Methods of fluorinating filters used in the manufacture of a semiconductor device
US-2019105613-A1 · Apr 11, 2019 · US
US12005383B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12005383-B2 |
| Application number | US-201916969288-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 18, 2019 |
| Priority date | Feb 20, 2018 |
| Publication date | Jun 11, 2024 |
| Grant date | Jun 11, 2024 |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
A method for fluorinating a filter for a pipette tip, the filter being made of a solid porous structure made of polyolefin. The method comprises the following steps: (a) placing the filter in an enclosure, (b) creating a vacuum in the enclosure, and (c) bringing the filter into contact with a fluorination agent injected into the enclosure in a gaseous state, the fluorination agent being made up of difluorine F2, the difluorine F2 being injected into the enclosure at a partial pressure between 100 Pa and 10000 Pa and step (c) being done at a temperature between 0° C. and 100° C. A pipette tip comprising a filter modified by the fluorination method, a method for producing such a tip, as well as a withdrawing pipette equipped with such a tip.
Opening claim text (preview).
What is claimed is: 1. Method for fluorinating a filter for a pipette tip, this filter being formed by a porous solid polyolefin structure, characterized in that it comprises the following steps: (a) placing the filter in an enclosure, (b) creating a vacuum in the enclosure, and (c) contacting the filter with a fluorination agent introduced in the gaseous state into the enclosure, in that the fluorination agent consists of difluorine F 2 , in that the difluorine F 2 is introduced into the enclosure at a partial pressure between 100 Pa and 10000 Pa, in that step (c) is conducted at a temperature between 0° C. and 100° C., and further comprising after step (c): (e 1 ) creating a vacuum in the enclosure, followed by (e 2 ) contacting the filter with dihydrogen or a mixture comprising dihydrogen, the dihydrogen or mixture comprising dihydrogen comprising dihydrogen being introduced in the gaseous state into the enclosure. 2. Fluorination method according to claim 1 , wherein the polyolefin is chosen from a polyethylene and a polypropylene. 3. Fluorination method according to claim 2 , wherein the polyolefin is polyethylene. 4. Fluorination method according to claim 1 , wherein the difluorine F 2 is introduced into the enclosure at a partial pressure between 500 Pa and 8000 Pa. 5. Fluorination method according to claim 1 , wherein step (c) is conducted at a temperature between 10° C. and 60° C. 6. Fluorination method according to claim 1 , wherein step (c) is carried out for a duration between 1 min and 60 min. 7. Fluorination method according to claim 1 , wherein, during step (c), a number of moles of difluorine greater than or equal to the equivalent number of moles of hydrogen atoms of the polyolefin is introduced. 8. Fluorination method according to claim 1 , wherein the mixture comprises dihydrogen and nitrogen. 9. Fluorination method according to claim 8 , wherein the volume percentage of dihydrogen in this mixture is greater than or equal to 2% vol. 10. Fluorination method according to claim 1 , wherein, during step (e 2 ), a number of moles of dihydrogen less than or equal to the number of moles of difluorine introduced during step (c) is introduced. 11. Fluorination method according to claim 1 , wherein step (e 2 ) is carried out for a duration between 10 min and 2 h. 12. Fluorination method according to claim 1 , wherein step (e 2 ) is conducted at a temperature between 0° C. and 200° C. 13. Fluorination method according to claim 1 , wherein, during steps (b) and (e 1 ), the pressure in the enclosure is less than or equal to 100 Pa. 14. Fluorination method according to claim 1 , wherein step (c) is monitored by infrared spectroscopy. 15. Fluorination method according to claim 14 , wherein step (c) is stopped when this ratio ACH 2 /ACF x reaches a value less than or equal to 15. 16. Fluorination method according to claim 14 , wherein step (c) is monitored by tracking the evolution of the ratio ACH 2 /ACF x of the area of the infrared vibration bands corresponding to the —CH 2 groups over the sum of the areas of the infrared vibration bands corresponding to the —CHF— groups and to the —CF 2 groups. 17. Method for producing a pipette tip comprising a fluorinated filter, the method comprising the following steps: (i) providing a filter formed by a porous solid polyolefin structure, (ii) fitting the filter in the pipette tip, and (iii) fluorinating the filter by implementing the fluorination method according to claim 1 . 18. Fluorination method according to claim 1 , further comprising a step (d) of removing the by-products formed during step (c), steps (e 1 ) and (e 2 ) being performed after step (d). 19. Fluorination method according to claim 18 , wherein step (d) is carried out by degassing the by-products during step (c). 20. Fluorination method according to claim 19 , wherein step (d) is carried out by vacuum degassing the by-products formed during step (c). 21. Fluorination method according to claim 18 , wherein steps (c) and (d) are carried out successively, step (d) of removing the by-products being carried out at the end of step (c). 22. Fluorination method according to claim 18 , wherein step (d) is carried out by chemical trapping of the by-products formed during step (c).
Iso-olefin halogenated homopolymers or copolymers · CPC title
Filter · CPC title
of the plunger pump type · CPC title
Filtering material manufacturing · CPC title
Rendering the filter material hydrophobic · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.