Flexible and stretchable semiconductor devices with reduced footprints and methods therefor
US-2022293859-A1 · Sep 15, 2022 · US
US12019372B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12019372-B2 |
| Application number | US-202016867435-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 5, 2020 |
| Priority date | May 9, 2019 |
| Publication date | Jun 25, 2024 |
| Grant date | Jun 25, 2024 |
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One or more embodiments relate to an electrically conductive polymer with a crosslinkable additive. The electrically conductive polymer is a directly photopatternable Poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) PEDOT:PSS film with cross-linked network made of a plurality of monomers. The directly photopatternable PEDOT:PSS film PEDOT as such has a better conductivity and stretchability compared to its other counterparts. The directly photopatternable PEDOT:PSS film can further be supplemented with poly(ethylene glycol) diacrylate (PEGDA) which can help with the removal of PSS. Advantageously, the PEGDA supplemented PEDOT:PSS film can exhibit a larger charge storage capacity.
Opening claim text (preview).
What is claimed is: 1. A film comprising: an electrically conductive polymer, wherein the electrically conductive polymer comprises poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS); and a cross-linked network intermixed with the electrically conductive polymer, wherein the crosslinked network is of poly(ethylene glycol) diacrylate (PEGDA), wherein a dry mass ratio of PEGDA versus PEDOT in the cross-linked network intermixed with the electrically conductive polymer is about 12% to about 65%, and wherein the intermixing of the cross-linked network with the electrically conductive polymer is configured to cause the film to have: an electrical conductivity of at least about 100 S/cm; a maximum tensile strain of at least about 10%; and a light transmittance at a wavelength of 550 nm of at least about 30%. 2. The film of claim 1 , wherein the intermixing of the cross-linked network with the electrically conductive polymer is further configured to cause the film to have a higher interfacial capacity and a lower impedance compared to a 3-Glycidyloxypropyl)trimethoxysilane (GOPS) crosslinked poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) in a range of about 1-10 kHz. 3. The film of claim 2 , wherein the film is further configured to sense an electrocardiographic or an electromyographic signal. 4. The film of claim 3 , wherein the film further includes an Au film on which the electrically conductive polymer and intermixed cross-linked network is coated. 5. The film of claim 4 , wherein the coating has a thickness in the range of 60 nm to 928 nm. 6. The film of claim 1 , wherein the intermixing of the cross-linked network with the electrically conductive polymer is further configured to cause the film to have a current density of up to about 15 μA/cm 2 . 7. The film of claim 1 , wherein the intermixing of the cross-linked network with the electrically conductive polymer is further configured to cause the film to have a charge storage capacity of at least 1.2 mC/cm 2 . 8. The film of claim 1 , wherein a molar ratio of PSS and PEDOT as characterized by an atomic ratio of sulfur (S) in PSS and PEDOT is about 1.8 or less. 9. The film of claim 1 , wherein a molar ratio of PSS and PEDOT as characterized by an atomic ratio of sulfur (S) in PSS and PEDOT is about 1.3 or less.
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