward an opposite side to a side at which the elevation portion is located; wherein the pair of side surface portions are structured such that a cover to cover an elevation area of the elevation portion is integrally attachable to the pair of side surface portions; and the mast includes: a reinforcement portion between the pair of side surface portions in the second direction, extending in the third direction from the elevation surface defining portion toward the opposite side to the side at which the elevation portion is located, and having a higher stiffness than that of the pair of side surface portions; and an adjuster located to provide a clearance with respect to the elevation surface defining portion in the third direction, the adjuster being capable of extending in the second direction, and provided so that both edges thereof contact with the reinforcement portion and the pair of side surface portions. 2. The stacker crane according to claim 1 , wherein a portion of the mast, the pair of side surface portions, and the reinforcement portion has an E shape or an approximate E shape in a plan view seen from the first direction. 3. The stacker crane according to claim 2 , wherein the mast includes a pair of flange portions connected to each other and standing up from both edges of a web portion provided on two channels. 4. The stacker crane according to claim 3 , further comprising the cover provided so as to cover the elevation area of the elevation portion and attached integrally to the pair of side surface portions. 5. The stacker crane according to claim 4 , wherein a fan filter is in a recessed space defined by the elevation surface defining portion, the pair of side surface portions, and the reinforcement portion in a plan view seen from the first direction. 6. The stacker crane according to claim 3 , wherein a fan filter is in a recessed space defined by the elevation surface defining portion, the pair of side surface portions, and the reinforcement portion in a plan view seen from the first direction. 7. The stacker crane according to claim 2 , further comprising the cover provided so as to cover the elevation area of the elevation portion and attached integrally to the pair of side surface portions. 8. The stacker crane according to claim 2 , wherein a fan filter is in a recessed space defined by the elevation surface defining portion, the pair of side surface portions, and the reinforcement portion in a plan view seen from the first direction. 9. The stacker crane according to claim 1 , wherein the mast includes a pair of flange portions connected to each other and standing up from both edges of a web portion on two channels. 10. The stacker crane according to claim 9 , further comprising the cover provided so as to cover the elevation area of the elevation portion and attached integrally to the pair of side surface portions. 11. The stacker crane according to claim 9 , wherein a fan filter is in a recessed space defined by the elevation surface defining portion, the pair of side surface portions, and the reinforcement portion in a plan view seen from the first direction. 12. The stacker crane according to claim 1 , further comprising the cover provided so as to cover the elevation area of the elevation portion and attached integrally to the pair of side surface portions. 13. The stacker crane according to claim 12 , wherein a fan filter is in a recessed space defined by the elevation surface defining portion, the pair of side surface portions, and the reinforcement portion in a plan view seen from the first direction. 14. The stacker crane according to claim 1 , wherein a fan filter is in a recessed space defined by the elevation surface defining portion, the pair of side surface portions, and the reinforcement portion in a plan view seen from the first direction.
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