Method for manufacturing holding device and holding device

Patent metadata

Field	Value
Publication number	US-12027406-B2
Application number	US-201917052634-A
Country	US
Kind code	B2
Filing date	Jan 8, 2019
Priority date	May 28, 2018
Publication date	Jul 2, 2024
Grant date	Jul 2, 2024

Abstract

A holding device manufacturing method includes a step of preparing a first joined body which includes a pre-machining ceramic member having a first surface and a fifth surface located opposite the first surface and approximately parallel to the first surface, a base member, and a joining portion disposed between the first surface of the pre-machining ceramic member and a third surface of the base member and joining the pre-machining ceramic member and the base member together. The thickness of the joining portion of the first joined body in a first direction, in which the first surface and the third surface face each other via the joining portion, increases from one end side toward the other end side of the joining portion in a second direction perpendicular to the first direction. The method includes a step of machining the fifth surface of the pre-machining ceramic member in the first joined body.

First claim

The invention claimed is:

1. A holding device comprising:
a ceramic member having a first surface and a second surface located opposite the first surface;
a base member having a third surface and a fourth surface located opposite the third surface and disposed such that the third surface is located on a side toward the first surface of the ceramic member; and
a joining portion disposed between the first surface of the ceramic member and the third surface of the base member and joining the ceramic member and the base member together,
the holding device being adapted to hold an object on the second surface of the ceramic member and being characterized in that
the holding device comprises a conductor provided in the ceramic member and disposed on an imaginary plane;
over the entirety of the joining portion, the joining portion increases in thickness in a first direction in which the first surface and the third surface face each other via the joining portion, from one end side of an arbitrary cross section of the joining portion toward the other end side of the arbitrary cross section of the joining portion in a second direction approximately perpendicular to the first direction;
the distance between the second surface and the imaginary plane on which the conductor is disposed decreases from one end side of a cross section of the conductor along the imaginary plane toward the other end side of the cross section of the conductor in the second direction; and
the joining portion extends along an entirety of the first surface of the ceramic member from one end side of the ceramic member to the other end side of the ceramic member.

2. A holding device according to claim 1 , wherein the conductor is a heater electrode.

3. A holding device according to claim 1 , wherein the first surface is approximately parallel to the third surface.

4. A method for manufacturing the holding device according to claim 1 ,
the method being characterized by comprising the steps of:
preparing a first joined body which includes a pre-machining ceramic member which is the ceramic member before formation of the second surface thereon and has the first surface and a fifth surface located opposite the first surface and approximately parallel to the first surface, the base member, and the joining portion disposed between the first surface of the pre-machining ceramic member and the third surface of the base member and joining the pre-machining ceramic member and the base member together, the joining portion of the first joined body increasing in thickness in a first direction in which the first surface and the third surface face each other via the joining portion, from one end side toward the other end side of the joining portion in a second direction approximately perpendicular to the first direction; and
machining the fifth surface of the pre-machining ceramic member in the first joined body.

5. A holding device manufacturing method according to claim 4 , wherein the first joined body is prepared by applying a joining agent to at least one of the first surface of the pre-machining ceramic member and the third surface of the base member such that its thickness in the first direction increases from the one end side toward the other end side in the second direction, disposing the first surface of the pre-machining ceramic member and the third surface of the base member to face each other via the joining agent, and curing the joining agent to form the joining portion.

6. A holding device manufacturing method according to claim 5 , wherein the first joined body is prepared by applying loads to portions of the joining portion located on the one end side and the other end side, respectively, in the second direction such that the load allied to the portion on the one end side is larger than the load allied to the portion on the other end side, wherein the application of the loads is performed at least before the curing of the joining agent, in the course of the curing of the joining agent, or after the curing of the joining agent.

7. A holding device manufacturing method according to claim 4 , wherein the first joined body is prepared by disposing a joining agent between the first surface of the premachining ceramic member and the third surface of the base member, and applying loads to portions of the joining portion located on the one end side and the other end side, respectively, in the second direction such that the load allied to the portion on the one end side is larger than the load allied to the portion on the other end side, wherein the application of the loads is performed at least before the curing of the joining agent, in the course of the curing of the joining agent, or after the curing of the joining agent.

8. A holding device manufacturing method according to claim 4 , further comprising the steps of
preparing a second joined body by joining the pre-machining ceramic member and the base member via a provisional joining portion and measuring a temperature distribution of the fifth surface of the pre-machining ceramic member in the second joined body; and
separating from each other the pre-machining ceramic member and the base member in the second joined body and joining the pre-machining ceramic member and the base member via a joining agent such that the first surface of the pre-machining ceramic member inclines, in relation to the third surface of the base member, whereby the first joined body is prepared.

Assignees

• Ngk Spark Plug Co
• Niterra Co Ltd

Inventors

• Kuribayashi Makoto
• Inoue Masahiro
• Sakakibara Toshimasa

Classifications

• H10P72/7624 Primary

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/7616

  characterised by a coating, a hardness or a material · CPC title

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• H10P72/72

  using electrostatic chucks · CPC title

• H10P72/0432

  mainly by conduction · CPC title