Spinning disk with electrostatic clamped platens for ion implantation

Patent metadata

Field	Value
Publication number	US-12002649-B2
Application number	US-202117547623-A
Country	US
Kind code	B2
Filing date	Dec 10, 2021
Priority date	Dec 10, 2021
Publication date	Jun 4, 2024
Grant date	Jun 4, 2024

Abstract

A system comprising a spinning disk is disclosed. The system comprises a semiconductor processing system, such as a high energy implantation system. The semiconductor processing system produces a spot ion beam, which is directed to a plurality of workpieces, which are disposed on the spinning disk. The spinning disk comprises a rotating central hub with a plurality of platens. The plurality of platens may extend outward from the central hub and workpieces are electrostatically clamped to the platens. The plurality of platens may also be capable of rotation. The central hub also controls the rotation of each of the platens about an axis orthogonal to the rotation axis of the central hub. In this way, variable angle implants may be performed. Additionally, this allows the workpieces to be mounted while in a horizontal orientation.

First claim

What is claimed is:

1. A spinning disk to process a plurality of workpieces, comprising:
a central hub adapted to rotate about a central axis;
a plurality of spokes extending radially outward from the central hub, wherein each of the plurality of spokes is adapted to rotate about a respective axis extending radially from the central hub;
a platen disposed on a distal end of each of the plurality of spokes, each platen comprising a plurality of electrodes and configured to electrostatically clamp a respective workpiece; and
a plurality of rotary motors disposed in the central hub, each in communication with a respective one of the plurality of spokes and configured to rotate the respective one of the plurality of spokes.

2. The spinning disk of claim 1 , wherein each rotary motor rotates the respective one of the plurality of spokes at an angle between −90° and 90°.

3. The spinning disk of claim 1 , wherein each rotary motor rotates the respective one of the plurality of spokes at an angle of up to 180°.

4. The spinning disk of claim 1 , further comprising a sensor disposed on a back surface of at least one of the platens to measure a characteristic of an ion beam.

5. The spinning disk of claim 4 , wherein the sensor comprises an array of holes.

6. The spinning disk of claim 4 , wherein the sensor comprises a slot.

7. An ion implantation system, comprising:
an ion source to generate ions;
an accelerator to accelerate the ions and create a spot beam; and
the spinning disk of claim 1 .

8. The ion implantation system of claim 7 , wherein the spinning disk is configured to translate in a direction perpendicular to the central axis resulting in a two dimensional mechanical scanning.

9. The ion implantation system of claim 8 , wherein the central hub is rotatably mounted to a structure, wherein the structure translates linearly in a direction perpendicular to the central axis.

10. The ion implantation system of claim 8 , wherein the central hub is rotatably mounted to a pivoting arm, wherein the pivoting arm rotates so as to translate the spinning disk in a direction perpendicular to the central axis.

11. A spinning disk to process a plurality of workpieces, comprising:
a central hub adapted to rotate about a central axis;
a hub controller disposed within the central hub;
a plurality of spokes extending radially outward from the central hub, wherein each of the plurality of spokes is adapted to rotate about a respective axis extending radially from the central hub;
a platen disposed on a distal end of each of the plurality of spokes and configured to electrostatically clamp a respective workpiece; and
a plurality of rotary motors disposed in the central hub, each in communication with a respective one of the plurality of spokes and configured to rotate the respective one of the plurality of spokes.

12. The spinning disk of claim 11 , wherein the hub controller is configured to execute a sequence to mount a workpiece on a platen, the sequence to mount the workpiece comprising:
actuating one of the plurality of rotary motors to rotate the platen such that a front surface of the platen is horizontal to allow the workpiece to be placed on the front surface; and
enabling electrostatic clamping of the platen after the workpiece has been placed on the front surface.

13. The spinning disk of claim 12 , comprising valves to regulate a flow of backside gas to one or more of the platens.

14. The spinning disk of claim 13 , wherein the sequence to mount the workpiece further comprises:
enabling the flow of backside gas after the workpiece has been electrostatically clamped.

15. The spinning disk of claim 14 , wherein the sequence to mount the workpiece further comprises:
actuating one of the plurality of rotary motors to rotate the platen such that the front surface of the platen is at a desired angle of implant after the workpiece has been electrostatically clamped.

16. The spinning disk of claim 11 , wherein the hub controller is configured to execute a sequence to dismount a workpiece from a platen, the sequence comprising:
actuating one of the plurality of rotary motors to rotate the platen such that a front surface of the platen is horizontal to allow the workpiece to be removed from the front surface; and
disabling electrostatic clamping of the platen after the platen is rotated to a horizontal position.

17. The spinning disk of claim 16 , comprising valves to regulate a flow of backside gas to one or more of the platens.

18. The spinning disk of claim 17 , wherein the sequence to dismount the workpiece further comprises:
disabling the flow of backside gas before the electrostatic clamping has been disabled.

19. The spinning disk of claim 11 , further comprising a sensor disposed on a back surface of at least one of the platens and wherein the hub controller is configured to execute a sequence to measure characteristics of an incoming ion beam, the sequence comprising:
actuating one of the plurality of rotary motors to rotate the platen such that the back surface of the platen is exposed to the incoming ion beam so that the incoming ion beam strikes the sensor; and
receiving an output from the sensor, wherein the output is indicative of a characteristic of the incoming ion beam.

20. The spinning disk of claim 11 , comprising a temperature sensor disposed in one or more of the platens, wherein the hub controller monitors a temperature of the platen.

Assignees

• Applied Materials Inc

Inventors

• Mitchell Robert
• Sinclair Frank
• Olson Joseph C
• Weaver William T
• Parisi Nick

Classifications

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/7608

  characterised by a plurality of separate clamping members, e.g. clamping fingers · CPC title

• H10P72/72

  using electrostatic chucks · CPC title

• H01J2237/24535

  Beam current · CPC title