Three-dimensional silicon-based comb probe with optimized biocompatible dimensions for neural sensing and stimulation

Patent metadata

Field	Value
Publication number	US-12023162-B2
Application number	US-201816204607-A
Country	US
Kind code	B2
Filing date	Nov 29, 2018
Priority date	Nov 29, 2018
Publication date	Jul 2, 2024
Grant date	Jul 2, 2024

Abstract

A structure for monitoring and stimulation includes an external power supply unit. The structure also includes an internal hub communicatively coupled to the external power supply unit. The structure further includes a plurality of sensor modules communicatively coupled to the internal hub by a plurality of flexible interconnects. The plurality of sensor modules include three-dimensional (3D) comb sensor devices.

First claim

What is claimed is:

1. A structure for monitoring and stimulation comprising:
an external power supply unit;
an internal hub communicatively coupled to the external power supply unit; and
a plurality of sensor modules communicatively coupled to the internal hub by a plurality of flexible interconnects, each of the plurality of sensor modules comprising:
an interposer support structure;
a two-dimensional (2D) micro-grid array on a bottom surface of the interposer; and
a three-dimensional (3D) comb sensor device comprising only two combs, a first comb and a second comb separated by about 2 to about 6 millimeters (mm), wherein the first comb and the second comb each include a plurality of shanks, each shank comprising a shank base inserted into the interposer support structure, wherein the first comb and the second comb are arranged to extend from the bottom surface of the interposer and along opposite sidewalls of an outermost perimeter of the 2D micro-grid array, wherein an end of each shank comprises a reference electrode to sample a reference signal from white matter after anchoring the end of each respective shank into the white matter;

wherein each shank of the plurality of shanks comprises a double-sided shank having thereon a first plurality of sensing elements on a first side and a second plurality of sensing elements on a second side opposite the first side, each sensing element comprising a plurality of nano-patterned features protruding from an island, the sensing elements separated by dielectric spacers such that each respective sensing element is articulated as an individual sensor, wherein a first island comprises a first number of nano-patterned features and a second island comprises a second number of nano-patterned features different than the first number of nano-patterned features.

2. The structure of claim 1 , wherein the nano-patterned features comprise non-random topography comprising repeating individually articulated features, each repeating individually articulated feature comprising rods, cones, or annular structures.

3. The structure of claim 2 , wherein the each repeating individually articulated feature has an aspect ratio from about 1:1 to about 50:1, and a pitch from about 2:1 to about 20:1.

4. The structure of claim 1 , wherein surfaces of the 3D comb sensor devices are encased by a temporary coating.

5. The structure of claim 1 , wherein the plurality of flexible interconnects comprises a polyimide material.

6. A three-dimensional (3D) comb sensor structure comprising:
a plurality of sensor modules, the 3D comb sensor structure comprising:
an interposer support structure;
a two-dimensional (2D) micro-grid array on a bottom surface of the interposer, the 2D micro-grid array comprising a plurality of first sensing elements;
only two combs, a first comb and a second comb, each communicatively coupled to the 2D micro-grid array and comprising second sensing elements, the first comb and the second comb separated by about 2 to about 6 millimeters (mm), wherein the first comb and the second comb each include a plurality of shanks, each shank comprising a shank base inserted into the interposer support structure, wherein the first comb and the second comb are arranged to extend from the bottom surface of the interposer and along opposite sidewalls of an outermost perimeter of the 2D micro-grid array, wherein an end of each shank comprises a reference electrode to sample a reference signal from white matter after anchoring the end of each respective shank into the white matter; and
a logic chip coupled to the 2D micro-grid array that controls power distribution and data interface between the 2D micro-grid array and each of the first comb and the second comb;
wherein each shank of the plurality of shanks comprises a double-sided shank having thereon a first plurality of the second sensing elements on a first side and a second plurality of the second sensing elements on a second side opposite the first side, each sensing element comprising a plurality of nano-patterned features protruding from an island, the sensing elements separated by dielectric spacers such that each respective sensing element is articulated as an individual sensor, wherein a first island comprises a first number of nano-patterned features and a second island comprises a second number of nano-patterned features different than the first number of nano-patterned features.

7. The structure of claim 6 , wherein the nano-patterned features comprise non-random topography comprising repeating individually articulated features, each repeating individually articulated feature comprising rods, cones, or annular structures.

8. The structure of claim 7 , wherein the each repeating individually articulated feature has an aspect ratio from about 1:1 to about 50:1, and a pitch from about 2:1 to about 20:1.

9. The structure of claim 6 , wherein each of the first comb and the second comb features sensing elements on both exposed surfaces.

10. The structure of claim 6 , wherein the nano-patterned features further comprise a temporary coating arranged thereon.

11. A three-dimensional (3D) comb sensor structure comprising:
an interposer support structure;
a two-dimensional (2D) micro-grid array on a bottom surface of the interposer; and
a first comb and a second comb, each of the first comb and the second comb comprising a plurality of linearly arranged shanks, each shank comprising a shank base inserted into the interposer support structure, each of the first comb and the second comb are arranged to extend from the bottom surface of the interposer and along opposite sidewalls of an outermost perimeter of the 2D micro-grid array and comprising sensing elements containing a plurality of nanorods, wherein an end of each shank comprises a reference electrode to sample a reference signal from white matter after anchoring the end of each respective shank into the white matter; and
a logic chip coupled to the 2D micro-grid array that controls power distribution and data interface between the 2D micro-grid array and each of the first comb and the second comb, the first comb and the second comb separated by about 2 to about 6 millimeters (mm), and the first comb and the second comb being immediately adjacent to one another;
wherein each shank of the plurality of shanks comprises a double-sided shank having thereon a first plurality of the sensing elements on a first side and a second plurality of the sensing elements on a second side opposite the first side, each sensing element comprising the plurality of nanorods protruding from an island, the sensing elements separated by dielectric spacers such that each respective sensing element is articulated as an individual sensor, wherein a first island comprises a first number of nano-patterned features and a second island comprises a second number of nano-patterned features different than the first number of nano-patterned features.

12. The structure of claim 11 , wherein each nanorod of the plurality of nanorods has an aspect ratio from about 1:1 to about 50:1, and a pitch from about 2:1 to about 20:1.

13. The structure of claim 11 , wherein each of the shanks of the first comb and the second comb has a length of about 8 to about 12 millimeters (mm).

14. The structure of claim 13 , wherein surfaces of the 3D comb sensor structure are encompassed by a temporary coating.

Assignees

• IBM
• Univ Yale

Inventors

• Deligianni Hariklia
• Gerrard Jason
• Kinser Emily R
• Kyriakides Themis R
• Spencer Dennis D
• Yu Roy R
• Zaveri Hitten

Classifications

• A61B5/383 Primary

  Somatosensory stimuli, e.g. electric stimulation · CPC title

• A61B2562/0209

  Special features of electrodes classified in A61B5/24, A61B5/25, A61B5/283, A61B5/291, A61B5/296, A61B5/053 · CPC title

• A61B2560/0214

  of power generation or supply · CPC title

• A61B2562/046

  in a matrix array · CPC title

• A61B2562/0285

  Nanoscale sensors · CPC title