Sensor and electronic device

Patent metadata

Field	Value
Publication number	US-12019092-B2
Application number	US-202217680263-A
Country	US
Kind code	B2
Filing date	Feb 24, 2022
Priority date	Sep 2, 2021
Publication date	Jun 25, 2024
Grant date	Jun 25, 2024

Abstract

According to one embodiment, a sensor a sensor includes a base, a first support portion fixed to the base, and a first movable portion supported by the first support portion. The first movable portion includes first and second movable base portions, a connecting base portion, first and second movable beams, and first and second movable conductive portions. The first movable beam includes a first beam end portion, a first beam other end portion, and a first beam intermediate portion. The second movable beam includes a second beam end portion, a second beam other end portion, and a second beam intermediate portion. The first movable conductive portion includes a first crossing conductive portion, a first extending conductive portion, and a first other extending conductive portion. The second movable conductive portion includes a second crossing conductive portion, a second extending conductive portion, and a second other extending conductive portion.

First claim

What is claimed is:

1. A sensor, comprising:
a base;
a first support portion fixed to the base; and
a first movable portion supported by the first support portion and separated from the base, a gap being provided between the base and first movable portion, no other support portion being provided between the base and the first movable portion,
the first movable portion including:
a first movable base portion supported by the first support portion,
a second movable base portion, a second direction from the first movable base portion to the second movable base portion crossing a first direction from the base to the first movable portion,
a connecting base portion provided between the first movable base portion and the second movable base portion, the connecting base portion connecting the second movable base portion to the first movable base portion,
a first movable beam including a first beam end portion, a first beam other end portion, and a first beam intermediate portion, the first beam end portion being connected with the first movable base portion, the first beam other end portion being connected with the second movable base portion, the first beam intermediate portion is located between the first beam end portion and the first beam other end portion;
a second movable beam including a second beam end portion, a second beam other end portion, and a second beam intermediate portion, the second beam end portion being connected with the first movable base portion, the second beam other end portion being connected with the second movable base portion, the second beam intermediate portion being located between the second beam end portion and the second beam other end portion, the connection base portion being located between the first beam intermediate portion and the second beam intermediate portion in a third direction crossing a plane including the first direction and the second direction;
a first movable conductive portion connected with the first beam intermediate portion, the first beam intermediate portion being located between the first movable conductive portion and the connecting base portion in the third direction, the first movable conductive portion including:
a first crossing conductive portion connected with the first beam intermediate portion and extending along the third direction,
a first extending conductive portion connected with the first crossing conductive portion and extending along the second direction, and
a first other extending conductive portion connected with the first crossing conductive portion and extending along the second direction, the first other extending conductive portion being located between the first extending conductive portion and the first beam intermediate portion in the third direction; and

a second movable conductive portion connected with the second beam intermediate portion, the second beam intermediate portion being located between the connecting base portion and the second movable conductive portion in the third direction, the second movable conductive portion including:
a second crossing conductive portion connected with the second beam intermediate portion and extending along the third direction;
a second extending conductive portion connected with the second crossing conductive portion and extending along the second direction, and
a second other extending conductive portion connected with the second crossing conductive portion and extends along the second direction, the second other extending conductive portion being located between the second beam intermediate portion and the second extending conductive portion in the third direction; and

further comprising:
a first facing conductive portion facing at least a part of the first movable conductive portion; and
a second facing conductive portion facing at least a part of the second movable conductive portion,

wherein
at least a part of the first facing conductive portion is located between the first other extending conductive portion and the first extending conductive portion in the third direction, and
at least a part of the second facing conductive portion is located between the second other extending conductive portion and the second extending conductive portion in the third direction.

2. The sensor according to claim 1 , wherein
a length of the first other extending conductive portion along the second direction is longer than a length of the first extending conductive portion along the second direction, and
a length of the second other extending conductive portion along the second direction is longer than a length of the second extending conductive portion along the second direction.

3. The sensor according to claim 2 , wherein
the length of the first other extending conductive portion along the second direction is not less than 1.2 times the length of the first extending conductive portion along the second direction, and
the length of the second other extending conductive portion along the second direction is not less than 1.2 times the length of the second extending conductive portion along the second direction.

4. The sensor according to claim 2 , wherein
the length of the first other extending conductive portion along the second direction is longer than a length of the first other extending conductive portion along the third direction, and
the length of the second other extending conductive portion along the second direction is longer than a length of the second other extending conductive portion along the third direction.

5. The sensor according to claim 2 , wherein
the length of the first extending conductive portion along the second direction is longer than a length of the first crossing conductive portion along the second direction, and
the length of the second extending conductive portion along the second direction is longer than a length of the second crossing conductive portion along the second direction.

6. The sensor according to claim 2 , wherein
the first movable conductive portion further includes a first intermediate extending conductive portion,
the first intermediate extending conductive portion is connected with the first crossing conductive portion and extends along the second direction,
the first intermediate extending conductive portion is located between the first extending conductive portion and the first other extending conductive portion in the third direction,
a length of the first intermediate extending conductive portion along the second direction is between the length of the first extending conductive portion along the second direction and the length of the first other extending conductive portion along the second direction,
the second movable conductive portion further includes a second intermediate extending conductive portion,
the second intermediate extending conductive portion is connected with the second crossing conductive portion and extends along the second direction,
the second intermediate extending conductive portion is located between the second other extending conductive portion and the second extending conductive portion in the third direction, and
a length of the second intermediate extending conductive portion along the second direction is between the length of the second other extending conductive portion along the second direction and the length of the second extending conductive portion along the second direction.

7. The sensor according to claim 1 , wherein a mass of the second movable conductive portion is different from a mass of the first movable conductive portion.

8. The sensor according to claim 1 , wherein
the first movable conductive portion includes a first hole,
the second movable conductive portion does not include a hole, or the seco

Assignees

• Toshiba Kk

Inventors

• Masunishi Kei
• Tomizawa Yasushi
• Ogawa Etsuji
• Gando Ryunosuke
• Kaji Shiori
• Hiraga Hiroki
• Miyazaki Fumito
• Ono Daiki
• Uchida Kengo

Classifications

• B81B2201/0235

  Accelerometers · CPC title

• B81B3/0021

  Transducers for transforming electrical into mechanical energy or vice versa (dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00) · CPC title

• G01P15/125

  by capacitive pick-up · CPC title

• G01P2015/0871

  using stopper structures for limiting the travel of the seismic mass · CPC title

• G01P2015/0817

  for pivoting movement of the mass, e.g. in-plane pendulum · CPC title