Reducing plasma formation in an ion pump

Patent metadata

Field	Value
Publication number	US-12014913-B2
Application number	US-202017640673-A
Country	US
Kind code	B2
Filing date	Sep 4, 2020
Priority date	Sep 6, 2019
Publication date	Jun 18, 2024
Grant date	Jun 18, 2024

Abstract

An ion pump controller configured to alternate between increasing and decreasing a potential difference between an anode and a cathode of an ion pump multiple times during the starting of pumping.

First claim

What is claimed is:

1. An ion pump controller configured to alternate between increasing and decreasing a potential difference between an anode and a cathode of an ion pump multiple times during the starting of pumping, so as to limit formation of plasma in a pumping chamber of the ion pump while causing ions near the anode to move toward the cathode,
wherein the ion pump controller is configured to alternate between increasing and decreasing the potential difference between the anode and cathode until a condition is met and then increases the potential difference between the anode and cathode until the potential difference between the anode and cathode reaches a target potential difference, the condition being whether the potential difference between the anode and the cathode is greater than a threshold.

2. The ion pump controller of claim 1 wherein each successive increase in the potential difference between the anode and the cathode results in a larger potential difference between the anode and the cathode than the previous increase in the potential difference.

3. The ion pump controller of claim 1 wherein the ion pump controller pauses between decreasing and increasing the potential difference.

4. The ion pump controller of claim 1 wherein the ion pump controller increases the potential difference by controlling a switch such that the switch closes and the ion pump controller decreases the potential difference by controlling the switch such that the switch opens.

5. A method of operating an ion pump, the method comprising:
increasing and decreasing a potential difference between an anode and a cathode of the ion pump;
determining that a state of the ion pump has changed; and
in response to the change in the state, increasing the potential difference between the anode and the cathode to a target potential difference,
wherein the increasing and decreasing the potential difference comprises applying voltage pulses between the anode and the cathode, so as to limit formation of plasma in the ion pump,
wherein determining that a state of the ion pump has changed comprises determining that the potential difference between the anode and the cathode during a voltage pulse is above a threshold voltage.

6. The method of claim 5 wherein each voltage pulse is formed by closing a switch and then opening the switch.

7. The method of claim 6 wherein each voltage pulse provides a larger potential difference than all previous voltage pulses.

8. The method of claim 5 wherein each voltage pulse prevents a plasma from forming in the ion pump.

9. The method of claim 5 further comprising after decreasing the potential difference:
pausing for a period of time; and
after pausing, increasing the potential difference between the anode and the cathode and then decreasing the potential difference between the anode and the cathode.

10. An ion pump controller configured to automatically alternate between providing power and not providing power to at least one of an anode and a cathode in an ion pump during startup of the ion pump, so as to limit formation of a plasma in the ion pump,
wherein the ion pump controller is configured to determine a state of the ion pump and in response to the determined state stop alternating between providing power and not providing power and instead continuously provide power,
the ion pump controller being configured to determine the state of the ion pump and by determining a voltage between the anode and the cathode when providing power, wherein the ion pump controller stops alternating between providing power and not providing power and instead continuously provides power in response to the voltage between the anode and the cathode becoming greater than a threshold.

11. The ion pump controller of claim 10 further configured to pause between not providing power and providing power for a time period less than two seconds.

12. The ion pump controller of claim 10 comprising a solid-state switch that provides power to the ion pump when closed and does not provide power to the ion pump when open.

Assignees

• Edwards Vacuum Llc

Inventors

• Privet Evan
• Thierley Marcus Hans Robert

Classifications

• H01J17/24

  Means for absorbing or adsorbing gas, e.g. by gettering · CPC title

• H01J17/22

  Means for obtaining or maintaining the desired pressure within the tube · CPC title

• F04B37/02

  for evacuating by absorption or adsorption · CPC title

• H01J41/02

  Discharge tubes for measuring pressure of introduced gas {or for detecting presence of gas} · CPC title

• H01J41/12 Primary

  Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps · CPC title