Temperature and pressure sensors and methods

Patent metadata

Field	Value
Publication number	US-12007252-B2
Application number	US-202016896530-A
Country	US
Kind code	B2
Filing date	Jun 9, 2020
Priority date	Jan 6, 2017
Publication date	Jun 11, 2024
Grant date	Jun 11, 2024

Abstract

Temperature sensors, pressure sensors, methods of making the same, and methods of detecting pressures and temperatures using the same are provided. In an embodiment, the temperature sensor includes a ceramic coil inductor having a first end plate and a second end plate, wherein the ceramic coil inductor is formed of a ceramic composite that comprises carbon nanotubes or, carbon nanofibers, or a combination of carbon nanotubes and carbon nanofibers thereof dispersed in a ceramic matrix; and a thin film polymer-derived ceramic (PDC) nanocomposite disposed between the first and the second end plates, wherein the thin film PDC nanocomposite has a dielectric constant that increases monotonically with temperature.

First claim

We claim:

1. A pressure sensor comprising:
a disk-shaped polymer-derived ceramic (PDC) nanocomposite structure comprising walls that define an internal cavity having a first cavity surface and an opposed second cavity surface; and
a ceramic coil inductor disposed on an outer surface of the PDC nanocomposite structure having a first end plate, a coil portion extending circumferentially from the first end plate, and a second end plate, wherein the PDC nanocomposite structure is disposed between the first and second end plates,
wherein the ceramic coil inductor is formed of a ceramic composite that comprises carbon nanotubes, carbon nanofibers, or a combination thereof dispersed in a ceramic matrix, and
wherein the first and second cavity surfaces are spaced a distance from one another.

2. The pressure sensor of claim 1 , wherein the volume fraction of carbon nanotubes in the ceramic composite is about 15% to about 70%.

3. The pressure sensor of claim 1 , wherein the ceramic matrix comprises a PDC material.

4. The pressure sensor of claim 1 , wherein the ceramic composite comprises single-walled carbon nanotubes, multi-walled carbon nanotubes, or a combination thereof.

5. A method of detecting a change in pressure, the method comprising:
placing one or more pressure sensors of claim 1 in an environment; and
measuring a frequency shift of an electromagnetic signal induced in the ceramic coil inductor to detect a change in pressure of the environment.

6. The method of claim 5 , wherein each of the one or more pressure sensors further comprise a protrusion extending from the first cavity surface, the protrusion comprising an elevated regional surface, and wherein a change in the distance between the elevated regional surface of the protrusion and the second cavity surface results in the frequency shift, and wherein the change in distance is function of pressure within the environment.

7. The method of claim 6 , wherein the one or more pressure sensors are configured to detect the change in pressure in the environment with a pressure in the range from about 0 psi to about 40,000 psi.

8. The pressure sensor of claim 1 , further comprising a protrusion extending from the first cavity surface.

9. The pressure sensor of claim 8 , wherein the protrusion comprises an elevated regional surface spaced a distance from the second cavity surface, wherein a change in the distance between the elevated regional surface and the second cavity surface results in a frequency shift configured to indicate a pressure change within the environment.

10. The pressure sensor of claim 8 , wherein the protrusion in in the shape of a cylindrical disk.

11. A pressure sensor comprising:
a disk-shaped polymer-derived ceramic (PDC) nanocomposite structure comprising walls that define an internal cavity having a first cavity surface and an opposed second cavity surface; and
a ceramic coil inductor disposed on an outer surface of the PDF nanocomposite structure having a first end plate, a coil portion extending circumferentially from the first end plate, and a second end plate, wherein the PDC nanocomposite structure is disposed between the first and second end plates,
wherein the ceramic coil inductor is formed of a ceramic composite that comprises carbon nanotubes dispersed in a ceramic matrix, wherein the volume fraction of carbon nanotubes in the ceramic composite is from 15% to 70%,
wherein a protrusion extends from the first cavity surface, the protrusion having an elevated regional surface,
wherein the elevated regional surface of the protrusion and the second cavity surface are spaced a distance from one another and a change in the distance between the elevated regional surface of the protrusion and the second cavity surface produces a frequency shift of an electromagnetic signal induced in the ceramic coil inductor to detect a change in pressure of an environment, and
wherein the pressure sensor is configured to detect the change in pressure in the environment with a pressure in the range from 0 psi to 40,000 psi.

Assignees

• Univ Florida State Res Found Inc
• Us Gov Air Force

Inventors

• Xu Chengying
• Schrand Amanda
• Soto Reamonn

Classifications

• H01F41/041

  Printed circuit coils (apparatus or processes for manufacturing printed circuits in general H05K3/00) · CPC title

• H01F17/0006

  Printed inductances (printed coils for dynamo-electric machines H02K3/26; printed circuits H05K) · CPC title

• G01L9/0075

  using a ceramic diaphragm, e.g. alumina, fused quartz, glass · CPC title

• H01G11/22

  Electrodes · CPC title

• G01K7/32

  using change of resonant frequency of a crystal · CPC title