Substrate transport with unequal number of drive shafts and arm links

Patent metadata

Field	Value
Publication number	US-12011829-B2
Application number	US-202217965907-A
Country	US
Kind code	B2
Filing date	Oct 14, 2022
Priority date	Jul 16, 2015
Publication date	Jun 18, 2024
Grant date	Jun 18, 2024

Abstract

A substrate transport arm including a first link, a second link, a third link, and a mechanical transmission including a pulley. The third link includes an end effector configured to support a substrate thereon. The mechanical transmission is configured to control rotation of the third link on the second link as a function of an angle between the first and second links such that, as the first and second links are rotated relative to each other, the wrist joint follows a wrist path which includes a curved portion. Rotation of the third link relative to the second link is completely mechanically dependent upon rotational location of the second link on the first link. The rotation of the third link about the second link is mechanically constrained and limited by mechanical dependence based upon the function of the angle between the first and second links.

First claim

What is claimed is:

1. An apparatus comprising:
a substrate transport arm comprising:
a first link;
a second link rotatably connected to the first link;
a third link rotatably connected to the second link at a wrist joint, where the third link comprises an end effector configured to support a substrate thereon; and
a mechanical transmission comprising a pulley, where the mechanical transmission is connected to the third link to control rotation of the third link on the second link, where the mechanical transmission is configured to control rotation of the third link on the second link as a function of an angle between the first and second links such that, as the first and second links are rotated relative to each other, the wrist joint follows a wrist path which comprises a curved portion, and where a center of the substrate supported on the end effector is moved along a substantially straight substrate path as the wrist joint follows the curved portion of the wrist path, where the substrate transport arm is configured such that the rotation of the third link relative to the second link is completely mechanically dependent upon, with the mechanical transmission on the second link, rotational location of the second link on the first link, where the rotation of the third link about the second link is mechanically constrained and limited by mechanical dependence based upon the function of the angle between the first and second links; and

a drive connected to the first link and the second link, where the drive comprises at least two coaxial drive shafts,
where at least one transmission belt, with at least one drive pulley connected to the second link, connects one of the drive shafts to the pulley, and
where the substrate transport arm has a first number of the links connected in series forming the arm, where the drive has a different second number of the coaxial drive shafts, and where the first number is more than the second number.

2. The apparatus as claimed in claim 1 where the first and second links have link lengths which are not equal.

3. The apparatus as claimed in claim 1 where the mechanical transmission is configured to rotate the third link relative to the second link, as the first and second links are rotated relative to each other, such that the third link has a first movement and a second movement, where the third link comprises a non-translational movement during the first movement, and where the third link comprises a translational movement during the second movement.

4. The apparatus as claimed in claim 1 where the mechanical transmission comprises the at least one transmission belt on the pulley.

5. The apparatus as claimed in claim 1 where the pulley is non-circular.

6. The apparatus as claimed in claim 1 where the wrist path comprises a straight portion, where the mechanical transmission is configured to move the third link with a rotational movement when the wrist joint follows the curved portion of the wrist path, and where the third link rotates relative to the second link and the third link moves with a translational movement when the wrist joint follows the straight portion of the wrist path.

7. The apparatus as claimed in claim 1 where the substrate transport arm is configured to provide the rotation of the third link about the second link based upon location of the second link on the first link, where the rotation is completely mechanically provided by the substrate transport arm in response to location of the second link on the first link.

8. The apparatus as claimed in claim 1 where the pulley is part of a variable ratio pulley system.

9. The apparatus as claimed in claim 1 where the mechanical transmission is a variable ratio mechanical transmission.

10. A method comprising:
connecting links in series to at least partially form a substrate arm, where the links comprise:
a first link;
a second link rotatably connected to the first link; and
a third link rotatably connected to the second link at a wrist joint, where the third link comprises an end effector configured to support a substrate thereon; and

connecting a mechanical transmission to the third link, where the mechanical transmission is configured to control rotation of the third link on the second link as a function of an angle between the first and second links, where the mechanical transmission comprises a pulley, and where the mechanical transmission is configured such that, as the first and second links are rotated relative to each other:
the wrist joint follows a wrist path which comprises a curved portion, and
a center of the substrate supported on the end effector is moved along a substantially straight substrate path as the wrist joint follows the curved portion of the wrist path,
where the substrate arm, with the mechanical transmission on the second link, is configured to completely mechanically constrain and limit the rotation of the third link about the second link as the function of the angle between the first and second links, where the substrate arm is configured such that the rotation of the third link relative to the second link is configured to be provided, with the mechanical transmission on the second link, mechanically limited based upon mechanical dependence completely upon of location of the second link relative to the first link; and

connecting a drive to the substrate arm, where the drive comprises at least two drive motors with drive shafts,
where the substrate transport arm has a first number of the links connected in series forming the arm, where the drive has a different second number of the drive shafts, and where the first number is more than the second number.

11. The method as in claim 10 where the mechanical transmission is connected to the third link to rotate the third link relative to the second link, as the first and second links are rotated relative to each other, such that the third link has a first movement and a second movement, where the third link has a non-translational movement during the first movement, and where the third link has a translational movement during the second movement.

12. The method as in claim 10 where connecting the mechanical transmission to the third link comprises the mechanical transmission comprising at least one transmission belt mounted on the pulley.

13. The method as in claim 10 where the links and the mechanical transmission are connected to each other such that the wrist path comprises a straight portion, where the mechanical transmission is configured to move the third link with a non-translational movement when the wrist joint follows the curved portion of the wrist path, and where the third link rotates relative to the second link and where the third link moves with a translational movement when the wrist joint follows the straight portion of the wrist path.

14. The method as in claim 10 where the substrate arm is configured to provide the rotation of the third link about the second link, completely mechanically provided by the substrate arm, in response to location of the second link on the first link.

15. The method as claimed in claim 10 where the pulley is part of a variable ratio pulley system.

16. The method as claimed in claim 10 where the mechanical transmission is a variable ratio mechanical transmission.

17. A method comprising:
connecting links in series to at least partially form a substrate arm, where the links comprise:
a first link;
a second link rotatably connected to the first link; and
a third link rotatably connected to the second link at a wrist joint, where the thir

Assignees

• Persimmon Tech Corporation

Inventors

• Wilkas Scott
• Hosek Martin
• Lipcon Jacob

Classifications

• H10P72/3302

  Mechanical parts of transfer devices · CPC title

• B25J11/0095

  Manipulators transporting wafers · CPC title

• B25J9/104

  with cables, chains or ribbons · CPC title

• B25J9/042 Primary

  comprising an articulated arm · CPC title

• H01L21/67742

  Electricity · mapped topic