Micro-pump fluidic strategy for fabricating perovskite microwire array-based devices on semiconductor platforms and method

Patent metadata

Field	Value
Publication number	US-12005445-B2
Application number	US-202117323228-A
Country	US
Kind code	B2
Filing date	May 18, 2021
Priority date	May 18, 2020
Publication date	Jun 11, 2024
Grant date	Jun 11, 2024

Abstract

A method for making ion-crystal semiconductor material based micro- and/or nanowires, MNWs, embedded into a semiconductor substrate, includes forming a structure into the semiconductor substrate, wherein the structure has each of a width and a depth less than 10 μm; pumping an ion-crystal semiconductor material as an ion solution into the structure, wherein the pumping is achieved exclusively due to capillary forces; flowing the ion solution through the structure to fill the structure; crystallizing the ion-crystal semiconductor material inside the structure to form the MNWs; and adding electrodes to ends of the MNWs.

First claim

What is claimed is:

1. A lab-on-chip device comprising:
a semiconductor substrate;
a power source integrated into the semiconductor substrate;
a sensor integrated into the semiconductor substrate; and
a processor integrated into the semiconductor substrate,
wherein the processor is configured to receive a measurement from the sensor and the power source is configured to supply electrical power to the sensor and the processor,
wherein each of the power source, the sensor, and the processor comprises a plurality of micro- and/or nanowires, MNWs, embedded in corresponding plurality of micro-channels, which extend along a surface of the semiconductor substrate, and
wherein each of a width and a depth of each micro-channel of the plural micro-channels is less than 10 μm.

2. The device of claim 1 , wherein each MNW of the plural MNWs includes an ion-crystal semiconductor material.

3. The device of claim 1 , wherein the plural micro-channels are parallel, linear, micro-channels.

4. The device of claim 3 , further comprising:
additional micro-channels that are non-linear.

5. The device of claim 1 , wherein a width of each micro-channel of the micro-channels is less than 1 μm.

6. The device of claim 1 , further comprising:
an oxide layer provided between the plural micro-channels and the plural MNWs.

7. The device of claim 1 , wherein each MNW of the plural MNWs includes a perovskite material.

Assignees

• Univ King Abdullah Sci & Tech

Inventors

• Xin Bin
• Roqan Iman S

Classifications

• H10F77/12

  Active materials · CPC title

• H10F77/1437

  Quantum wires or nanorods · CPC title

• B81B2203/0338

  Channels · CPC title

• B01L2300/0663

  Whole sensors · CPC title

• B01L2200/10

  Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept · CPC title