Semiconductor wafer stocker apparatus and wafer transferring methods using the same
US-9543178-B2 · Jan 10, 2017 · US
US12006144B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12006144-B2 |
| Application number | US-202117517963-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 3, 2021 |
| Priority date | Nov 10, 2020 |
| Publication date | Jun 11, 2024 |
| Grant date | Jun 11, 2024 |
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An apparatus for storage of a carrying material, includes: a body frame; a plurality of loading members installed on the body frame and disposed such that a carrying material forms a plurality of layers in upper and lower directions; a driving unit connected to at least one of the plurality of loading members; and an auxiliary coupling unit provided in a portion of the plurality of loading members for attachment and detachment to and from a neighboring loading member, wherein the plurality of loading members are provided with a plurality of first loading members fixedly installed at a lower end portion of the body frame, and a plurality of second loading members disposed above the first loading member and movably installed on the body frame, wherein the driving unit is connected to at least one of the plurality of second loading members, wherein the auxiliary coupling unit includes an electromagnet installed at one end of the second loading members, and a magnetic body installed at the other end of the second loading members and the body frame to correspond to the electromagnet.
Opening claim text (preview).
What is claimed is: 1. An apparatus for storage of a carrying material, comprising: a body frame; a plurality of loading members installed on the body frame and disposed such that a carrying material forms a plurality of layers in upper and lower directions; a driving unit connected to at least one of the plurality of loading members; and an auxiliary coupling unit provided in a portion of the plurality of loading members for attachment and detachment to and from a neighboring loading member, wherein the plurality of loading members are provided with a plurality of first loading members fixedly installed in a lower end portion of the body frame, and a plurality of second loading members disposed above the first loading members and movably installed on the body frame, wherein the driving unit is connected to at least one of the plurality of second loading members, wherein the auxiliary coupling unit includes an electromagnet installed at one end of the second loading members, and a magnetic body installed at an other end of the second loading members and the body frame to correspond to the electromagnet. 2. The apparatus for storage of a carrying material of claim 1 , wherein the driving unit comprises a driving source fixedly installed on the body frame, a power transmission member connected to the driving source to transmit power, and a connection member connecting the power transmission member and a second loading member from among the plurality of second loading members, wherein the power transmission member includes a pulley, and a timing belt connected to the pulley. 3. The apparatus for storage of a carrying material of claim 2 , wherein the driving unit further comprises a reduction gear connecting the pulley and the driving source. 4. The apparatus for storage of a carrying material of claim 1 , wherein the body frame is provided with a guide rail along which the plurality of second loading members are moved. 5. The apparatus for storage of a carrying material of claim 1 , wherein the plurality of loading members are provided with a locking protrusion for preventing separation of the carrying material. 6. The apparatus for storage of a carrying material of claim 1 , wherein the plurality of loading members are disposed to form two layers. 7. The apparatus for storage of a carrying material of claim 6 , wherein a number of the first loading members is one more than a number of the second loading members. 8. The apparatus for storage of a carrying material of claim 1 , wherein a number of the plurality of second loading members that are moved when the driving unit is driven is selectable based on operation of the electromagnet in the auxiliary coupling unit in the plurality of second loading members.
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