Pattern forming method, electron beam- or extreme ultraviolet-sensitive resin composition, resist film using the same, method of manufacturing electronic device, and electronic device
US-2015370170-A1 · Dec 24, 2015 · US
US12017980B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12017980-B2 |
| Application number | US-201917276536-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 12, 2019 |
| Priority date | Sep 18, 2018 |
| Publication date | Jun 25, 2024 |
| Grant date | Jun 25, 2024 |
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Provided are a monofunctional phenolic compound used for producing an active ester resin capable of forming a cured product having excellent dielectric properties and excellent heat resistance, an active ester resin and a method for producing the active ester resin, and a thermosetting resin composition and a cured product of the thermosetting resin composition. Specifically, provided are a monofunctional phenolic compound including one or more vinylbenzyl groups and an active ester resin including a vinylbenzyl structure attached to a terminal group of the molecular chain and derived from the monofunctional phenolic compound. The vinylbenzyl structure preferably includes a vinylbenzyl-modified aryloxycarbonyl group.
Opening claim text (preview).
The invention claimed is: 1. A monofunctional phenolic compound comprising one or more vinylbenzyl groups, including a structure represented by Formula (1) or (2) wherein, in Formulae (1) and (2), R 1 represents a vinylbenzyl group and R 2 represents a hydrogen atom, an alkyl group, or an aryl group; in Formula (1), n is an integer of 1 to 5, m is an integer of 0 to 4, and the sum of n and m is 5; in Formula (2), n is an integer of 1 to 7 and m is an integer of 0 to 6; in Formula (2), the sum of n and m is 7; and, in Formulae (1) and (2), R 1 may be identical to or different from each other and R 2 may be identical to or different from each other. 2. A raw material composition for producing active ester resins, the raw material composition comprising the monofunctional phenolic compound according to claim 1 . 3. An active ester resin comprising a vinylbenzyl structure attached to a terminal group of a molecular chain of the active ester resin, the vinylbenzyl structure being derived from the monofunctional phenolic compound according to claim 1 . 4. A method for producing an active ester resin, the method comprising causing the monofunctional phenolic compound according to claim 1 to react with an aromatic polycarboxylic acid or derivative thereof. 5. The active ester resin according to claim 3 , wherein the vinylbenzyl structure includes a vinylbenzyl-modified aryloxycarbonyl group. 6. The active ester resin according to claim 3 , the active ester resin including vinylbenzyl groups attached to respective terminal groups of a backbone of the active ester resin. 7. The active ester resin according to claim 3 , the active ester resin including a structure represented by Formula (I) wherein, in Formula (I), n represents an integer of 0 to 20, X represents a reaction residue of a monofunctional phenolic compound including a vinylbenzyl group, and Y represents a reaction residue of a polyfunctional phenolic compound. 8. A thermosetting resin composition comprising the active ester resin according to claim 3 and a curing agent. 9. The thermosetting resin composition according to claim 8 , the thermosetting resin composition being used for substrates for electronic components. 10. A cured product of the thermosetting resin composition according to claim 8 . 11. A package substrate comprising the thermosetting resin composition according to claim 8 .
Organic materials · CPC title
containing two or more rings · CPC title
Monomers containing two or more unsaturated aliphatic radicals · CPC title
Phenols or alcohols · CPC title
in the presence of unsaturated monocarboxylic acids or unsaturated monohydric alcohols or reactive derivatives thereof · CPC title
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